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2. Time-of-flight mass spectrometry diagnostics in deep oscillation magnetron sputtering (DOMS) of titanium.

Author

Sanekata, Masaomi, Nakagomi, Yuki, Hirayama, Mutsuki, Nishida, Hiroshi, Nishimiya, Nobuo, Tona, Masahide, Yamamoto, Hiroaki, Tsukamoto, Keizo, Fuke, Kiyokazu, Ohshimo, Keijiro, Koyasu, Kiichirou, and Misaizu, Fuminori

Subjects
*TIME-of-flight mass spectrometry, *MAGNETRON sputtering, *OSCILLATIONS, *TITANIUM, *PLASMA materials processing
Abstract

Reflectron-type time-of-flight mass spectrometry was applied to the time-resolved component analysis of deep oscillation magnetron sputtering (DOMS), which has been developed as a technique of modulated pulsed magnetron sputtering. In the present study, the DOMS of a Ti target was performed under an Ar gas atmosphere by using a DOMS-specific control waveform consisting of 25 current and/or power pulses. The time evolution of the formation of ionized species (Ar+, Ar2+, Ti+, and Ti2+) after the application of the first discharge pulse was observed at the position corresponding to the deposition region. This study revealed that the plasma build-up process from non-metallic plasma to metallic plasma takes approximately two micropulses (around 100 μs from ignition) in DOMS discharge. In addition, we have found the possibility of studying sputtering processes, such as the rarefaction, and refilling processes of Ar as a function of pulse number through DOMS research. [ABSTRACT FROM AUTHOR]

Published
2022
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4. Dependence of Optical Emission Spectra on Argon Gas Pressure during Modulated Pulsed Power Magnetron Sputtering (MPPMS)

Author

Sanekata, Masaomi, primary, Nishida, Hiroshi, additional, Nakagomi, Yuki, additional, Hirai, Yoshihiro, additional, Nishimiya, Nobuo, additional, Tona, Masahide, additional, Hirata, Naoyuki, additional, Yamamoto, Hiroaki, additional, Tsukamoto, Keizo, additional, Ohshimo, Keijiro, additional, Misaizu, Fuminori, additional, and Fuke, Kiyokazu, additional

Published
2021
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5. Delayed Discharge Bridging Two Sputtering Modes from Modulated Pulsed Power Magnetron Sputtering (MPPMS) to Deep Oscillation Magnetron Sputtering (DOMS)

Author

Sanekata, Masaomi, primary, Nishida, Hiroshi, additional, Watabe, Tatsuya, additional, Nakagomi, Yuki, additional, Hirai, Yoshihiro, additional, Nishimiya, Nobuo, additional, Tona, Masahide, additional, Yamamoto, Hiroaki, additional, Hirata, Naoyuki, additional, Tsukamoto, Keizo, additional, Ohshimo, Keijiro, additional, Misaizu, Fuminori, additional, and Fuke, Kiyokazu, additional

Published
2021
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6. Time-of-flight mass spectrometric diagnostics for ionized and neutral species in high-power pulsed magnetron sputtering of titanium

Author

Tsukamoto, Keizo, primary, Tamura, Tetsuro, additional, Matsusaki, Hiromi, additional, Tona, Masahide, additional, Yamamoto, Hiroaki, additional, Nakagomi, Yuki, additional, Nishida, Hiroshi, additional, Hirai, Yoshihiro, additional, Nishimiya, Nobuo, additional, Sanekata, Masaomi, additional, Ohshimo, Keijiro, additional, Koyasu, Kiichirou, additional, and Misaizu, Fuminori, additional

Published
2020
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