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1. Development of Yttrium alloy ion source and its application in nanofabrication

Author

Kukharchyk, Nadezhda, Neumann, Ronna, Mazarov, Swetlana, Bushev, Pavel, Wieck, Andreas, and Mazarov, Paul

Subjects
Physics - Instrumentation and Detectors
Abstract

We present a new YAuSi Liquid Metal Alloy Ion Source (LMAIS), generating focused ion beams of yttrium ions, and its prospective applications for nanofabrication, sample preparation, lithographic and implantation processes. Working parameters of the AuSiY LMAIS are similar to other gold-silicon based LMAIS. We found anomalously high emission current of triple charged Yttrium ions. Influence of Yttrium implantation on optical qualities of the implanted ion-ensembles is shown in luminescence of co-implanted Erbium ions.

Published
2016
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