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The x-ray spectral continuum from Cu and Rh targets for primary voltages of 15, 20, 25 and 30 kilovolts is computed using the Monte Carlo simulation technique. The Mott cross section, which describes the elastic scattering process, and Bethe stopping power equation, which deals with the inelastic scattering, are used as the basis for the application of the Monte Carlo method. The results of the Monte Carlo method are verified by performing experimental measurements with an electron probe microanalyzer.

Over the past decade, multiple-scanning-probe microscope systems with independently controlled probes have been developed for nanoscale electrical measurements. We developed a quadruple-scanning-probe tunneling microscope (QSPTM) that can determine and control the probe position through scanning-probe imaging. The difficulty of operating multiple probes with submicrometer precision drastically increases with the number of probes. To solve problems such as determining the relative positions of the probes and avoiding of contact between the probes, we adopted sample-scanning methods to obtain four images simultaneously and developed an original control system for QSPTM operation with a function of automatic positional recognition. These improvements make the QSPTM a more practical and useful instrument since four images can now be reliably produced, and consequently the positioning of the four probes becomes easier owing to the reduced chance of accidental contact between the probes.