Search

EUV pellicles are needed to support EUV lithography in high volume manufacturing. We demonstrate progress in cap layer design for increased EUV transmission and infrared emission of the Polysilicon-film. In our research lab we obtained EUV transmission of 90% and good emissivity for a fully capped pSi film. We also discuss results on next generation EUV pellicle films. These include metal-silicides and graphite. Next-gen film performance is compared to the current generation pSi film. These films are expected to be stable at higher operating temperature than pSi. Metal-silicides have the advantage of sharing a similar process flow as that of pSi, while graphite shows ultimate high temperature performance at the expense of a more complicated manufacturing flow. Capping layers are needed here as well and capping strategies are discussed for these film generations.

Theory calculations using the Lifshitz theory and atomic force microscopy force measurements show that Casimir/van der Weals dispersive forces have a strong dependence on material optical properties and surface roughness. At separations below 100 nm the roughness effect is manifested through a strong deviation from the normal scaling of the force with separation distance. Moreover, knowledge of precise optical properties of metals is very important for accurate force predictions rather than referring to idealized defect free material models. Finally, we compare the Casimir/van der Weals forces to capillary adhesive forces in order to illustrate their significance in stiction problems, which are important for motion analysis of microelectromechanical (MEMS) systems.

We have investigated the morphology and surface roughness of several commercially available microspheres to determine their suitability for force measurements using the atomic force microscope. The roughness varies considerably, depending on sphere size and material, ranging from nearly ideally flat up to micrometer-sized features. Because surface roughness significantly influences the magnitude and accuracy of measurement of surface forces, the results presented here should be helpful for colloid physicists and in particular for those performing force measurements.

Freestanding silicon nitride membranes with thicknesses down to a few tens of nanometers find use as TEM windows or soft X-ray spectral purity filters. As the thickness of a membrane decreases, emissivity vanishes, which limits radiative heat emission and resistance to heat loads. We show that thin metal layers with thicknesses in the order of 1 nm enhance the emissivity of thin membranes by two to three orders of magnitude close to the theoretical limit of 0.5. This considerably increases thermal load capacity of membranes in vacuum environments. Our experimental results are in line with classical theory in which we adapt thickness dependent scattering terms in the Drude and Lorentz oscillators., Comment: 5 pages, 5 figures

4 pages, 3 figures; International audience; Owing to its two dimensional electronic structure, graphene exhibits many unique properties. One of them is a wave vector and temperature dependent plasmon in the infrared range. Theory predicts that due to these plasmons, graphene can be used as a universal material to enhance nanoscale radiative heat exchange for any dielectric substrate. Here we report on radiative heat transfer experiments between SiC and a SiO2 sphere which have non matching phonon polariton frequencies, and thus only weakly exchange heat in near field. We observed that the heat flux contribution of graphene epitaxially grown on SiC dominates at short distances. The influence of plasmons on radiative heat transfer is further supported with measurements for doped silicon. These results highlight graphenes strong potential in photonic nearfield and energy conversion devices.

The control of heat flow is a formidable challenge due to lack of good thermal insulators. Promising new oppor-tunities for heat flow control were recently theoretically discovered for radiative heat flow in near field, where large heat flow contrasts may be achieved by tuning electronic excitations on surfaces. Here we show experi-mentally that the phase transition of VO2 entails a change of surface polariton states that significantly affects radiative heat transfer in near field. In all cases the Derjaguin approximation correctly predicted radiative heat transfer in near field, but it underestimated the farfield limit. Our results indicate that heat flow contrasts can be realized in near field that can be larger than those obtained in farfield., 3 figures

It is shown that a graphene layer on top of a dielectric slab can dramatically influence the ability of this dielectric for radiative heat exchange. Effect of graphene is related to thermally excited plasmons. Frequency of these resonances lies in the terahertz region and can be tuned by varying the Fermi level through doping or gating. Heat transfer between two dielectrics covered with graphene can be larger than that between best known materials and even much larger at low temperatures. Moreover, high heat transfer can be significantly modulated by electrical means that opens up new possibilities for very fast manipulations with the heat flux., Comment: 5 pages, 3 figures, submitted to PRL 14.11.2011

We show that functionalized micromechanical bilayer levers can be used as sensitive probes to accurately measure radiative heat flux in vacuum between two materials at the micro scale. By means of calibration to one material these measurements can be made quantitative for radiative heat flux or for either temperature or material emissivity. We discuss issues and opportunities for our method and provide ample technical details regarding its implementation and demonstrate good correspondence with the Stefan Boltzman law. We use this system to probe the phase transition of VO2 and find that radiative heat transfer in farfield between VO2 and glass can be reversibly modulated by a factor of 5., Comment: 14 pages 10 figures

International audience; We show numerically that near field heat flux can be modulated by orders of magnitude upon switching from the metallic to the insulating phase of vanadium dioxide. Furthermore the resonant phonon polariton interaction for the insulating phase enhances near field thermal transfer by 3 orders of magnitude. The effect should therefore be measureable with existing experimental setups and could find broad applications for systems where thermal control at the nanoscale is required.

International audience; We introduce a new concept for electrically controlled heat flux modulation. A flux contrast larger than 10 dB is expected with switching time on the order of tens of nanoseconds. Heat flux modulation is based on the interplay between radiative heat transfer at the nanoscale and phase change materials. Such large contrasts are not obtainable in solids, or in far field. As such this opens up new horizons for temperature modulation and actuation at the nanoscale.

The Lifshitz theory provides a method to calculate the Casimir force between two flat plates if the frequency dependent dielectric function of the plates is known. In reality any plate is rough and its optical properties are known only to some degree. For high precision experiments the plates must be carefully characterized otherwise the experimental result cannot be compared with the theory or with other experiments. In this chapter we explain why optical properties of interacting materials are important for the Casimir force, how they can be measured, and how one can calculate the force using these properties. The surface roughness can be characterized, for example, with the atomic force microscope images. We introduce the main characteristics of a rough surface that can be extracted from these images, and explain how one can use them to calculate the roughness correction to the force. At small separations this correction becomes large as our experiments show. Finally we discuss the distance upon contact separating two rough surfaces, and explain the importance of this parameter for determination of the absolute separation between bodies. © 2011 Springer-Verlag Berlin Heidelberg.

Casimir and van der Waals dispersive forces between real material surfaces can be strongly influenced by surface roughness and the frequency dependent dielectric functions of the interacting materials. The Lifshitz theory allows calculations of these forces between two flat plates if the frequency dependent dielectric function is known. Even in this case in order to compare different measurements of the Casimir force the accuracy must be higher than the force uncertainty arising as a result of the variation in the measured dielectric functions for a given material. Therefore, when we are dealing with dispersive forces between real materials, precise characterization of the particular interacting samples is critical. For this reason the effects of optical properties and surface roughness on dispersive forces will be first discussed in this review paper. Finally, we will compare research results among various research groups, at relatively large surface separations where roughness plays insignificant role, in order to show the level of consensus that has developed in this field in the recent years.

We demonstrate here a controllable variation in the Casimir force. Changes in the force of up to 20% at separations of ~100 nm between Au and AgInSbTe (AIST) surfaces were achieved upon crystallization of an amorphous sample of AIST. This material is well known for its structural transformation, which produces a significant change in the optical properties and is exploited in optical data storage systems. The finding paves the way to the control of forces in nanosystems, such as micro- or nanoswitches by stimulating the phase change transition via localized heat sources., Comment: 7 pages, 3 figures The AFM images for the inset in Fig.2 were replaced with new ones as obtained with tips having high aspect ratio

Atomic force microscopy measurements and force theory calculations using the Lifshitz theory show that van der Waals/Casimir dispersive forces have a strong dependence on surface roughness and material optical properties. It is found that at separations below 100 nm the roughness effect is manifested through a strong deviation from the normal scaling of the force with separation distance. Moreover, knowledge of precise optical properties of metals is shown to be very important for accurate force predictions rather than referring to idealized defect free material models. Finally, we compare the van der Waals/Casimir forces to capillary adhesive forces in order to illustrate their significance in stiction problems.

In order to explore repulsive Casimir/van der Waals forces between solid materials with liquid as the intervening medium, we analyze dielectric data for a wide range of materials as for example PTFE, polystyrene, silica and more than twenty liquids. Although significant variation in the dielectric data from different sources exist, we provide a scheme based on measured static dielectric constants, refractive indices, and applying Kramers Kronig (KK) consistency to dielectric data to create accurate dielectric functions at imaginary frequencies. The latter is necessary for more accurate force calculations via the Lifshitz theory allowing reliable predictions of repulsive Casimir forces., Comment: 20 pages, 7 figures, 1 table

The point at which two random rough surfaces make contact takes place at the contact of the highest asperities. The distance upon contact d_0 in the limit of zero load has crucial importance for determination of dispersive forces. Using gold films as an example we demonstrate that for two parallel plates d_0 is a function of the nominal size of the contact area L and give a simple expression for d_0(L) via the surface roughness characteristics. In the case of a sphere of fixed radius R and a plate the scale dependence manifests itself as an additional uncertainty \delta d(L) in the separation, where the scale L is related with the separation d via the effective area of interaction L^2\sim\pi Rd. This uncertainty depends on the roughness of interacting bodies and disappears in the limit L\to \infty., Comment: 5 pages, 4 figures, to be published in PRB

In this work we concentrate on an experimental validation of the Lifshitz theory for van der Waals and Casimir forces in gold-alcohol-glass systems. From this theory weak dispersive forces are predicted when the dielectric properties of the intervening medium become comparable to one of the interacting surfaces. Using inverse colloid probe atomic force microscopy dispersive forces were measured occasionally and under controlled conditions by addition of salt to screen the electrostatic double layer force if present. The dispersive force was found to be attractive, and an order of magnitude weaker than that in air. Although the theoretical description of the forces becomes less precise for these systems even with full knowledge of the dielectric properties, we find still our results in reasonable agreement with Lifshitz theory., 19 pages, 7 figures

Capillary forces have been measured by atomic force microscopy in the plate-sphere setup between gold, borosilicate glass, GeSbTe, titanium, and UV-irradiated amorphous titanium-dioxide surfaces. The force measurements were performed as a function contact time and surface roughness in the range 0.2-15 nm rms and relative humidity ranging between 2% and 40%. It is found that even for the lowest attainable relative humidity (similar to 2% +/- 1%) very large capillary forces are still present. The latter suggests the persistence of a nanometers-thick adsorbed water layer that acts as a capillary bridge between contacting surfaces. Moreover, we found a significantly different scaling behavior of the force with rms roughness for materials with different hydrophilicity as compared to gold-gold surfaces.

In this work we describe dispersion force (van der Waals/Casimir) measurements between gold surfaces at separations as close as 12 nm. The force measurements were performed in the plane-sphere configuration by Atomic Force Microscopy at distances ranging between 12 and 200 nm. This was accomplished by using evaporated smooth metal surfaces for both sphere and plane, and stiff cantilevers to minimize jump-to-contact problems. Finally, it is shown that below separations of 100 nm experiment and theory are found in agreement within 10 % by including in the theory the measured optical properties of gold and contribution from surface roughness., 14 pages, 3 figures

Precise optical properties of metals are very important for accurate prediction of the Casimir force acting between two metallic plates. Therefore we measured ellipsometrically the optical responses of Au films in a wide range of wavelengths from 0.14 mum to 33 mum. The films at various thickness were deposited at different conditions on silicon or mica substrates. Considerable variation of the frequency dependent dielectric function from sample to sample was found. Detailed analysis of the dielectric functions was performed to check the Kramers-Kronig consistency, and extract the Drude parameters of the films. It was found that the plasma frequency varies in the range from 6.8 eV to 8.4 eV. It is suggested that this variation is related with the film density. X-ray reflectivity measurements support qualitatively this conclusion. The Casimir force is evaluated for the dielectric functions corresponding to our samples, and for that typically used in the precise prediction of the force. The force for our films was found to be 5-14% smaller at a distance of 100 nm between the plates. Noise in the optical data is responsible for the force variation within 1%. It is concluded that prediction of the Casimir force between metals with a precision better than 10% must be based on the material optical response measured from visible to mid-infrared range., Comment: 18 pages, 14 figures, accepted for publication in Phys. Rev. B

The transition of van der Waals to Casimir forces between macroscopic gold surfaces is investigated by Atomic Force Microscopy in the plane-sphere geometry. It was found that the transition appears to take place at separations about 10 % the plasma wavelength for evaporated gold surfaces, which compares to theoretical predictions by incorporation of experimental optical data and roughness corrections. Moreover, the force data allow estimation of the Hamaker constant AH in the van der Waals regime, which is in good agreement with the Lifshitz theory predictions (even if roughness corrections are taken into account) and former surface force apparatus measurements., Comment: 12 pages, 3 figures

Contact and dispersive forces are important in the design of Micro Electro Mechanical Systems (MEMS). The influence of random surface roughness of Au films on capillary and Casimir forces is explored with atomic force microscopy in the plane-sphere geometry. In case of the Casimir force the experimental results are confronted to theoretical predictions for plane-sphere separations ranging between 20 and 200 nm. The optical response and roughness of the Au films were measured and used as input in calculations of the Casimir force. It is found that at separations below 100 nm the roughness effect manifests itself through a strong deviation from the usual scaling of the force as a function of distance. The difference with predictions based on perturbation theory can be larger than 100%. In addition, the capillary force was measured using an atomic force microscope between a gold coated sphere and gold surfaces with different roughness, i.e. from atomically flat up to 10nm rms roughness. A substantial decrease in the capillary force was observed with increasing RMS roughness up to a few nanometers. For smooth surfaces, in contact, the capillary force surpasses other force fields either the van der Waals/Casimir or the electrostatic force. For rougher films the different forces become comparable in magnitude. From these measurements two limits can be defined, i.e. a smooth limit where the whole surface interacts through the capillary force and a rough limit where only a single up to a few asperities yield a capillary contribution.

The influence of random surface roughness of Au films on the Casimir force is explored with atomic force microscopy in the plate-sphere geometry. The experimental results are compared to theoretical predictions for separations ranging between 20 and 200 nm. The optical response and roughness of the Au films were measured and used as input in theoretical predictions. It is found that at separations below 100 nm, the roughness effect is manifested through a strong deviation from the normal scaling of the force with separation distance. Moreover, deviations from theoretical predictions based on perturbation theory can be larger than 100%., 18, 5 figures

The capillary force was measured by atomic force microscopy between a gold coated sphere mounted on a cantilever and gold surfaces with different roughness. For smooth surfaces the capillary adhesive force surpasses in magnitude any dispersion, e.g. van der Waals/Casimir, and/or electrostatic forces. A substantial decrease in the capillary force was observed by increasing the roughness ampltitude a few nanometers between 1-10 nm. From these measurements two limits can be defined: a smooth limit where a closely macroscopic size contact surface interacts through the capillary force, and the rough limit where only a few asperities give a capillary contribution., 8 pages, 3 figures, To appear in Appl. Phys. Lett. (2007)

In this paper we investigate the influence of ultrathin water layer (similar to 1-1.5 nm) on the van der Waals/Casimir force between gold surfaces. Adsorbed water is inevitably present on gold surfaces at ambient conditions as jump-up-to contact during adhesion experiments demonstrate. Calculations based on the Lifshitz theory give very good agreement with the experiment in the absence of any water layer for surface separations d greater than or similar to 10 nm. However, a layer of thickness h less than or similar to 1.5 nm is allowed by the error margin in force measurements. At shorter separations, d less than or similar to 10 nm, the water layer can have a strong influence as calculations show for flat surfaces. Nonetheless, in reality the influence of surface roughness must also be considered, and it can overshadow any water layer influence at separations comparable to the total sphere-plate rms roughness w(shp)+w.

This paper concentrates on a study where finite conductivity corrections are included in the theoretical description of the effects of roughness on the Casimir force. The roughness data were taken from gold films evaporated onto Silicon and polysterene spheres. We conclude that for a detailed comparison with experimental data, i.e. at the level of at least 5 % at short separations below 200 nm, the lateral dimensions of roughness for real films should be included in the theoretical considerations. Moreover, if the RMS roughness is considerable, high local surface slopes are shown to have a significant effect on the Casimir force., 13 pages. To be published