13 results on '"Parsapour, Fazel"'
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2. Growth, Integration, and Functional Characterization of AlScN Thin Films for RF MEMS Devices
3. Free standing and solidly mounted Lamb wave resonators based on Al0.85Sc0.15N thin film
4. Material Parameter Extraction for Complex AlScN Thin Film Using Dual Mode Resonators in Combination with Advanced Microstructural Analysis and Finite Element Modeling
5. Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces (Phys. Status Solidi A 2∕2019)
6. Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces
7. Determination of Elastic and Piezoelectric Properties of Al0.84Sc0.16N Thin Films
8. Material constants extraction for AlScN thin films using a dual mode baw resonator
9. Enhanced piezoelectric properties of c-axis textured aluminium scandium nitride thin films with high scandium content: Influence of intrinsic stress and sputtering parameters
10. Ex-situ AlN seed layer for (0001)-textured Al0.84Sc0.16N thin films grown on SiO2 substrates
11. Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer
12. Growth, Properties, and Applications of Al1-xScxN Thin Films
13. Determination of elastic and piezoelectric properties of Al0.84Sc0.16N thin films
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