1. Growth mechanism investigation of SnO2 thin films deposited by aerosol pyrolysis for biosensor applications: Importance of the thickness
- Author
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Laetitia Rapenne, Hervé Roussel, Sabine Szunerits, Mael Manesse, Valérie Stambouli, Frederic Ferrieu, Patrick Chaudouët, Laboratoire des matériaux et du génie physique (LMGP ), Institut National Polytechnique de Grenoble (INPG)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), and Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut National Polytechnique de Grenoble (INPG)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)
- Subjects
[SDV.BIO]Life Sciences [q-bio]/Biotechnology ,Materials science ,Metals and Alloys ,Nanotechnology ,[CHIM.MATE]Chemical Sciences/Material chemistry ,02 engineering and technology ,Surfaces and Interfaces ,Surface finish ,010402 general chemistry ,021001 nanoscience & nanotechnology ,Microstructure ,01 natural sciences ,0104 chemical sciences ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,Electrical resistivity and conductivity ,Materials Chemistry ,Surface roughness ,Texture (crystalline) ,Crystallite ,[INFO.INFO-BT]Computer Science [cs]/Biotechnology ,Composite material ,Thin film ,0210 nano-technology ,Transparent conducting film - Abstract
International audience; Transparent conductive oxide films are suitable sensitive layers for gas sensors and biosensors, provided that their intrinsic properties are controlled, notably considering their thickness dependence. The present paper reports on a study of the variation of some physical properties of polycrystalline Sb doped SnO2 films according to the film thickness. Films were deposited onto Si and glass substrates by aerosol pyrolysis. Their thickness was varied in a range of 20-280 nm. The electrical resistivity, the roughness, the optical constant, the microstructure and the texture were investigated. Correlated evolutions of the resistivity and the surface roughness are found in relation with the evolutions of both the microstructure and the texture. Two main successive growth steps were evidenced which are delimited by a critical film thickness. Below this thickness of approximately 100-120 nm, a strong dependence of physical properties with the thickness is evidenced whereas for thicker films no significant change is evidenced. A two-step growth model is proposed to explain this behaviour. This mechanism growth is to be considered in view of the integration of SnO2 films as sensitive layers in biosensors. Notably, in the case of biosensors based on the label-free electrochemical detection of biomolecules, it is recommended to use films with thicknesses ranging above the critical thickness value of 100-120 nm in order to obtain optimized, reproducible and comparable responses of biosensors. (c) 2012 Elsevier B.V. All rights reserved.
- Published
- 2012
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