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1. Low-frequency series-resistance analytical modeling of three-dimensional metal-insulator-metal capacitors

Author

Bajolet, Aurelie, Clerc, Raphael, Pannakakis, G., Tsamdos, Dimitrios, Picollet, Eric, Segura, Noel, Giraudin, Jean-Christophe, Delpech, Philippe, Montes, Laurent, and Ghibaudo, Gerard

Subjects
Very-large-scale integration -- Analysis, Electric resistance -- Measurement, Business, Electronics, Electronics and electrical industries
Abstract

A physical and fully analytical model of series resistance of three- dimensional (3-D) metal-insulator-metal (MIM) capacitor is presented. The series resistance can be reduced by a factor of four without any degradation of the capacitance density by optimizing the number and length of the trenches of a capacitor.

Published
2007

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