Search

In this paper, nanosteps were fabricated by a new method. This method used the energy of focus imaging of focused ion beam to peel the material surface for fabricating the nanosteps. By changing the number of focus imaging can get different deepness nanosingle-steps. Changing the magnification, the second-step can be fabricated on nanosingle-step. An atomic force microscopy was used to measure the 3D morphology of nanosteps. When the magnification was 25000, the deepness of nanosingle-step was 65.34±3.00 nm and the deepness of the first step of nanodual-step was 56.03 nm. When the magnification was 50000, the deepness of nanosingle-step was 142.28±3.54 nm and the deepness of the second step of nanodual-step was 178.68nm. This means that the redeposition made the deepness of the first step become bigger, that of the second step becomes smaller. Based on comparison and analysis, the relation of the depth, the magnification and the number of the focus imaging were obtained.

The accuracy and traceability of measurement at nano-scale are directly related to nano-fabrication. Nanostep is typical structure, so the measurement and characterization of nanosteps are important to improve the accuracy of nano-fabrication. This paper studies on the relationship between the morphologic features of nanosteps and the processing parameters of a dual beam Focused Ion Beam (FIB). Nanosteps are fabricated with different depth of 50nm and 30nm. The experimental results show the depths of the nanosteps are affected by the sequence of the process and the processing energy. Although the relationship between the depth and process duration is linear, the depths of the nanosteps are not consistent with the design. The dimensions of the nanosteps at different positions are not constant because of the varying slope of the bottom and sidewall. It is necessary to optimize the processing parameters to achieve the designed dimensions.