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Abstract The chip-scale hybrid optical pumping spin-exchange relaxation-free (SERF) atomic magnetometer with a single-beam arrangement has prominent applications in biomagnetic measurements because of its outstanding features, including ultrahigh sensitivity, an enhanced signal-to-noise ratio, homogeneous spin polarization and a much simpler optical configuration than other devices. In this work, a miniaturized single-beam hybrid optical pumping SERF atomic magnetometer based on a microfabricated atomic vapor cell is demonstrated. Although the optically thin Cs atoms are spin-polarized, the dense Rb atoms determine the experimental results. The enhanced signal strength and narrowed resonance linewidth are experimentally proven, which shows the superiority of the proposed magnetometer scheme. By using a differential detection scheme, we effectively suppress optical noise with an approximate five-fold improvement. Moreover, the cell temperature markedly affects the performance of the magnetometer. We systematically investigate the effects of temperature on the magnetometer parameters. The theoretical basis for these effects is explained in detail. The developed miniaturized magnetometer has an optimal magnetic sensitivity of 20 fT/Hz1/2. The presented work provides a foundation for the chip-scale integration of ultrahighly sensitive quantum magnetometers that can be used for forward-looking magnetocardiography (MCG) and magnetoencephalography (MEG) applications.

Abstract With the rapid development of various fields, including aerospace, industrial measurement and control, and medical monitoring, the need to quantify flow velocity measurements is increasing. It is difficult for traditional flow velocity sensors to fulfill accuracy requirements for velocity measurements due to their small ranges, susceptibility to environmental impacts, and instability. Herein, to optimize sensor performance, a flexible microelectromechanical system (MEMS) thermal flow sensor is proposed that combines the working principles of thermal loss and thermal temperature difference and utilizes a flexible cavity substrate made of a low-thermal-conductivity polyimide/SiO2 (PI/SiO2) composite porous film to broaden the measurement range and improve the sensitivity. The measurement results show that the maximum measurable flow velocity can reach 30 m/s with a resolution of 5.4 mm/s. The average sensitivities of the sensor are 59.49 mV/(m s−1) in the medium-to-low wind velocity range of 0–2 m/s and 467.31 mV/(m s−1) in the wind velocity range of 2–30 m/s. The sensor proposed in this work can enable new applications of flexible flow sensors and wearable devices.

Existing microfabricated atomic vapor cells have only one optical channel, which is insufficient for supporting the multiple orthogonal beams required by atomic devices. In this study, we present a novel wafer-level manufacturing process for fabricating multi-optical-channel atomic vapor cells and an innovative method for batch processing the inner sidewalls of millimeter glass holes to meet optical channel requirements. Surface characterization and transmittance tests demonstrate that the processed inner sidewalls satisfy the criteria for an optical channel. In addition, the construction of an integrated processing platform enables multilayer non-isothermal anode bonding, the filling of inert gases, and the recovery and recycling of noble gases. Measurements of the absorption spectra and free-induction decay signals of xenon-129 (129Xe) and xenon-131 (131Xe) under different pump-probe schemes demonstrate the suitability of our vapor cell for use in atomic devices including atomic gyroscopes, dual-beam atomic magnetometers, and other optical/atomic devices. The proposed micromolding technology has broad application prospects in the field of optical-device processing.

Abstract Stress tolerance plays a vital role in ensuring the effectiveness of piezoresistive sensing films used in flexible pressure sensors. However, existing methods for enhancing stress tolerance employ dome-shaped, wrinkle-shaped, and pyramidal-shaped microstructures in intricate molding and demolding processes, which introduce significant fabrication challenges and limit the sensing performance. To address these shortcomings, this paper presents periodic microslits in a sensing film made of multiwalled carbon nanotubes and polydimethylsiloxane to realize ultrahigh stress tolerance with a theoretical maximum of 2.477 MPa and a sensitivity of 18.092 kPa−1. The periodic microslits permit extensive deformation under high pressure (e.g., 400 kPa) to widen the detection range. Moreover, the periodic microslits also enhance the sensitivity based on simultaneously exhibiting multiple synapses within the sensing interface and between the periodic sensing cells. The proposed solution is verified by experiments using sensors based on the microslit strategy for wind direction detection, robot movement sensing, and human health monitoring. In these experiments, vehicle load detection is achieved for ultrahigh pressure sensing under an ultrahigh pressure of over 400 kPa and a ratio of the contact area to the total area of 32.74%. The results indicate that the proposed microslit strategy can achieve ultrahigh stress tolerance while simplifying the fabrication complexity of preparing microstructure sensing films.

Microfabricated alkali metal vapor cells are the core components for miniaturizing quantum devices, such as atomic clocks, atomic gyroscopes, and atomic magnetometers. Alkali metals are prone to thermal migration at the bonding interface during the sealing of the vapor cell, which leads to bonding failure. In this study, a non-isothermal anodic bonding process based on plasma activation was developed to achieve high-strength bonding at low temperatures using the temperature gradient to keep the alkali metal away from the bonding interface. This procedure eliminates interference from the alkali metal and significantly increases the success rate of anodic bonding of vapor cells. Simulation results for the temperature field and the residual stresses during anodic bonding demonstrate that the procedure is theoretically feasible. The effect of plasma treatment on the contact angle and roughness of the bonding surface revealed a mechanism for improving the bond strength. In addition, the construction of an integrated processing platform made it possible to perform non-isothermal anode bonding, injection of alkali metal, filling of inert gases, and recovery and recycling of noble gases. The high strength and good hermeticity of the bonding interface were demonstrated by the bond strength, cross-sectional high-resolution transmission electron microscopy observations, and leakage rate tests. Finally, the absorption spectrum and free-induction decay signal of the fabricated vapor cell were measured.

Abstract With the growing demand for thermal management of electronic devices, cooling of high-precision instruments, and biological cryopreservation, heat flux measurement of complex surfaces and at ultralow temperatures has become highly imperative. However, current heat flux sensors (HFSs) are commonly used in high-temperature scenarios and have problems when applied in low-temperature conditions, such as low sensitivity and embrittlement. In this study, we developed a flexible and highly sensitive HFS that can operate at ultralow to high temperatures, ranging from −196 °C to 273 °C. The sensitivities of HFSs with thicknesses of 0.2 mm and 0.3 mm, which are efficiently manufactured by the screen-printing method, reach 11.21 μV/(W/m2) and 13.43 μV/(W/m2), respectively. The experimental results show that there is a less than 3% resistance change from bending to stretching. Additionally, the HFS can measure heat flux in both exothermic and absorptive cases and can measure heat flux up to 25 kW/m2. Additionally, we demonstrate the application of the HFS to the measurement of minuscule heat flux, such as heat dissipation of human skin and cold water. This technology is expected to be used in heat flux measurements at ultralow temperatures or on complex surfaces, which has great importance in the superconductor and cryobiology field.

Considering the magnetic shielding requirements of both geomagnetic field and 50 Hz power-line frequency in the complex working conditions of the power grid, an electromagnetic shielding system combining active and passive modes is proposed in this article. A three-dimensional Helmholtz coil with a magnetic shielding barrel nested inside is established by the COMSOL simulation tool, and the magnetic shielding efficiency of the system is analyzed. Comparing different materials, the simulation results indicate that permalloy alloy exhibits better shielding performance than pure iron and nickel materials. Additionally, the overall shielding efficiency of the shielding barrel increases linearly with the number of multiple layers. Under the combined active and passive electromagnetic shielding conditions, the system achieves a shielding efficiency of SE = 113.98 dB, demonstrating excellent performance in shielding both AC and DC interference magnetic fields. This study provides theoretical guidance for the construction of magnetic shielding systems in electromagnetic interference environment.

Abstract Precision grinding is a key process for realizing the use of large-aperture aspherical optical elements in laser nuclear fusion devices, large-aperture astronomical telescopes, and high-resolution space cameras. In this study, the arc envelope grinding process of large-aperture aspherical optics is investigated using a CM1500 precision grinding machine with a maximum machinable diameter of Φ1500 mm. The form error of the aspherical workpiece induced by wheel setting errors is analytically modeled for both parallel and cross grinding. Results show that the form error is more sensitive to the wheel setting error along the feed direction than that along the lateral direction. It is a bilinear function of the feed-direction wheel setting error and the distance to the optical axis. Based on the error function above, a method to determine the wheel setting error is proposed. Subsequently, grinding tests are performed with the wheels aligned accurately. Using a newly proposed partial error compensation method with an appropriate compensation factor, a form error of 3.4 μm peak-to-valley (PV) for a Φ400 mm elliptical K9 glass surface is achieved.

High-temperature thin-film thermocouples (TFTCs) have attracted significant attention in the aerospace and steel metallurgy industry. However, previous studies on TFTCs have primarily focused on the two-dimensional planar-type, whose thermal sensitive area has to be perpendicular to the test environment, and therefore affects the thermal fluids pattern or loses accuracy. In order to address this problem, recent studies have developed three-dimensional probe-type TFTCs, which can be set parallel to the test environment. Nevertheless, the probe-type TFTCs are limited by their measurement threshold and poor stability at high temperatures. To address these issues, in this study, we propose a novel probe-type TFTC with a sandwich structure. The sensitive layer is compounded with indium oxide doped zinc oxide and fabricated using screen-printing technology. With the protection of sandwich structure on electrode film, the sensor demonstrates robust high-temperature stability, enabling continuous working at 1200 °C above 5 h with a low drift rate of 2.3 °C·h ^−1 . This sensor exhibits a high repeatability of 99.3% when measuring a wide range of temperatures, which is beyond the most existing probe-type TFTCs reported in the literature. With its excellent high-temperature performance, this temperature sensor holds immense potentials for enhancing equipment safety in the aerospace engineering and ensuring product quality in the steel metallurgy industry.

An intensity-demodulated fiber-optic magnetometer is proposed and experimentally investigated, which is fabricated via fusion splicing a segment of photonic crystal fiber (PCF) between single-mode fibers (SMFs), with the cladding air holes of PCF filled with magnetic fluid. Using the magneto-optical properties of the magnetic fluid, the transmission spectrum is changed with an external magnetic field. Based on the intensity variations in the transmission spectrum, the magnetic field is detected, and a sensitivity of 0.238 dB/mT is obtained at 1550.03 nm with the length of PCF 5.5 cm. By converting light signals into electrical signals, a sensitivity of 0.003 V/mT is achieved. The fiber-optic magnetometer possesses the advantages of simple fabrication, compact/robust structure, and low cost.

In this work, a novel fiber-optic sensor for 2D magnetic sensing is explored based on nanostructured magnetic fluid. The fiber-optic sensor comprises a ring-shaped fiber structure that is coated with magnetic fluid. The unique magneto-optical characteristic of the nanostructured magnetic fluid enables the fiber-optic structure to detect magnetic fields. By utilizing the 3D Monte Carlo method, the magneto-optical characteristic induced by the nanostructure changes in the magnetic fluid was analyzed. The sensor can realize 2D vector magnetic sensing by intensity demodulation and achieves a sensitivity of 2.402 dB/mT. The proposed fiber optic sensor helps in developing a high-sensitivity 2D vector magnetic field sensor, which has potential applications in the fields of navigation, electrical power systems, and biological detection.

This study discussed the application of optical fibers in addressing the problem of insufficient light harvesting and sensing health monitoring in ancient buildings. Based on three-dimensional (3D) printing technology to fix the light-harvesting lens and conducting optical fiber, develop the replacement parts that can be buried into the optical fiber of ancient buildings. By introducing the experimental application to improve the experimental quality of research and teaching. Firstly, it highlights the advantage that the optical fiber plus lens structure design can make the natural light introduced for a long time; secondly, it points out that the buried optical fiber structure design does not affect the warmth and sound insulation of the building; finally, the health monitoring of the building is realized through the proposed method of buried optical fiber sensing. The design scheme adopts a fiber optic light transmission and sensing system, which can realize the whole system’s corrosion resistance, after laying buried and low-cost operation.

A co-sputtering process for the deposition of Fe0.8Ga0.2B alloy magnetostrictive thin films is studied in this paper. The soft magnetic performance of Fe0.8Ga0.2B thin films is modulated by the direct-current (DC) sputtering power of an FeGa target and the radio-frequency (RF) sputtering power of a B target. Characterization results show that the prepared Fe0.8Ga0.2B films are amorphous with uniform thickness and low coercivity. With increasing FeGa DC sputtering power, coercivity raises, resulting from the enhancement of magnetism and grain growth. On the other hand, when the RF sputtering power of the B target increases, the coercivity decreases first and then increases because of the conversion of the films from a crystalline to an amorphous state. The lowest coercivity of 7.51 Oe is finally obtained with the sputtering power of 20 W for the FeGa target and 60 W for the B target. Potentially, this optimization provides a simple way for improving the magnetoelectric coefficient of magnetoelectric composite materials and the sensitivity of magnetoelectric sensors.

Abstract With the rapid development and application of smart homes, sensors known as ‘neurons’ have become more and more important in this field. In response to the demand for relative humidity parameter in home monitoring, a flexible relative humidity sensor based on reduced graphene oxide (RGO) and interdigital electrode for smart homes was designed and prepared in this paper. The base of the interdigital electrode structure was polyimide, and the RGO film was prepared by a spraying process. A test system for the relative humidity sensor with different saturated salt solutions was also built. The test results show that the sensor resistance and relative humidity have a linear relationship in the range of 24.6% RH–82.9% RH, and the linearity is as high as 0.987. The sensitivity of the sensor is 0.51 kΩ/% RH. The relative humidity sensor with the characteristics of flexibility and high sensitivity will have broad application prospects and value in the field of smart homes.

Abstract Flexible sensors used to detect NO2 gas generally have problems such as poor repeatability, high operating temperature, poor selectivity, and small detection range. In this work, a new spraying platform with a simple structure, low cost, and good film-forming consistency was designed and built to make a sensitive film (rGO/SnO2) for NO2 gas sensors. The relationship between the solid content of rGO and SnO2 nanoparticles, annealing temperature, and sensor performance was studied. The results show that the interdigital electrode-sensitive film formed by spraying 0.25 ml of a 0.4 wt% rGO/SnO2 mixture and annealing at 250 °C exhibited the best comprehensive performance for NO2 detection. The sensor’s response value for 100 ppm NO2 gas was 0.2640 at room temperature (25 °C), and the response time and recovery time were 412.4 s and 587.3 s, respectively. In the range of 20–100 ppm, the relationship between the response and NO2 concentration was linear, and the correlation coefficient was 0.9851. In addition, a soft-monitoring node module with an overlimit warning function for NO2 gas was designed and manufactured based on flexible electronics. Finally, the flexible sensor and node module were embedded into woven fabric that could be used to make a mask or a watch that could detect NO2 gas, realizing the practical application of flexible NO2 gas sensors in the field of wearable electronics.

Abstract A micromachined resonator immersed in liquid provides valuable resonance parameters for determining the fluidic parameters. However, the liquid operating environment poses a challenge to maintaining a fine sensing performance, particularly through electrical characterization. This paper presents a piezoelectric micromachined cantilever with a stepped shape for liquid monitoring purposes. Multiple modes of the proposed cantilever are available with full electrical characterization for realizing self-actuated and self-sensing capabilities. The focus is on higher flexural resonances, which nonconventionally feature two-dimensional vibration modes. Modal analyses are conducted for the developed cantilever under flexural vibrations at different orders. Modeling explains not only the basic length-dominant mode but also higher modes that simultaneously depend on the length and width of the cantilever. This study determines that the analytical predictions for resonant frequency in liquid media exhibit good agreement with the experimental results. Furthermore, the experiments on cantilever resonators are performed in various test liquids, demonstrating that higher-order flexural modes allow for the decoupled measurements of density and viscosity. The measurement differences achieve 0.39% in density and 3.50% in viscosity, and the frequency instability is below 0.05‰. On the basis of these results, design guidelines for piezoelectric higher-mode resonators are proposed for liquid sensing.

At present, flexible pressure-sensitive materials generally have problems with weak adhesion and poor wear resistance, which easily result in friction failure when used for plantar pressure detection. In this study, a flexible pressure sensor with the advantages of a wide detection range, fast recovery, and good abrasive resistance was designed and prepared based on the screen printing process. The pressure-sensitive unit with a structural size of 5 mm× 8 mm was a functional material system due to the use of graphene and epoxy resin. The influence of the different mass ratios of the graphene and epoxy resin on the sensing properties was also studied. The test results showed that when the mass ratio of graphene to epoxy resin was 1:4, the response time and recovery time of the sensing unit were 40.8 ms and 3.7 ms, respectively, and the pressure detection range was 2.5–500 kPa. The sensor can detect dynamic pressure at 0.5 Hz, 1 Hz, 2 Hz, 10 Hz, and 20 Hz and can withstand 11,000 cycles of bending. In addition, adhesion tests showed that the high viscosity of the epoxy helped to improve the interlayer bond between the pressure-sensitive materials and the flexible substrate, which makes it more suitable for plantar pressure detection environments, where friction is common.

Here, we present a high-precision demodulation method that supports the arrayed waveguide grating (AWG) system, which includes a 1 × 8 AWG as the primary filter with a 0.5 nm channel spacing and a 1 × 4 AWG as the auxiliary filter with a 1 nm channel spacing. The high precision is achieved through an innovative method of decoupling three channels, involving two adjacent channels of the primary filter and one channel of the secondary auxiliary filter. Simulation results show that the AWGs have a good transmission spectrum with crosstalk below −24.8 dB, non-uniformities below 0.8 dB, insertion loss below −3.7 dB, 3 dB bandwidth of 0.25 nm, and 10 dB bandwidth of 0.43 nm. The interrogation precision can reach 8 pm, with a dynamic range of 0.4 nm, corresponding to a single FBG.

Recently, an exceptional point (EP) was constructed in a coupled double-ring resonator. Generally, such non-Hermitian optical systems are realized via material selection and a spatially precise layout. However, because of material limitations, some system parameters cannot be changed after the waveguide is fabricated. In this study, We demonstrate a lithium niobate-based tunable system for controlling system dispersion and loss, the resonator structure made of lithium niobate is theoretically and numerically investigated and analyzed. Lithium niobate is chosen because it exhibits good electro-optic properties. Furthermore, the real part of the potential energy term of the non-Hermitian system is regulated using external electric field. Consequently, a frequency shift of up to 149 GHz is observed in the double characteristic peak of the transmission spectrum with a contrast of up to 0.43. In addition, a gain-influenced EP is observed in a coupled dual-ring resonator system by introducing gain material. It has potential application in future optical fiber communication, optical quantum computing, and environmental sensing.

It is particularly important to improve the performance of mid-infrared (mid-IR) electro-optic (EO) modulator, which is one of the key devices that will expand the channels of optic communication, and will be utilized in optical free space communication, optical detection for gas molecules, etc. We present and theoretically design the performance of the high-speed mid-IR EO modulator based on lithium niobate on insulator (LNOI) at λ = 3 μm. We have designed, calculated, and optimized single-mode ridge waveguide, 1 × 2 multimode interference (MMI) couplers and coplanar waveguide (CPW) electrodes structures for x-cut lithium niobate. Our device with an extinction ratio greater than 40 dB, a half-wave voltage-length product is about 12 V·cm, and a EO bandwidth up to 12 GHz with interaction length of 15 mm. The performance of interaction length of 5 mm and 10 mm mid-IR EO modulator are also proposed and simulated for a compromise consideration between the EO bandwidth and driving voltage.

Abstract Accurate temperature measurements can efficiently solve numerous critical problems and provide key information. Herein, a flexible micro-three-dimensional sensor, with a combination of platinum and indium oxide to form thermocouples, is designed and fabricated by a microfabrication process to achieve in situ real-time temperature measurements. The stability and reliability of the sensor are greatly improved by optimizing the process parameters, structural design, and preparation methods. A novel micro-three-dimensional structure with better malleability is designed, which also takes advantage of the fast response of a two-dimensional thin film. The as-obtained flexible temperature sensor with excellent stability and reliability is expected to greatly contribute to the development of essential components in various emerging research fields, including bio-robot and healthcare systems. The model of the application sensor in a mask is further proposed and designed to realize the collection of health information, reducing the number of deaths caused by the lack of timely detection and treatment of patients.

With the advancement of modulation technology and the requirement for device miniaturization and integration, lithium niobate on insulator (LNOI) can be a versatile platform for this pursuit, as it can confine the transmitted light at the nanoscale, leading to a strong light–matter interaction, which can sensitively capture external variations, such as electric fields and temperature. This paper presents a compact microring modulator with versatile tuning based on X-cut LNOI. The LNOI modulator equipped with electrodes with a coverage angle of 120∘ achieved a maximum electro-optic (EO) tuning efficiency of 13 pm/V and a maximum extinction ratio of 11 dB. The asymmetry in the static or quasi-static electro-optic tuning of the microring modulator was also analyzed. Furthermore, we measured the thermal-optic effect of the device with a sensitivity of 26.33 pm/∘C, which can potentially monitor the environment temperature or compensate for devices’ functional behavior. The demonstrated efficient and versatile compact microring modulator will be an important platform for on-chip active or passive photonic components, microring-based sensor arrays and integrated optics.

Magnetometers based on nitrogen-vacancy (NV) centers in diamonds have promising applications in fields of living systems biology, condensed matter physics, and industry. This paper proposes a portable and flexible all-fiber NV center vector magnetometer by using fibers to substitute all conventional spatial optical elements, realizing laser excitation and fluorescence collection of micro-diamond with multi-mode fibers simultaneously and efficiently. An optical model is established to investigate multi-mode fiber interrogation of micro-diamond to estimate the optical performance of NV center system. A new analysis method is proposed to extract the magnitude and direction of the magnetic field, combining the morphology of the micro-diamond, thus realizing μm-scale vector magnetic field detection at the tip of the fiber probe. Experimental testing shows our fabricated magnetometer has a sensitivity of 0.73 nT/Hz1/2, demonstrating its feasibility and performance in comparison with conventional confocal NV center magnetometers. This research presents a robust and compact magnetic endoscopy and remote-magnetic measurement approach, which will substantially promote the practical application of magnetometers based on NV centers.

GaN high-electron-mobility transistor (HEMT) terahertz (THz) detectors have been widely studied and applied in the past few decades. However, there are few reports about the influence of GaN/AlGaN heterostructure material properties on the detection model at present. In this paper, a response voltage model for a GaN HEMT THz detector that considers the carrier scattering in a GaN/AlGaN heterostructure is proposed. The phonon scattering, dislocation scattering, and interface roughness scattering mechanisms are taken into account in the classic THz response voltage model; furthermore, the influence of various material parameters on the response voltage is studied. In a low-temperature region, acoustic scattering plays an important role, and the response voltage drops with an increase in temperature. In a high temperature range, optical phonon scattering is the main scattering mechanism, and the detector operates in a non-resonant detection mode. With an increase in carrier surface density, the response voltage decreases and then increases due to piezoelectric scattering and optical phonon scattering. For dislocation and interface roughness scattering, the response voltage is inversely proportional to the dislocation density and root mean square roughness (RMS) but is positively related to lateral correlation length. Finally, a comparison between our model and the reported models shows that our proposed model is more accurate.

Nano-steps, as classical nano-geometric reference materials, are very important for calibrating measurements in the semiconductor industry; therefore, controlling the height of nano-steps is critical for ensuring accurate measurements. Accordingly, in this study nano-steps with heights of 1, 2, 3 and 4 nm were fabricated with good morphology using atomic layer deposition (ALD) combined with wet etching. The roughness of the fabricated nano-steps was effectively controlled by utilizing the three-dimensional conformal ALD process. Moreover, the relationship between the surface roughness and the height was studied using a simulation-based analysis. Essentially, roughness control is crucial in fabricating nano-steps with a critical dimension of less than 5 nm. In this study, the minimum height of a nano-step that was successfully achieved by combining ALD and wet etching was 1 nm. Furthermore, the preconditions for quality assurance for a reference material and the influencing factors of the fabrication method were analyzed based on the 1 nm nano-step sample. Finally, the fabricated samples were used in time-dependent experiments to verify the optimal stability of the nano-steps as reference materials. This research is instructive to fabricate nano-geometric reference materials to within 5 nm in height, and the proposed method can be easily employed to manufacture wafer-sized step height reference materials, thus enabling its large-scale industrial application for in-line calibration in integrated circuit production lines.

To meet the need for micro-volume devices for high-precision measurement of temperature, Cu-Constantan (CuNi45) thin films with a novel array structure of thermo-electrodes were designed and fabricated. The thermo-electrodes on the probe-type substrate were deposited by magnetron sputtering technology and the profiling mask was prepared by 3D printing technology. The comprehensive performance of the temperature sensor was improved by systematic optimization of the heat treatment process and accuracy correction algorithm. Results showed that the sensor can measure with an accuracy of up to ±0.19%FS from −60 °C to 200 °C. The three-dimensional probe array temperature sensor shows great advantages in sensitivity, reliability resolution, stability, and measurement accuracy.

A sapphire fiber optic sensor for ultra-high temperature is developed, which owns the advantages of high temperature tolerance and compact. The detecting fiber is manufactured by fusing the sapphire fiber for detector head. The developed infrared radiation light is detected and the high temperature optical fiber sensor is placed in the ultra-high temperature furnace. The sensor signal will be transmitted to the display device through a photoelectric conversion module, and data acquisition module. As a result, the temperature response sensitivity is 2.292 uV1/2/K The measurement results show that the repeatability of the sensor is good. The maximum temperature measured by the sensor is 1823 K. The sensor can withstand 10 hours at high temperature and the error is less than 1 %. The development of common optical fiber sensor can stably exist at high-temperature. The sensor owns the advantage of simple, compact, easy to fabricate, what’s more, it can tolerate ultrahigh temperature for a long time.

ZigBee technology with the characteristics of low complexity, ad- hoc network, low cost, low power consumption and high security, is widely used for wireless sensing. Wireless sensor network is an interdisciplinary application between multi-sensor technology and wireless network, and has the broad application prospects in many fields such as intelligent agriculture and smart home. This paper designs and realizes an indoor environment monitoring system based on ZigBee and wireless sensor network. The system uses end-nodes to collect temperature, humidity, PM2.5 and other environmental parameters. The collected data is transmitted to the coordinator through wireless sensor network and finally to the monitoring system software by serial port protocol. The online monitoring platform with functions of real- time data display, storage and over-limit warning is developed by using the LabVIEW software. The test results show that the system is stable, easy to generate a network system, speedy and reliable to transmit data, and flexible to place nodes.

A nano-grating standard with accurate linewidth can not only calibrate the magnification of nano-measurement instruments, but can also enable comparison of linewidths. Unfortunately, it is still a challenging task to control the linewidth of nano-grating standards. Accordingly, in this paper, atomic layer deposition (ALD) was used to regulate the linewidth of the one-dimensional grating standards with a pitch of 1000 nm, fabricated by electron beam lithography (EBL). The standards were measured using an atomic force microscope (AFM) before and after ALD, and the linewidth and pitch of the grating were calculated through the gravity center method. The obtained results prove that the width of a single grating line in the standard can be regulated with great uniformity by precisely utilizing ALD. Meanwhile, the proposed method does not affect the pitch of grating, and the measurement uncertainty of standards is less than 0.16% of the pitch, thereby demonstrating a high surface quality and calibration reliability of the standards, and realizing the integration of linewidth and pitch calibration functions. Moreover, the precise and controllable fabrication method of the micro-nano periodic structure based on ALD technology has many potential applications in the fields of optoelectronic devices and biosensors.

Smart wearable devices are occupying an increasingly important position in scientific research and people’s life fields. As an indispensable component of smart wearable devices, sensors play a crucial role in their sensing and feedback capabilities. In this paper, we investigate the bending gesture sensing for the most dexterous part of human anatomy, the finger. Based on series-connected fiber Bragg gratings (FBGs), recognition of finger bending posture is achieved by MATLAB modeling and the cubic spline interpolation.

A side ohmic contact mode for the double channel GaN/AlGaN epitaxial layer is proposed in this paper. Rectangle transmission line model (TLM) electrodes are prepared, and the specific contact resistance is tested at the annealing temperatures from 700 °C to 850 °C. The results show that the minimum specific contact resistance is 2.58 × 10−7 Ω·cm2 at the annealing temperature of 750 °C, which is three to four times lower than the surface contact mode. Scanning electron microscope (SEM), energy dispersive spectrometer (EDS), and atomic force microscope (AFM) were carried out for the analysis of the morphology, element composition, and the height fluctuation at the contact edge. With the increase in the annealing temperature, the specific contact resistance decreases due to the alloying of electrodes and the raised number of N vacancies. However, when the annealing temperature exceeds 800 °C, the state of the stress in the electrode films transforms from compressive stress to tensile stress. Besides, the volume expansion of metal electrode film and the increase in the roughness at the contact edge leads to the degradation of the side ohmic contact characteristics.

Reduced graphene oxide (rGO) fiber as a carbon-based fiber sensor has aroused widespread interest in the field of gas sensing. However, the low response value and poor flexibility of the rGO fiber sensor severely limit its application in the field of flexible wearable electronics. In this paper, a flexible and wearable nylon fiber sensor modified by rGO and ZnO quantum dots (QDs) is proposed for wide-range NO2 gas detection at room temperature. The response value of the nylon fiber sensor to 100 ppm NO2 gas is as high as 0.4958, and the response time and recovery time are 216.2 s and 667.9 s, respectively. The relationship between the sensor’s response value and the NO2 concentration value is linear in the range of 20–100 ppm, and the fitting coefficient is 0.998. In addition, the test results show that the sensor also has good repeatability, flexibility, and selectivity. Moreover, an early warning module was also designed and is proposed in this paper to realize the over-limit monitoring of NO2 gas, and the flexible sensor was embedded in a mask, demonstrating its great application potential and value in the field of wearable electronics.

A Mach–Zehnder fiber optic sensor with high refractive index response sensitivity was developed. By fabricating a waist-enlarged bitaper structure on the interference arm of a single mode–multimode–single mode (SMS) Mach–Zehnder interferometer (MZI), the spectral contrast and response sensitivity were improved. Subsequently, the response sensitivity was further improved by etching the interference arm. When a beam of light was introduced into the sensor, due to the structural mismatch between the multimode fiber and the normal transmission light, the difference between the low-order mode and the high-order mode was generated in the fiber core and the fiber cladding. In the process of transmission in the sensing arm, due to the different refractive indices of the core and cladding, the optical path difference of the high-order mode and the low-order mode was different, which eventually generated interference fringes. The experimentally measured response sensitivity of SMS MZI in the range of 1.351 RIU to 1.402 RIU is 57.623 nm/RIU; the response sensitivity of a single mode–multimode–bitaper–multimode–single mode (SMBMS) MZI is 61.607 nm/RIU; and the response sensitivity of the etched SMBMS (ESMBMS) MZI is 287.65 nm/RIU. The response sensitivity of the new ESMBMS MZI is three times higher than that of the original SMS MZI. The sensor has the characteristics of compact structure, high sensitivity, easy manufacture, and a wide range of refractive index measurements, and can be used in food processing, pharmaceutical manufacturing and other fields.

An all-fiber temperature and refractive dual-parameter-sensing Michelson interferometer is designed based on the waist-enlarged bitaper. At 5 mm from the fiber end, the waist-enlarged bitaper is manually spliced and the probe is formed. Since the input light encounters the waist-enlarged bitaper, it will excite high-order modes to transmit in the fiber cladding, and there will be an optical path difference between the basic mode and the higher-order mode. The light transmitted in the core and cladding is reflected upon encountering the fiber end face and the interference occurs due to the optical path difference between basic mode and higher-order mode. Changes in temperature and refractive index at the fiber probe can be detected by monitoring the interference fringes. The refractive response sensitivity is −191.06 dBm/RIU from 1.351 RIU to 1.4027 RIU, and the temperature response sensitivity is 0.12 nm/°C from 11 °C to 98 °C. Through the sensitivity matrix equation, the superimposed refractive index and temperature signals can be effectively demodulated. The sensor has the advantages of multi-parameter measurement, compact structure, low cost, easy fabrication and high reliability.

Two sandwiched ZnO/Metal/ZnO transparent conductive thin films, 50nm ZnO/Cu/50nm ZnO (abbreviated as ZnO(Cu)) and 50nm ZnO/Ti/Cu/Ti/50nm ZnO (abbreviated as ZnO(Ti/Cu)) were deposited by magnetron sputtering technology. The comparative analysis of experiment results shows that the introduction of the Ti layer is beneficial to the overall properties of ZnO(Ti/Cu) thin film compared to ZnO(Cu) thin film with the same metal layer thickness. The effect of the annealing temperature on the performance of the two film systems was studied. Although the carrier concentration did not always increase with annealing temperature, the sheet resistances did decrease due to the obvious increase of mobility. The transmittance of ZnO(Cu) thin films increases with annealing temperature, while that of ZnO(Ti/Cu) films increases at first and then decreases. The optical band gap of ZnO(Cu) thin films increases with temperature, but is lower than that of ZnO(Ti/Cu) thin films, whose bandgap first increases with temperature and then decreases. The figure of merit of the ZnO(Ti/Cu) film is better than that of ZnO(Cu), which shows that the overall performance of ZnO(Ti/Cu) films is better, and annealing can improve the performance of the film systems.

Extrinsic optical fiber Fabry–Perot (F–P) high temperature sensors using Al2O3 ceramic tubes were fabricated by a microscope equipped with a CCD whose scaleplate has been calibrated using a standard gauge block. The initial cavity length of the F–P sensor, which must be larger than 36 µm, whose output signal is demodulated by the multi-peak method is determined. The temperature measurement range of the sensor is 25 °C–1000 °C. Because the temperature sensitivity of the F–P temperature sensor made by Al2O3 ceramic tubes, whose thermal expansion coefficient is different from that of the fiber, is dependent on the initial cavity length, a low initial cavity length is beneficial in improving sensor sensitivity. Compared with the results of the quartz tube F–P sensor, the temperature sensitivity of the ceramic tube F–P sensor is 10 times larger than that of the quartz tube F–P sensor. Hence, it can be deduced that the ceramic tube F–P sensor is greatly improved compared with the quartz tube F–P sensor.

Flexible temperature sensors have been extensively investigated due to their prospect of wide application in various flexible electronic products. However, most of the current flexible temperature sensors only work well in a narrow temperature range, with their application at high or low temperatures still being a big challenge. This work proposes a flexible thermocouple temperature sensor based on aerogel blanket substrate, the temperature-sensitive layer of which uses the screen-printing technology to prepare indium oxide and indium tin oxide. It has good temperature sensitivity, with the test sensitivity reaching 226.7 μ V °C ^−1 . Most importantly, it can work in a wide temperature range, from extremely low temperatures down to liquid nitrogen temperature to high temperatures up to 1200 °C, which is difficult to be achieved by other existing flexible temperature sensors. This temperature sensor has huge application potential in biomedicine, aerospace and other fields.

In electrohydrostatic drive actuators, there is a demand for temperature and pressure monitoring in complex environments. Fiber Bragg grating (FBG) has become a promising sensor for measuring temperature and pressure. However, there is a cross-sensitivity between temperature and pressure. A gold-plated FBG is proposed and manufactured, and an FBG is used as a reference grating to form a parallel all-fiber sensing system, which can realize the simultaneous measurement of pressure and temperature. Based on the simulation software, the mechanical distribution of the pressure diaphragm is analyzed, and the fixation scheme of the sensor is determined. Using the demodulator to monitor the changes in the reflectance spectrum in real-time, the pressure and ambient temperature applied to the sensor are measured. The experimental results show that the temperature sensitivity of gold-plated FBG is 3 times that of quartz FBG, which can effectively distinguish the temperature changes. The pressure response sensitivity of gold-plated FBG is 0.3 nm/MPa, which is same as the quartz FBG. Through the sensitivity matrix equation, the temperature and pressure dual-parameter sensing measurement is realized. The accuracy of the temperature and pressure measurement is 97.7% and 99.0%, and the corresponding response rates are 2.7 ms/°C and 2 ms/MPa, respectively. The sensor has a simple structure and high sensitivity, and it is promising to be applied in health monitoring in complex environments with a high temperature and high pressure.

A double-channel (DC) GaN/AlGaN high-electron-mobility transistor (HEMT) as a terahertz (THz) detector at 315 GHz frequency is proposed and fabricated in this paper. The structure of the epitaxial layer material in the detector is optimized, and the performance of the GaN HEMT THz detector is improved. The maximum responsivity of 10 kV/W and minimum noise equivalent power (NEP) of 15.5 pW/Hz0.5 are obtained at the radiation frequency of 315 GHz. The results are comparable to and even more promising than the reported single-channel (SC) GaN HEMT detectors. The enhancement of THz response and the reduction of NEP of the DC GaN HEMT detector mainly results from the interaction of 2DEG in the upper and lower channels, which improves the self-mixing effect of the detector. The promising experimental results mean that the proposed DC GaN/AlGaN HEMT THz detector is capable of the practical applications of THz detection.

In the present study, a high-performance n-type temperature sensor was developed by a new and facile synthesis approach, which could apply to ambient temperature applications. As impacted by the low sintering temperature of flexible polyimide substrates, a screen printing technology-based method to prepare thermoelectric materials and a low-temperature heat treatment process applying to polymer substrates were proposed and achieved. By regulating the preparation parameters of the high-performance n-type indium oxide material, the optimal proportioning method and the post-treatment process method were developed. The sensors based on thermoelectric effects exhibited a sensitivity of 162.5 μV/°C, as well as a wide range of temperature measurement from ambient temperature to 223.6 °C. Furthermore, it is expected to conduct temperature monitoring in different scenarios through a sensor prepared in masks and mechanical hands, laying a foundation for the large-scale manufacturing and widespread application of flexible electronic skin and devices.

Tungsten-rhenium thin-film thermocouples (TFTCs) are designed by finite element analysis (FEA) and fabricated based on radio frequency (RF) magnetron sputtering technology to meet the requirement of high temperature measurement in narrow space. The changes with thickness and thermoelectric property (including Seebeck coefficient, repeatability error) of TFTCs are investigated under different heat treatment time and temperature by the result of morphology observation and heat recycling experiment analysis to optimize heat treatment process parameters. The repeatability error of tungsten-rhenium TFTCs with heat treatment at 300 °C for 6 hours can reach to ±1.028%. The electromotive force behavior (EMF) experiments shows the average Seebeck coefficient of heat treated tungsten-rhenium TFTCs reach to 18.92 µV/°C when the temperature difference is 1165 °C (hot junction temperature is 1327 °C) in inert gases protection environment. The thermoelectric service properties of tungsten-rhenium TFTCs sensor have been improved to be a viable replacement candidate for high temperature measurement in narrow space through this technology.

The optical fiber temperature and refractive index sensor combined with the hollow needle structure for medical treatment can promote the standardization of traditional acupuncture techniques and improve the accuracy of body fluid analysis. A double-parameter sensor based on fiber Bragg grating (FBG) is developed in this paper. The sensor materials are selected through X-ray diffraction (XRD) analysis, and the sensor sensing principle is theoretically analyzed and simulated. Through femtosecond laser writing pure silica fiber, a high temperature resistant wavelength type FBG temperature sensor is obtained, and the FBG is corroded by hydrofluoric acid (HF) to realize a high-sensitivity intensity-type refractive index sensor. Because the light has dual characteristics of energy and wavelength, the sensor can realize simultaneous dual-parameter sensing. The light from the lead-in optical fiber is transmitted to the sensor and affected by temperature and refractive-index; then, the reflection peak is reflected back to the lead-out fiber by the FBG. The high temperature response and the refractive index response of the sensor were measured in the laboratory, and the high temperature characteristics of the sensor were verified in the accredited institute. It is demonstrated that the proposed sensor can achieve temperature sensing up to 1150 °C with the sensitivity of 0.0134 nm/°C, and refractive sensing over a refractive range of 1.333 to 1.4027 with the sensitivity of −49.044 dBm/RIU. The sensor features the advantages of two-parameter measurement, compact structure, and wide temperature range, and it exhibits great potential in acupuncture treatment.

In this paper, a novel micro-displacement sensor with double optical fiber probes is proposed and designed, which can realize the highly sensitive sensing of longitudinal or lateral micro-displacements. The optical fiber probes are made through photopolymer formulation, and the effects of reaction time and optical power on the growth length of the probe are illustrated. The relationship between light intensity and longitudinal micro-displacement is a power function in the range of 0–100 μm at room temperature with a correlation coefficient of 98.92%. For lateral micro-displacement, the sensitivity is −2.9697 dBm/μm in the range of 0–6 μm with a linear fit of 99.61%. In addition, the linear correlation coefficient decreases as the initial longitudinal distance increases, and the function of these correlation coefficients is also linear with a linearity of 96.14%. This sensor has a simple manufacturing process, low cost, high sensitivity, and fast response speed. It is suitable for harsh environments such as strong electromagnetic interference and corrosivity, and has a broad application prospect in the field of micro-displacement sensing.

WRe26-In2O3 (WRe26 (tungsten-26% rhenium) and In2O3 thermoelectric materials) thin film thermocouples (TFTCs) have been fabricated based on magnetron sputtering technology, which can be used in temperature measurement. Many annealing processes were studied to promote the sensitivity of WRe26-In2O3 TFTCs. The optimal annealing process of the thermocouple under this kind of RF magnetron sputtering method was proposed after analyzing the properties of In2O3 films and the thermoelectric voltage of TFTCs at different annealing processes. The calibration results showed that the WRe26-In2O3 TFTCs achieved a thermoelectric voltage of 123.6 mV at a temperature difference of 612.9 K, with a sensitivity of up to 201.6 µV/K. Also, TFTC kept a stable thermoelectric voltage output at 973 K for 20 min and at 773 K for two hours. In general, the WRe26-In2O3 TFTCs developed in this work have great potential for practical applications. In future work, we will focus on the thermoelectric stability of TFTCs at higher temperatures.

A combined sensor to simultaneously measure strain, vibration, and temperature has been developed. The sensor is composed of two Fiber Bragg gratings (FBGs) and a vibration gainer. One FBG is used to measure strain, while the other measures vibration and temperature. The gainer has a mass block which is used to increase its sensitivity to vibration. The main beam of the vibration gainer was designed as a trapezoid in order to reduce the strain gradient while sensing vibration. In addition, an interrogation method was used to eliminate interactions between measured parameters. Experiments were carried out to analyze the performance of the proposed sensor. For individual strain measurement in the range of 0−152 με, the sensitivity and nonlinearity error were 1.878 pm/με and 2.43% Full Scale (F.S.), respectively. For individual temperature measurement in the range of 50−210 °C, the sensitivity and nonlinearity error were 29.324 pm/°C and 1.88% F.S., respectively. The proposed sensor also demonstrated a sensitivity of 0.769 pm/m·s−2 and nonlinearity error of 1.83% F.S. for vibration measurement in the range of 10−55 m/s2. Finally, simultaneously measuring strain, temperature, and vibration resulted in nonlinearity errors of 4.23% F.S., 1.89% F.S., and 2.23% F.S., respectively.

A thin-film thermocouples (TFTCs) sensor based on silicon carbide substrate, 95 wt% tungsten−5 wt% rhenium (W-5Re) and 74 wt% tungsten−26 wt% rhenium (W-26Re) thermosensitive part with aluminum oxide protective coating layer was designed and fabricated by radio frequency (RF) magnetron sputtering. It exhibited a high thermoelectric voltage of 35.51 mV when the temperature difference was 1240 °C (the hot junction temperature was 1420 °C), with an average Seebeck coefficient of 28.63 µV/°C, which was 27% larger than the standard C-type thermocouple wires at the same temperature difference. The repeatability error was ±4.1%, the drift rate was 9.6 °C/h for 10 h and the laser response time was 0.36 ms. Compared to the traditional thermocouple, it could provide long-term temperature testing within 1420 °C for the requirement of high-temperature measurement and high response speed.

Environmental monitoring plays an important role in the preventive protection of ancient buildings, although it is still in the prototype stage. In order to provide data support for the protection of ancient buildings, an environmental monitoring system with multi-sensor and multi-node for the interior and exterior of ancient buildings is designed and realized, based on ZigBee, TCP/IP, and intranet penetration technology. The new type of indoor node package box and outdoor package device are designed to meet the needs of different types of sensors. The monitoring platform is developed on the strength of the LabView so as to obtain real-time display, storage, and over-limit warning functions for local and remote monitoring data. It also proves that the monitoring system is stable and reliable by monitoring the actual ancient building with a brick (stone) structure.

An ordinary optical fiber ultra-high temperature sensor based on infrared radiation with the advantages of simple structure and compact is presented. The sensing system consists of a detection fiber and a common transmission fiber. The detector fiber is formed by annealing a piece of ordinary fiber at high temperature twice, which changes the properties of the fiber and breaks the temperature limit of ordinary fiber. The transmission fiber is a bending insensitive optical fiber. A static calibration system was set up to determine the performance of the sensor and three heating experiments were carried out. The temperature response sensitivities were 0.010 dBm/K, 0.009 dBm/K and 0.010 dBm/K, respectively, which indicate that the sensor has good repeatability. The sensor can withstand a high temperature of 1823 K for 58 h with an error of less than 1%. The main reason why the developed ordinary optical fiber sensor can work steadily for a long time at high temperature is the formation of β-cristobalite, which is stable at high-temperature.

A temperature multipoint sensing system based on three cascade Mach–Zehnder interferometers (MZIs) is introduced. The MZIs with different lengths are fabricated based on waist-enlarged fiber bitapers. The fast Fourier transformation is applied to the overlapping transmission spectrum and the corresponding interference spectra can be obtained via the cascaded frequency spectrum based on the inverse Fourier transformation. By analyzing the drift of interference spectra, the temperature response sensitivities of 0.063 nm/°C, 0.071 nm/°C, and 0.059 nm/°C in different furnaces can be detected from room temperature up to 1000 °C, and the temperature response at different regions can be measured through the sensitivity matrix equation. These results demonstrate feasibility of multipoint measurement, which also support that the temperature sensing system provides new solution to the MZI cascade problem.

A combined stress-vibration sensor was developed to measure stress and vibration simultaneously based on fiber Bragg grating (FBG) technology. The sensor is composed of two FBGs and a stainless steel plate with a special design. The two FBGs sense vibration and stress and the sensor can realize temperature compensation by itself. The stainless steel plate can significantly increase sensitivity of vibration measurement. Theoretical analysis and Finite Element Method (FEM) were used to analyze the sensor’s working mechanism. As demonstrated with analysis, the obtained sensor has working range of 0–6000 Hz for vibration sensing and 0–100 MPa for stress sensing, respectively. The corresponding sensitivity for vibration is 0.46 pm/g and the resulted stress sensitivity is 5.94 pm/MPa, while the nonlinearity error for vibration and stress measurement is 0.77% and 1.02%, respectively. Compared to general FBGs, the vibration sensitivity of this sensor is 26.2 times higher. Therefore, the developed sensor can be used to concurrently detect vibration and stress. As this sensor has height of 1 mm and weight of 1.15 g, it is beneficial for minimization and integration.