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We report on the development of multi-absorber transition edge sensors (TESs), referred to as hydras. A hydra consists of multiple x-ray absorbers each with a different thermal conductance to a TES. Position information is encoded in the pulse shape. With some trade-off in performance, hydras enable very large format arrays without the prohibitive increase in bias and read-out components associated with arrays of individual TESs. Hydras are under development for the next generation of space telescope such as Lynx. Lynx is a NASA concept under study that will combine a < 1 arcsecond angular resolution optic with 100,000-pixel microcalorimeter array with energy resolution of deltaE_FWHM ~ 3 eV in the soft x-ray energy range. We present first results from hydras with 25-pixels for Lynx. Designs with absorbers on a 25 micron and 50 micron pitch are studied. Arrays incorporate, for the first time, microstrip buried wiring layers of suitable pitch and density required to readout a full-scale Lynx array. The resolution from the coadded energy histogram including all 25-pixels was deltaE_FWHM = 1.66+/-0.02 eV and 3.34+/-0.06 eV at an energy of 1.5 keV for the 25 micron and 50 micron absorber designs respectively. Position discrimination is demonstrated from parameterization of the rise-time., Comment: 7 pages, 5 figures. Low Temperature Detectors 18 Conference, Milan Italy

ATHENA is a European led x-ray observatory due for launch in the early 2030s. The X-ray Integral Field Unit (X-IFU) instrument on ATHENA will have an array of 3168 TES microcalorimeters, 2.5 eV resolution (at 7 keV), 5 arc second angular resolution and a 5 arc minute field of view. As one example, will allow unprecedented views of composition and dynamics of galaxy clusters.

In many superconducting transition-edge sensor (TES) microcalorimeters, the measured electrical noise exceeds theoretical estimates based on a thermal model of a single body thermally connected to a heat bath. Here, we report on noise and complex impedance measurements of a range of designs of TESs made with a Mo/Au bilayer. We have fitted the measured data using a two-body model, where the x-ray absorber and the TES are connected by an internal thermal conductance Gae. We find that the so-called excess noise measured in these devices is consistent with the noise generated from the internal thermal fluctuations between the x-ray absorber and the TES. Our fitted parameters are consistent with the origin of Gae being from the finite thermal conductance of the TES itself. These results suggest that even in these relatively low resistance Mo/Au TESs, the internal thermal conductance of the TES may add significant additional noise and could account for all the measured excess noise. Furthermore, we find that around regions of the superconducting transition with rapidly changing derivative of resistance with respect to temperature, an additional noise mechanism may dominate. These observations may lead to a greater understanding of TES devices and allow the design of TES microcalorimeters with improved performance.

The focal plane of the X-ray integral field unit (X-IFU) for ESA's Athena X-ray observatory will consist of approximately 4000 transition edge sensor (TES) x-ray microcalorimeters optimized for the energy range of 0.2 to 12 kiloelectronvolts. The instrument will provide unprecedented spectral resolution of approximately 2.5 electronvolts at energies of up to 7 kiloelectronvolts and will accommodate photon fluxes of 1 milliCrab (90 counts per second) for point source observations. The baseline configuration is a uniform large pixel array (LPA) of 4.28 arcseconds pixels that is read out using frequency domain multiplexing (FDM). However, an alternative configuration under study incorporates an 18 by × 18 small pixel array (SPA) of 2 arcseconds pixels in the central approximately 36 arcseconds region. This hybrid array configuration could be designed to accommodate higher fluxes of up to 10 milliCrabs (900 counts per second) or alternately for improved spectral performance (less than 1.5 electronvolts) at low count-rates. In this paper we report on the TES pixel designs that are being optimized to meet these proposed LPA and SPA configurations. In particular we describe details of how important TES parameters are chosen to meet the specific mission criteria such as energy resolution, count-rate and quantum efficiency, and highlight performance trade-offs between designs. The basis of the pixel parameter selection is discussed in the context of existing TES arrays that are being developed for solar and x-ray astronomy applications. We describe the latest results on DC biased diagnostic arrays as well as large format kilo-pixel arrays and discuss the technical challenges associated with integrating different array types on to a single detector die.

The traditional method of applying a digital optimal filter to measure X-ray pulses from transition-edge sensor (TES) devices does not achieve the best energy resolution when the signals have a highly non-linear response to energy, or the noise is non-stationary during the pulse. We present an implementation of a method to analyze X-ray data from TESs, which is based upon principal component analysis (PCA). Our method separates the X-ray signal pulse into orthogonal components that have the largest variance. We typically recover pulse height, arrival time, differences in pulse shape, and the variation of pulse height with detector temperature. These components can then be combined to form a representation of pulse energy. An added value of this method is that by reporting information on more descriptive parameters (as opposed to a single number representing energy), we generate a much more complete picture of the pulse received. Here we report on progress in developing this technique for future implementation on X-ray telescopes. We used an 55Fe source to characterize Mo/Au TESs. On the same dataset, the PCA method recovers a spectral resolution that is better by a factor of two than achievable with digital optimal filters.

We have produced a variety of superconducting transition edge sensor array designs for microcalorimetric detection of x-rays. Designs include kilopixel scale arrays of relatively small sensors (approximately 75 micron pitch) atop a thick metal heat sinking layer as well as arrays of membrane-isolated devices on 250 micron and up to 600 micron pitch. We discuss fabrication and performance of microstripline wiring at the small scales achieved to date. We also address fabrication issues with reduction of absorber contact area in small devices.

Like MMCs, MPTs enable high energy microcalorimeters with zero bias power dissipation and potential resolution < 1 eV. MPTs can provide d(phi)/dT as large as 1000 (Phi)(sub 0)/K, with no excess noise, thereby reducing the importance of SQUID noise. Long coherence length in a Type-I superconducting MoAu film offers multiple advantages for efficient flux expulsion in MPT. Region of steepest d(phi)/dT is the Meissner effect in the small device; flux is expelled/penetrates to minimize free energy. Steepness of transition can be engineered with choice of film thickness and coil pitch relative to lambda(sub eff)(0), ratio of T/T(sub c), and bias circuit inductance.

We have made high resolution x-ray microcalorimeters using superconducting MoAu bilayers and Nb meander coils. The temperature sensor is a Magnetic Penetration Thermometer (MPT). Operation is similar to metallic magnetic calorimeters, but instead of the magnetic susceptibility of a paramagnetic alloy, we use the diamagnetic response of the superconducting MoAu to sense temperature changes in an x-ray absorber. Flux-temperature responsivtty can be large for small sensor heat capacity, with enough dynamic range for applications. We find models of observed flux-temperature curves require several effects to explain flux penetration or expulsion in the microscopic devices. The superconductor is non-local, with large coherence length and weak pinning of flux. At lowest temperatures, behavior is dominated by screening currents that vary as a result of the temperature dependence of the magnetic penetration depth, modified by the effect of the nonuniformity of the applied field occurring on a scale comparable to the coherence length. In the temperature regime where responslvity is greatest, spadal variations in the order parameter become important: both local variations as flux enters/leaves the film and an intermediate state is formed, and globally as changing stability of the electrical circuit creates a Meissner transition and flux is expelled/penetrates to minimize free energy.

We have produced a variety of superconducting transition edge sensor array designs for microcalorimetric detection of x-rays. Arrays are characterized with a time division SQUID multiplexer such that greater than 10 devices from an array can be measured in the same cooldown. Designs include kilo pixel scale arrays of relatively small sensors (-75 micron pitch) atop a thick metal heatsinking layer as well as arrays of membrane-isolated devices on 250 micron and up to 600 micron pitch. We discuss fabrication and performance of microstripline wiring at the small scales achieved to date. We also address fabrication issues with reduction of absorber contact area in small devices.

The Micro-X sounding rocket program will fly a 128-element array of transition-edge-sensor microcalorimeters to enable high-resolution X-ray imaging spectroscopy of the Puppis-A supernova remnant. To match the angular resolution of the optics while maximizing the field-of-view and retaining a high energy resolution (< 4 eV at 1 keV), we have designed the pixels using 600 x 600 sq. micron Au/Bi absorbers, which overhang 140 x 140 sq. micron Mo/Au sensors. The data-rate capabilities of the rocket telemetry system require the pulse decay to be approximately 2 ms to allow a significant portion of the data to be telemetered during flight. Here we report experimental results from the flight array, including measurements of energy resolution, uniformity, and absorber thermalization. In addition, we present studies of test devices that have a variety of absorber contact geometries, as well as a variety of membrane-perforation schemes designed to slow the pulse decay time to match the telemetry requirements. Finally, we describe the reduction in pixel-to-pixel crosstalk afforded by an angle-evaporated Cu backside heatsinking layer, which provides Cu coverage on the four sidewalls of the silicon wells beneath each pixel.

We are developing magnetic penetration thermometers (MPTs) for applications in X-ray astronomy. These non-dissipative devices consist of an X-ray absorber in good thermal contact to a superconducting thin film with a transition temperature around T=100mK. A microfabricated superconducting planar inductor underneath is used to store a persistent current and couple the superconductor's diamagnetic response to a readout SQUID. The strong temperature dependence of the diamagnetic response make these devices suitable for highly sensitive macroscopic thermometers that are capable of achieving very high energy resolution. We present results achieved with MPTs consisting of MoAu bilayer sensors attached to overhanging square 250 micron by 250 micron gold absorbers that have demonstrated an energy resolution of delta E_FWHM=2.3eV at an X-ray energy of 5.9keV. A similar device has shown delta E_FWHM=2.0eV at 1.5 keV. Under certain conditions and for specific device geometries, the temperature responsivity of the MPTs can vary on long timescales degrading the spectral performance. We present the characterization of different inductor geometries to optimize the design for the highest possible temperature sensitivity and compare different device designs with respect to responsivity stability.

We are developing kilo-pixel arrays of transition-edge sensor (TES) microcalorimeters for future X-ray astronomy observatories or for use in laboratory astrophysics applications. For example, Athena/XMS (currently under study by the european space agency) would require a close-packed 32x32 pixel array on a 250-micron pitch with < 3.0 eV full-width-half-maximum energy resolution at 6 keV and at count-rates of up to 50 counts/pixel/second. We present characterization of 32x32 arrays. These detectors will be readout using state of the art SQUID based time-domain multiplexing (TDM). We will also present the latest results in integrating these detectors and the TDM readout technology into a 16 row x N column field-able instrument.

We are developing small-pixel transition-edge-sensor (TES) for solar physics and astrophysics applications. These large format close-packed arrays are fabricated on solid silicon substrates and are designed to accommodate count-rates of up to a few hundred counts/pixel/second at a FWHM energy resolution approximately 2 eV at 6 keV. We have fabricated versions that utilize narrow-line planar and stripline wiring. We present measurements of the performance and uniformity of kilo-pixel arrays, incorporating TESs with single 65-micron absorbers on a 7s-micron pitch, as well as versions with more than one absorber attached to the TES, 4-absorber and 9-absorber "Hydras". We have also fabricated a version of this detector optimized for lower energies and lower count-rate applications. These devices have a lower superconducting transition temperature and are operated just above the 40mK heat sink temperature. This results in a lower heat capacity and low thermal conductance to the heat sink. With individual single pixels of this type we have achieved a FWHM energy resolution of 0.9 eV with 1.5 keV Al K x-rays, to our knowledge the first x-ray microcalorimeter with sub-eV energy resolution. The 4-absorber and 9-absorber versions of this type achieved FWHM energy resolutions of 1.4 eV and 2.1 eV at 1.5 keV respectively. We will discuss the application of these devices for new astrophysics mission concepts.

In this paper we present the progress made at SRON in the read-out of GSFC x-ray transition-edge sensor (TES) micro-calorimeters in the frequency domain. The experiments reported so far, whose aim was to demonstrate an energy resolution of 2eV at 6 keV with a TES acting as a modulator, were carried out at frequencies below 700 kHz using a standard flux locked loop (FLL) SQUID read-out scheme. The TES read-out suffered from the use of sub-optimal circuit components, large parasitic inductances, low quality factor resonators and poor magnetic field shielding. We have developed a novel experimental set-up, which allows us to test several read-out schemes in a single cryogenic run. In this set-up, the TES pixels are coupled via superconducting transformers to 18 high-Q lithographic LC filters with resonant frequencies ranging between 2 and 5 MHz. The signal is amplified by a two-stage SQUID current sensor and baseband feedback is used to overcome the limited SQUID dynamic range. We study the single pixel performance as a function of TES bias frequency, voltage and perpendicular magnetic field.

We are developing multi-absorber Transition-Edge Sensors (TESs) for applications in x-ray astronomy. These position-sensitive devices consist of multiple x-ray absorbers each with a different thermal coupling to a single readout TES. Heat diffusion between the absorbers and the TES gives rise to a characteristic pulse shape corresponding to each absorber element and enables position discrimination. The development of these detectors is motivated by a desire to maximize focal plane arrays with the fewest number of readout channels. In this contribution we report on the first results from devices consisting of nine) 65 X 65 sq. microns Au x-ray absorbers) 5 microns thick. These are coupled to a single 35 X 35 sq. microns Mo/Au bilayer TES. These devices have demonstrated full-width-half-maximum (FWHM) energy resolution of 2.1 eV at 1.5 keV) 2.5 eV at 5.9 keV and 3.3 eV at 8 keV. This is coupled with position discrimination from pulse shape over the same energy range. We use a finite-element model to reproduce the measured pulse shapes and investigate the detector non-linearity with energy) which impacts on the devices position sensitivity and energy resolution.

The temperature dependent behavior of a superconducting body in an applied magnetic field involves flux penetration/expulsion both from screening currents (within a magnetic penetration depth) and variations in the superconducting order parameter (locally to form vortices or a mixed state, or globally in the Meissner effect). The temperature dependence of the magnetic penetration depth, in particular, has been used to make highly sensitive macroscopic thermometers. For the microscopic device volumes required in sensitive low temperature photon detectors, properties of actual thin film materials, non-uniformity of applied magnetic fields, and the influence of measurement circuit dynamics are complicating factors. We discuss the various penetration effects as demonstrated in a particularly promising combination of material and geometry that we have used to make sensitive x-ray microcalorimeters.

Driven initially by the desire for X-ray microcalorimeter arrays suitable for imaging the dynamic solar corona, we have developed a transition-edge-sensor (TES) microcalorimeter optimization that exhibits a unique combination of high spectral resolving power and a wide X-ray bandpass. These devices have achieved spectral performance of dE approximately 1.3 eV FWHM at 1.5 keV, 1.6 eV at 6 keV, and 2.0 eV at 8 keV, using small TESs (e.g., approximately 35 micron x 35 micron) that operate in a regime in which the superconducting transition is highly current dependent. In order to accommodate high X-ray count rates, the devices sit directly on a solid substrate instead of on membranes, and we use an embedded heatsinking layer to reduce pixel-to-pixel crosstalk. We will present results from devices with a range of TES and absorber sizes, and from device wafers with varied embedded heatsink materials. This contribution will focus on count-rate capabilities, including a discussion of the trade-off between count rate and energy resolution, and the heatsinking design. We will also present preliminary tests of array readout using a code-division multiplexed SQUID readout scheme, which may be necessary to enable large arrays of these fast devices.

We present measurements of high fill-factor arrays of superconducting transition-edge x-ray microcalorimeters designed to provide rapid thermalization of the x-ray energy. We designed an x-ray absorber that is cantilevered over the sensitive part of the thermometer itself, making contact only at normal metal-features. With absorbers made of electroplated gold, we have demonstrated an energy resolution between 2.4 and 3.1 eV at 5.9 keV on 13 separate pixels. We have determined the thermal and electrical parameters of the devices throughout the superconducting transition, and, using these parameters, have modeled all aspects of the detector performance.

A Position Sensitive Transition-Edge Sensor (PoST) is a microcalorimeter device capable of one-dimensional imaging spectroscopy. The device consists of two Transition-Edge Sensors (TESs) connected to the ends of a long X-ray absorbing strip. The energy of a photon hitting the absorber and the position of the absorption event along the strip is measured from the response in the two sensors by analyzing the relative signal sizes, pulse rise times, and the sum of the pulses measured at each sensor, We report on the recent PoST effort at Goddard for applications to large field of view, high-energy- resolution, X-ray astrophysics.