228 results on '"Saile, Volker"'
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2. LIGA
3. Nanofabrication by Self-Assembly
4. Doping and Surface Modification
5. Device Fabrication—An Example
6. Deposition Technologies
7. Etching Technologies
8. Introduction—MEMS, a Historical Perspective
9. Vacuum Technology
10. Enabling Technologies II—Contamination Control
11. Mikrostrukturtechnik und Biomaterialien
12. Gold Helix Photonic Metamaterial as Broadband Circular Polarizer
13. Pump-free transport of magnetic particles in microfluidic channels
14. Electron beam lithography of V-shaped silver nanoantennas
15. Micro and Nano Fabrication
16. Fabrication of cell container arrays with overlaid surface topographies
17. First automated production line for X-ray-LIGA (FELIG) is brought on line
18. Polyimide-based X-ray masks with advanced performance of pattern accuracy and thermal stability
19. Why you will use the deep X-ray LIG(A) technology to produce MEMS?
20. Structure quality in deep X-ray lithography applying commercial polyimide-based masks
21. Deep X-Ray Lithography
22. An ultrasonic welding based process for building up a new class of inert fluidic microsensors and -actuators from polymers
23. LIGA Technology for R&D and Industrial Applications
24. Photoemission study of pristine and photodegraded poly(methyl methacrylate)
25. Applications of LIGA technology to precision manufacturing of high-aspect-ratio micro-components and -systems: a review
26. Microfluidic lab-on-a-chip systems based on polymers—fabrication and application
27. Experimental and full multiple scattering approaches to X-ray absorption near-edge structure spectra of chloronaphthalene in CH 3I solvent
28. Advanced Conductivity Detection for Microfluidics
29. Extreme ultraviolet (EUV) sources for lithography based on synchrotron radiation
30. Special issue of the high-aspect-ratio micro-structure technology workshop, HARMST’07, Besançon, France, 7–9 June 2007
31. VUV Monochromators at Synchrotron Radiation Sources
32. A Novel Optical Beam Concept for Producing Coherent Synchrotron Radiation with Large Energy Spread Beams
33. Launching into a golden age: gears (mm parts) made by the deep X-ray LIG(A) process
34. Commercialisation of LIGA: a 25-year retrospective
35. Photoemission from doped solid rare gases.
36. Large-aperture two-dimensional x-ray refractive mosaic lenses
37. On the ANKA decision: a response to Braun'sJust for us?
38. Novel optical materials and devices by direct laser writing
39. Gold helix photonic metamaterial as broadband circular polarizer
40. BackMatter.
41. FrontMatter.
42. Fabrication of cell container arrays with overlaid surface topographies
43. Closer to Nature–Bio‐inspired Patterns by Transforming Latent Lithographic Images
44. Novel Optical Materials and Devices by Direct Laser Writing
45. First automated production line for X-ray-LIGA (FELIG) is brought on line
46. A novel fabrication method to integrate super hydrophobic nanostructures into microfluidic systems
47. Transmission hard X-ray microscope with increased view field using planar refractive objectives and condensers made of SU-8 polymer
48. Comparison of measurement methods for microsystem components: application to microstructures made by the deep x-ray lithography process (x-ray LIGA)
49. Metrology study of high precision mm parts made by the deep x-ray lithography (LIGA) technique
50. Polarizing Properties of Three-Dimensional Helical Metamaterials
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