1. Rubidium Focused Ion Beam Induced Platinum Deposition
- Author
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Li, Yang, Xu, Sheng, Sezen, Meltem, Misirlioglu, Feray Bakan, and Vredenbregt, Edgar
- Subjects
Physics - Applied Physics - Abstract
This work presents characterization of focused ion beam induced deposition (FIBID) of platinum using both rubidium and gallium ions. Under similar beam energies, 8.5 keV for Rb$^+$ and 8.0 keV for Ga$^+$, and beam current near 10 pA, the two ion species deposited Pt films at similar rates. Energy-dispersive x-ray spectroscopy shows that the Rb$^+$ FIBID-Pt consists of similar Pt contents with much lower primary ion contents (5% Rb and 27% Ga) than the Ga$^+$ FIBID-Pt. The deposited material was also measured to have a resistivity of $8.1\times 10^4$ $\mathrm{\mu\Omega\cdot cm}$ for the Rb$^+$ FIBID-Pt and $5.7\times 10^3$ $\mathrm{\mu\Omega\cdot cm}$ for the Ga$^+$ FIBID-Pt., Comment: 5 pages, 5 figures
- Published
- 2022
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