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Abstract: Laser damage behaviors of thin-film beam splitters for third harmonic separation were investigated under the simultaneous exposure of fundamental frequency (1ω) and the third harmonics laser beam (3ω). The samples were prepared by conventional e-beam evaporation, and the surface laser-induced damage thresholds (LIDT) of the samples were obtained for the irradiations of 3ω only and 3ω with various fluence of 1ω. It was found that external 1ω can raise damage probability of multilayer films; the higher the 1ω energy density, the lower the damage threshold. Additionally, numerical simulation of damage probability was given for the simultaneous exposure to two beams. [Copyright &y& Elsevier]