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Dielectrophoresis is a potential candidate for aligning nanorods on electrodes, in which the interplay between electric fields and microfluidics is critically associated with its yield. Despite much of previous work on dielectrophoresis, the impact of frequency modulation on dielectrophoresis-driven nanorod self-assembly is insufficiently understood. In this work, we systematically explore the frequency dependence of the self-alignment of silicon nanorod using a microfluidic channel. We vary the frequency from 1kHz to 1000 kHz and analyze the resulting alignments in conjunction with numerical analysis. Our experiment reveals an optimal alignment yield at approximately 100 kHz, followed by a decrease in alignment efficiency. The nanorod self-alignments are influenced by multiple consequences, including the trapping effect, induced electrical double layer, electrohydrodynamic flow, and particle detachment. This study provides insights into the impact of frequency modulation of electric fields on the alignment of silicon nanorods using dielectrophoresis, broadening its use in various future nanotechnology applications. [ABSTRACT FROM AUTHOR]