1. Physical Features of Double Sided Diffusion of Lithium into Silicon for Large Size Detectors.
- Author
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Muminov, R. A., Saymbetov, A. K., Japashov, N. M., Toshmurodov, Yo. K., Radzhapov, S. A., Kuttybay, N. B., and Nurgaliyev, M. K.
- Subjects
NUCLEAR counters ,LITHIUM ,SILICON crystals ,CHEMICAL processes ,SEMICONDUCTOR wafers ,DIFFUSION - Abstract
In this paper, we propose a new method for double sided diffusion of lithium ions into a monocrystalline silicon wafer for the further fabrication of Si (Li) p-i-n nuclear radiation detectors with a diameter of the sensitive surface of more than 110 mm and a thickness of the sensitive region of more than 4 mm. It was found that the optimal regime for lithium diffusion into large-diameter silicon is at a temperature of T = (450 ± 20) °C, time t = 3 min, thickness h
Li = (300 ± 10) mm. The theoretical assumptions and experimental characteristics of double sided diffusion are considered. As initial material the dislocation free monocrystalline cylindrical silicon crystal of the p-type, obtained by the floating-zone method (with a diameter 110 mm, thickness 8-10 mm, resistivity ρ=1000 ÷ 10000 Ohm·cm and life time τ = 500 μs) and the silicon crystal of the p-type (with a diameter of 110 mm, resistivity ρ = 10 ÷ 12 Ohm·cm, lifetime τ = 50 μs, grown in an argon atmosphere) obtained by the Czochralski method were used. Correspondingly, the technological processes of mechanical and chemical processing of semiconductor wafers based on silicon of a large area have been improved. [ABSTRACT FROM AUTHOR]- Published
- 2019
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