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Sc3+ substituted M-type ferrites are effective microwave magnetic materials with a ferromagnetic resonance frequency in the range of 20 GHz–50 GHz. We report on the fabrication of oriented ferrite thick films as microwave components for application in the Ka-band at 30 GHz. Films of BaFe11.5.Sc0.5O19 were prepared by screen-printing on alumina substrates, drying in an external magnetic field, and sintering at 900 °C. Low-temperature sintering is achieved through use of a mixed BBSZ/CuO sintering aid. A strong anisotropy of the sintered ferrite films is revealed by XRD analysis. Microwave properties of the films were determined in a coplanar waveguide setup. The ferromagnetic resonance frequency of the films is at 30 GHz and the textured films possess good nonreciprocal properties which scale with film thickness. The films were tested in a Y-junction circulator, and represent promising materials for self-biased microwave components fabricated in thick film technology.

Partial substitution of Fe 3+ by Sc 3+ or In 3+ in M-type ferrite is an effective method to tailor their anisotropy field and resonance frequency. BaMe x Fe 12- x O 19 with Me = Sc and In (0 ≤ x ≤ 2) was synthesized by the mixed-oxide route. XRD revealed a continuous increase of the hexagonal lattice parameters with substitution rate x. Both, the saturation magnetization and coercivity at room temperature are reduced with x. The ferromagnetic resonance frequency decreases from 48 GHz at x = 0 to 30 GHz at x = 0.5 for Sc-substituted ferrites. For In-substitution, a smaller reduction of the resonance frequency with x is observed, e.g. to 37 GHz at x = 0.5. Addition of BBSZ glass allows sintering at 900 °C. Low-temperature fired samples exhibit ferromagnetic resonance at the same frequencies and represent promising materials for self-biased microwave components for integration into LTCC multilayer modules.

The sintering behavior, microstructure and permeability of Co/Ti-substituted M-type hexagonal ferrites BaCoxTixFe12−2xO19 (1.0≤x≤1.4) was studied for applications as multilayer inductors in the high-frequency range up to 2 GHz. Single-phase M-type ferrites were obtained after calcination at 1000 °C. The saturation magnetization and coercivity decrease with x and hysteresis measurements illustrate a gradual transition of the anisotropy from uniaxial to planar. Addition of 5 wt% of a BBSZ glass allows densification at 900 °C through liquid-phase sintering. The permeability of samples sintered at 900 °C increases with the Co/Ti substitution and reaches its maximum of µ′=16 at 1 MHz at x=1.3 with a resonance frequency fr≥1 GHz. Monolithic ferrite multilayer inductors were fabricated with printed Ag coil patterns by co-firing at 900 °C. It is shown that Co/Ti-substituted hexagonal M-type ferrite is an excellent material for the high-frequency multilayer inductors.

We have studied the integration of Ni-Cu-Zn ferrite spinels as well as substituted hexagonal Co2Y-and M-type ferrites into LTCC (Low Temperature Ceramic Co-firing) modules. The cofiring behavior and the magnetic properties of these materials were investigated and evaluated for multilayer applications. Ni-Cu-Zn ferrites exhibit permeabilities of m=300-500 for operating frequencies in the MHz range. Cu-substituted Y-type ferrites Ba2Co2-x-yZnxCuyFe12O22 in combination with sintering additives display sufficient shrinkage and densification at 900°C. A permeability of m=10 is observed; however, substituted Co2Y-type ferrites do not exhibit long-term stability at 900°C. Co/Ti-substituted M-type ferrites BaFe12-2yCoyTiyO19 (y=1.2) with planar magneto-crystalline anisotropy exhibit excellent soft magnetic behavior. Using sintering additives, complete densification is reached at 900°C and a permeability of m=15 and a resonance frequency of larger than 1 GHz are observed. Integration of ferrite multilayer inductor components into LTCC modules using free and constrained cofiring technologies is demonstrated.

Co/Ti-substituted M-type BaFe12-2xCoxTixO19 ferrites were investigated for multilayer inductor applications. Single-phase ferrite powders were prepared at 1000°C through the mixed oxide route. After sintering at 1300°C a maximum permeability of μ' = 37 is observed for x = 1.2. The addition of a glass sintering aid shifts the temperature of maximum shrinkage down to below 900°C and dense samples were obtained after firing at 900°C. For ferrites with x = 1.2 a permeability of μ' = 13 and a resonance frequency of 1 GHz is observed. Contrary to substituted Zand Y-type hexagonal ferrites, the Co/Ti-substituted M-type ferrites are stable during co-firing at 900°C and show no sign of thermal decomposition, i.e., these materials are compatible with the low-temperature ceramic cofiring (LTCC) technology. It is shown that Co/Ti-M-type ferrites are excellent magnetic materials for multilayer inductors.

Hexagonal ferrites can be used as soft magnetic materials for multilayer inductors for high frequency applications up to 3 GHz. We report on the preparation, thermal stability and magnetic properties of Z-, Y- and M-type hexagonal ferrites. Co2Z-type ferrite Ba3Co2Fe24O41 and iron excess Ba3Co2−yFe24+yO41 (0 ≤ y ≤ 0.8) were prepared by the mixed oxide route. Single phase Z-type ferrites were obtained after sintering at 1300°C. The permeability of a sample with y = 0.6 sintered at 1300°C is μ = 30 with a resonance frequency of 1 GHz. The addition of Bi2O3 as sintering aid shifts the maximum shrinkage down to 950°C and dense samples were sintered at 950°C; however, their permeability is only μ = 3…5. It is shown that Co2Z ferrites are not stable under LTCC conditions. Cu-substituted Z-type ferrites Ba3Co2-xCuxFe24O41 exhibit enhanced sintering ability, but sintering at 950°C also results in low permeability. Y-type hexagonal ferrites Ba2Co2−x−yZnxCuyFe12O22 were prepared at 1100°C and a permeability of μ = 20 was found for x = 1.2 and y = 0.8. Samples with Bi2O3 addition were sintered at 950 and 900°C exhibiting a permeability of μ = 10. Similar values were measured for M-type ferrites BaFe12-2yCoyTiyO19 with y = 1.2 which were sintered at 900°C using additives. Co/Ti co-substitution is an essential prerequisite for tailoring the magneto-crystalline anisotropy. Co/Ti- substituted M-type materials are stable under LTCC conditions. Ferrite multilayer devices were fabricated by screen printing coils onto ferrite tapes, stacking and lamination. Firing was performed between 1300°C and 900°C, i.e. at HTCC and LTCC conditions, respectively. The inductance behavior of the devices was evaluated and modeled. It is shown that hexagonal ferrites are suitable materials for the high-frequency multilayer inductors; however, Y- and M-type ferrites are preferred for LTCC-type inductors cofired at 900°C with Ag metallization.

Monolithic hexagonal BaCo1,3Ti1,3Fe9,4O19 ferrite multilayers sintered at 900 °C exhibit a fine-grained microstructure with permeability of m' = 16 and a resonance frequency fr > 1 GHz. Co-firing of hetero-laminates of ferrite with CT700 glass-ceramic LTCC tapes and with polycrystalline zinc titanate (ZT) LTCC tapes was studied. Co-firing at 900 °C of ferrite/CT700 leads to multilayers with cracks caused by substantial thermal expansion mismatch. Co-fired ferrite/ZT multilayer laminates exhibit a permeability of m' = 16 and do not show any defects. Hexagonal ferrite multilayer inductor elements were integrated into ZT-based multilayer LTCC modules and co-fired at 900 °C with Ag metallization.

Sinter-active soft ferrites with adequate permeability profiles are required for the fabrication of multilayer ferrite inductors (MLFI). For MLFI fabrication, a Low Temperature Ceramic Co-firing (LTCC) process is used. Substituted hexagonal ferrites of Y-, and M-type represent an important family of soft ferrites which might operate at high-frequency conditions up to 2 GHz. However, for Ag-based multilayer inductor applications a sinter process at 900°C is required. Low-temperature sinter-ability is provided by the use of sub-micron powders and/or sintering additives. Substituted Y-type hexagonal ferrites Ba2Co2-x-yZnxCuyFe12O22 were obtained after sintering at 1000°C. Substitution of Cu for Co improved the low-temperature sintering behavior. The addition of 5wt.% Bi2O3 guarantees almost complete densification at 900°C. The saturation magnetization and permeability are significantly affected by the Zn-concentration. A maximum permeability of μ′ = 10 and cut-off frequency fg~2GHz was observed for a ferrite with y = 0.4. Co/Ti-substituted M-type BaFe12-2yCoyTiyO19 ferrites can also be used for multilayer inductors. The magneto-crystalline anisotropy changes from uniaxial to planar upon Co/Ti-substitution, and ferrites with y≥1.1 exhibit soft magnetic behavior. Ferrite powders were prepared at 1000°C. The addition of a sintering aid shifts the temperature of maximum shrinkage down to below 900°C and dense samples were obtained after firing at 900°C. A permeability of μ′ = 16 and a resonance frequency of 1 GHz was observed. Substituted M-type ferrites are stable during co-firing at 900°C and show no sign of decomposition, i.e. these materials are LTCC-compatible. Ferrite tapes were prepared by tape casting and multilayer structures were fabricated by screen printing, stacking, lamination and final co-firing. Firing was performed at LTCC conditions i.e. 900°C. We report on the co-firing behavior, microstructure and permeability of monolithic laminates. It is shown, that hexagonal Co2/Zn2Y- and Co/Ti-M-type ferrites are excellent magnetic materials for multilayer inductors.