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Herein, we report the use of nanostructured crystalline Si as a thermoelectric material and its integration into thermoelectric harvesters. The proof-of-concept relies on the partial suppression of lattice thermal transport by introducing pores with dimensions scaling between the electron mean free path and the phonon mean free path. In other words, we artificially aimed at the electron crystal phonon glass tradeoff targeted for thermoelectric efficiency. The devices were fabricated using CMOS compatible processes and exhibited power generation from a few microWatts per cm^2 to a few milliWatts per cm^2 under temperature differences from a few K to 200 K across the thermopiles. These numbers demonstrate the capability to power autonomous devices with environmental or body heat using silicon chips with areas below cm^2. This paper also reports the possibility of using the developed demonstrators for integrated thermoelectric cooling., Comment: 11 pages, 9 figures, submitted to IOP Nanotechnology

Recent researches in thermal energy harvesting have revealed the remarkable efficiency of thermionic energy converters comprising very low work function electrodes. From room temperature and above, this kind of converter could supply low power devices such as autonomous sensor networks. In this type of thermoelectric converters, current injection is mainly governed by a mechanism of thermionic emission at the hot electrode which explains the interest for low work function coating materials. In particular, alkali metal oxides have been identified as excellent candidates for coating converter electrodes. This paper is devoted to the synthesis and characterization of potassium peroxide K2O2 onto silicon surfaces. To determine optimal synthesis conditions of K2O2, we present diagrams showing the different oxides as a function of temperature and oxygen pressure from which phase stability characteristics can be determined. From the experimental standpoint, we present results on the synthesis of potassium oxide under ultra high vacuum and controlled temperature. The resulting surface is characterized in situ by means of photoemission spectroscopy (PES) and contact potential difference (CPD) measurements. A work function of 1.35 eV is measured which and the expected efficiency of the corresponding converter is discussed. It is generally assumed that the decrease of the work function in the alkali/oxygen/ silicon system, is attributed to the creation of a surface dipole resulting from a charge transfer between the alkali metal and oxygen., Comment: 4 pages

Lack of materials which are thermoelectrically efficient and economically attractive is a challenge in thermoelectricity. Silicon could be a good thermoelectric material offering CMOS compatibility, harmlessness and cost reduction but it features a too high thermal conductivity. High harvested power density of 7W/cm2 at deltaT=30K is modeled based on a thin-film lateral architecture of thermo-converter that takes advantage of confinement effects to reduce the thermal conductivity. The simulation leads to the conclusion that 10nm thick Silicon has 10 times higher efficiency than bulk.

This paper introduces a thermal energy harvester turning thermal gradients into electricity by coupling a bimetallic strip to an electret-based converter: the bimetallic strip behaves as a thermal-to-mechanical power converter turning thermal gradients into mechanical oscillations that are finally converted into electricity with the electret. Output powers of 5.4uW were reached on a hot source at 70{\deg}C, and, contrary to the previous proofs of concept, the new devices presented in this paper do not require forced convection to work, making them compatible with standard conditions of thermal energy harvesting and environments such as hot pipes, pumps and more generally industrial equipment. Finally, ten energy harvesters have been parallelized and combined to a self-starting power management circuit made of a flyback converter to supply a battery-free Wireless Temperature Sensor Node, sending information every 100 seconds after its startup state.

This paper introduces a new semi-flexible device able to turn thermal gradients into electricity by using a curved bimetal coupled to an electret-based converter. In fact, a two-steps conversion is carried out: (i) a curved bimetal turns the thermal gradient into a mechanical oscillation that is then (ii) converted into electricity thanks to an electrostatic converter using electrets in Teflon (r). The semi-flexible and low cost design of these new energy converters pave the way to mass production over large areas of thermal energy harvesters. Raw output powers up to 13.46uW per device were reached on a hot source at 60{\deg}C and forced convection. Then, a DC-to-DC flyback converter has been sized to turn the energy harvesters' raw output powers into a viable supply source for an electronic circuit (DC-3V). At the end, 10uW of directly usable output power were reached with 3 devices, which is compatible with Wireless Sensor Networks powering applications. Please cite as : S Boisseau et al 2013 Smart Mater. Struct. 22 025021 Available online at: http://iopscience.iop.org/0964-1726/22/2/025021/

This paper presents a new device able to turn thermal gradients into electricity by using a bimetal-based heat engine coupled to an electrostatic converter. A two-steps conversion is performed: (i) a curved bimetallic strip turns the thermal gradient into a mechanical movement (thermal-to-mechanical conversion) that is (ii) then converted into electricity thanks to an electret-based electrostatic converter (mechanical-to-electrical conversion). An output power up to 5.5uW on a hot source at 50{\deg}C has already been reached, validating this new concept.