14 results on '"Slotboom, Daan"'
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2. Understanding advanced DRAM edge placement error budget and opportunities for control
3. Experimental verification of on-product overlay improvement by intra-lot overlay control using metrology based grouping
4. Holistic feedforward control for the 5 nm node and beyond.
5. Holistic feedforward control for the 5 nm logic node and beyond
6. Virtual overlay metrology for fault detection supported with integrated metrology and machine learning
7. Solution for high-order distortion on extreme illumination condition using computational prediction method
8. Overlay and edge placement control strategies for the 7nm node using EUV and ArF lithography
9. Overlay improvements using a real time machine learning algorithm
10. Virtual overlay metrology for fault detection supported with integrated metrology and machine learning
11. Overlay improvements using a real time machine learning algorithm
12. Understanding advanced DRAM edge placement error budget and opportunities for control
13. Experimental verification of on-product overlay improvement by intra-lot overlay control using metrology based grouping
14. Solution for high-order distortion on extreme illumination condition using computational prediction method
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