1. Design and demonstration of flexible functional surfaces deposited by roll-to-roll AP-PECVD
- Author
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Tezsevin, Y., Starostin, Sergey A., Cottaar, E.J.E. (Ward), and Stan Ackermans Instituut, Centrum voor Technologisch Ontwerpen
- Abstract
Fluorine modified surfaces and interphases offer a unique combination of functionalities making them very attractive for a broad spectrum of industrial applications from flexible electronics to membranes, textile industry and even drug and medical packaging industry. These highly demanding characteristics include oleophobicity, (super)hydrophobicity, chemical inertness, antibacterial and tribological properties. This project investigates the feasibility to apply a novel technological platform, based on an atmospheric pressure glow-like plasma, for a cost effective, environment friendly in-line fluorination process. The main aim of this project is to create know-how on super-hydrophobic and oleophobic surfaces by means of roll-to-roll atmospheric pressure plasma enhanced chemical vapour deposition (AP-PECVD) for fat and dirt repelling purposes. Therefore, all possible mechanisms namely grafting, deposition and etching are studied by using Fujifilm’s roll-to-roll atmospheric plasma process. Promising surface characteristics were obtained by fluorination as the result of the project. Plasma grafting can be considered as especially high throughput and low cost method of rapid surface functionalization. High hydrophobicity (122 degrees) and oleophobicity (55 degrees) for grafting was demonstrated in very short plasma treatment times (0.09 seconds treatment time) which is faster than the reported values in literature. Moreover, the surface free energy of PET was decreased from 46 dynes/cm2 to 14 dynes/cm2 (low surface free energy, which is the indication of hydrophobic character of the surface) after fluorination. This value was even lowered down to 6 dynes/cm2 for the grafting process on roughened PET surfaces. These low values around 10-15 dynes/cm2 are considered highly hydrophobic in the literature and the obtained surface free energy values in this project are even lower than the mentioned literature values. During plasma polymerisation studies, remarkably high deposition rates (2600 nm/min and 1500 nm/min for high and low power plasma treatments respectively) were obtained by CxFy plasma treatment at atmospheric conditions and room temperature. The deposited layers have high hydrophobicity and oleophobicity with the values of 110 to 125 degrees for water contact angle and 65 to 70 degrees for oil or hexadecane contact angle. Hydrophobicity was even enhanced by adding CmHnSi compound to the fluorinated feed gas and water contact angle increased to 140 degrees. Resulting surface free energies were also found for CxFy deposition studies as 13 dynes/cm2 which is highly hydrophobic. In etching part, proof of principle studies were performed on SiO2 which is an important material widely used especially in microelectronic and photonics industries. It was found that the selective etch rate of fluorinated precursor on SiO2 was very high with the value of around 1270 nm/min for not optimized conditions. All the results obtained through the year project confirm the compatibility of Fujifilm’s atmospheric pressure in line roll-to-roll plasma system on the main three fluorination mechanisms. According to the obtained performance for hydrophobicity and oleophobicity, which are comparable with PTFE, known as teflon, Fujifilm’s plasma system can compete with conventional plasma systems operated at either vacuum or atmospheric conditions.
- Published
- 2017