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Your search keyword '"Svechnikov, Mikhail"' showing total 13 results
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13 results on '"Svechnikov, Mikhail"'

3. BornAgain, software for GISAS and reflectometry: Releases 1.17 to 20

Author

Nejati Ammar, Svechnikov Mikhail, and Wuttke Joachim

Subjects
Physics, QC1-999
Abstract

BornAgain is a free and open source cross-platform software for simulating and fitting grazing-incidence small-angle scattering, off-specular scattering, and reflectometry. An authorative description as per release 1.16 of 2019 has been published in J. Appl. Cryst. 53, 262–276 (2020). This report explains the incremental changes from releases 1.17 to 20.

Published
2023
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7. Matched characterization of super-multiperiod superlattices

Author

Goray, Leonid, primary, Pirogov, Evgeniy, additional, Sobolev, Maxim, additional, Ilkiv, Igor, additional, Dashkov, Alexander, additional, Nikitina, Ekaterina, additional, Ubyivovk, Evgenii, additional, Gerchikov, Leonid, additional, Ipatov, Andrei, additional, Vainer, Yuliy, additional, Svechnikov, Mikhail, additional, Yunin, Pavel, additional, Chkhalo, Nikolay, additional, and Bouravlev, Alexei, additional

Published
2020
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10. Beryllium-Based Multilayer Mirrors and Filters for the Extreme Ultraviolet Range

Author

Pariev Dmitriy, Svechnikov Mikhail, Nechay Andrey, Sokolov Andrey, Tsybin Nikolay, Pestov Alexey, Schäfers Franz, Polkovnikov Vladimir, Zuev Sergey, Lopatin Alexey, Chkhalo Nikolay, Salashchenko Nikolay, Sertsu Mewael, Institute for Physics of Microstructures of the RAS, and Russian Academy of Sciences [Moscow] (RAS)

Subjects
Materials science, Silicon, Extreme ultraviolet lithography, Biomedical Engineering, chemistry.chemical_element, Bioengineering, 02 engineering and technology, Optics, Multilayer Design, Transmittance, General Materials Science, Spectral resolution, Reflection coefficient, business.industry, General Chemistry, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Wavelength, chemistry, Multilayers, Extreme ultraviolet, X-ray Mirrors, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Space Optics, Beryllium, 0210 nano-technology, business
Abstract

International audience; This paper presents the first results of systematic studies of beryllium as a material for multilayer mirrors (MLM) and transmission filters (TF) for the EUV spectral range. The objective for the study is the need for the increase in reflectivity and spectral resolution of MLMs for studying the Sun's corona. We investigated Mo/Be (working wavelength is 13.2 nm), Be/Al and Be/Si/Al (17.1 and 30.4 nm) multilayers, as well as free-standing Be films. It was shown that the Be-containing MLMs have significant advantage in reflectivity while their spectral pass-band is similar to beryllium-free MLMs. Observation of the MLMs in the course of 20 months has not revealed any significant decrease in the reflection coefficient. Effect of the silicon interlayers on reflectance of Be/Al MLM is explained. Investigation of a free-standing beryllium filter of the 160 nm thickness showed that its mechanical strength is approximately at the same level as that of the aluminum filter with the same thickness. There is also high stability of the transmittance.

Published
2018

13. High-reflection Mo/Be/Si multilayers for EUV lithography

Author

Chkhalo, Nikolai I., primary, Gusev, Sergei A., additional, Nechay, Andrey N., additional, Pariev, Dmitry E., additional, Polkovnikov, Vladimir N., additional, Salashchenko, Nikolai N., additional, Schäfers, Franz, additional, Sertsu, Mewael G., additional, Sokolov, Andrey, additional, Svechnikov, Mikhail V., additional, and Tatarsky, Dmitry A., additional

Published
2017
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