1. Characteristic analysis of thin-film phototransistors
- Author
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Takahiro Fuchiya, Shota Haruki, Tokiyoshi Matsuda, Takayuki Kadonome, Mutsumi Kimura, and Takumi Tanaka
- Subjects
Materials science ,Energy distribution ,Silicon ,business.industry ,chemistry.chemical_element ,law.invention ,chemistry ,Thin-film transistor ,law ,Optoelectronics ,Degradation (geology) ,Crystallization ,Thin film ,business - Abstract
We have evaluated characteristic deviation and characteristic degradation of poly-Si thin-film phototransistors. We found that the characteristic deviation is not negligible, which seems due to energy distribution of excimer-laser crystallization, and must be compensated for some applications. We found that the characteristic degradation is negligible, which is convenient for abovementioned applications.
- Published
- 2015
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