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2. Low-resistance ultrashallow extension formed by optimized flash lamp annealing

Author

Ito, Takayuki, Suguro, Kyoichi, Tamura, Mizuki, Taniguchi, Toshiyuki, Ushiku, Yukihiro, Iinuma, Toshihiko, Itani, Takaharu, Yoshioka, Masaki, Owada, Tatsushu, Imaoka, Yasuhiro, Murayama, Hiromi, and Kusuda, Tatasufumi

Subjects
Semiconductor wafers -- Research, Semiconductor wafers -- Production processes, Semiconductor wafers -- Design and construction, Business, Computers, Electronics, Electronics and electrical industries
Abstract

Flash lamp annealing (FLA) technology is proposed as a new method of activating implanted impurities. By optimizing FLA and implantation conditions, junction depth (Xj) at the concentration of 1 x [10.sup.18] c[m.sup.-3] and the sheet resistance of 13 nm and 700 [ohm]/s. for As and 14 nm and 770 [ohm]/sq for B[F.sub.2] with junction leakage lower than 1 x [10.sup.-16] A//[micro][m.sup.2] at 1.5 V were successfully obtained without wafer slip and warpage problems. Index Terms--Activation, crack, flash !amp annealing (FLA), junction leakage, low resistance, MOSFETs, preamorphization, slip, stress, ultrashallow junction.

Published
2003

11. Direct Amide Synthesis from Equimolar Amounts of Carboxylic Acid and Amine Catalyzed by Mesoporous Silica SBA-15.

Author

Tamura, Mizuki, Murase, Daisuke, and Komura, Kenichi

Subjects
*AMIDE synthesis, *CARBOXYLIC acids, *CATALYSIS, *MESOPOROUS silica, *SUSTAINABLE chemistry
Abstract

Direct amide synthesis from equimolar amounts of carboxylic acid and amine using mesoporous silica as a versatile heterogeneous catalyst is reported. [ABSTRACT FROM AUTHOR]

Published
2015
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12. Mesoporous Silica Catalyzed the Direct Amidation of Palmitic Acid and Hexylamine and Unique Dependence of Reaction Rate on Pore Size with p6mmTopological Catalyst

Author

Tamura, Mizuki, Murase, Daisuke, and Komura, Kenichi

Abstract

Heterogeneous direct amidation reactions of palmitic acid and hexylamine were studied using structurally different representative mesoporous silica catalysts and the unique relationship between the reaction rate and pore size with p6mmtopology was elucidated.

Published
2016
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