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Parallel plate capacitors (PPC) significantly reduce the size of superconducting microwave resonators, reducing the pixel pitch for arrays of single photon energy-resolving kinetic inductance detectors (KIDs). The frequency noise of KIDs is typically limited by tunneling Two-Level Systems (TLS), which originate from lattice defects in the dielectric materials required for PPCs. How the frequency noise level depends on the PPC's dimensions has not been experimentally addressed. We measure the frequency noise of 56 resonators with a-SiC:H PPCs, which cover a factor 44 in PPC area and a factor 4 in dielectric thickness. To support the noise analysis, we measure the TLS-induced, power-dependent, intrinsic loss and temperature-dependent resonance frequency shift of the resonators. From the TLS models, we expect a geometry-independent microwave loss and resonance frequency shift, set by the TLS properties of the dielectric. However, we observe a thickness-dependent microwave loss and resonance frequency shift, explained by surface layers that limit the performance of PPC-based resonators. For a uniform dielectric, the frequency noise level should scale directly inversely with the PPC area and thickness. We observe that an increase in PPC size reduces the frequency noise, but the exact scaling is, in some cases, weaker than expected. Finally, we derive an engineering guideline for the design of KIDs based on PPC-based resonators., Comment: 13 pages, 11 figures

Achieving amplification with high gain and quantum-limited noise is a difficult problem to solve. Parametric amplification using a superconducting transmission line with high kinetic inductance is a promising technology not only to solve this problem but also adding several benefits. When compared with other technologies, they have the potential of improving power saturation, achieving larger fractional bandwidths and operating at higher frequencies. In this type of amplifiers, selecting the proper transmission line is a key element in their design. Given current fabrication limitations, traditional lines such as coplanar waveguides (CPW), are not ideal for this purpose since it is difficult to make them with the proper characteristic impedance for good matching and slow-enough phase velocity for making them more compact. Capacitively-loaded lines, also known as artificial lines, are a good solution to this problem. However, few design rules or models have been presented to guide their accurate design. This fact is even more crucial considering that they are usually fabricated in the form of Floquet lines that have to be designed carefully to suppress undesired harmonics appearing in the parametric process. In this article we present, firstly, a new modelling strategy, based on the use of electromagnetic-simulation software, and, secondly, a first-principles model that facilitate and speed the design of CPW artificial lines and of Floquet lines made out of them. Then, we present comparisons with experimental results that demonstrate their accuracy. Finally, the theoretical model allows to predict the high-frequency behaviour of the artificial lines showing that they are good candidates for implementing parametric amplifiers above 100 GHz., Comment: 7 pages, 11 figures, submitted to IEEE Transactions on Applied Superconductivity

Understanding telescope pointing (i.e., line of sight) is important for observing the cosmic microwave background (CMB) and astronomical objects. The Moon is a candidate astronomical source for pointing calibration. Although the visible size of the Moon ($\ang{;30}$) is larger than that of the planets, we can frequently observe the Moon once a month with a high signal-to-noise ratio. We developed a method for performing pointing calibration using observational data from the Moon. We considered the tilts of the telescope axes as well as the encoder and collimation offsets for pointing calibration. In addition, we evaluated the effects of the nonuniformity of the brightness temperature of the Moon, which is a dominant systematic error. As a result, we successfully achieved a pointing accuracy of $\ang{;3.3}$. This is one order of magnitude smaller than an angular resolution of $\ang{;36}$. This level of accuracy competes with past achievements in other ground-based CMB experiments using observational data from the planets., Comment: 18 pages, 17 figures, 3 tables

Future actively cooled space-borne observatories for the far-infrared, loosely defined as a 1--10 THz band, can potentially reach a sensitivity limited only by background radiation from the Universe. This will result in an increase in observing speed of many orders of magnitude. A spectroscopic instrument on such an observatory requires large arrays of detectors with a sensitivity expressed as a noise equivalent power NEP = 3 $\times 10^{-20}$ $W\surd{Hz}$. We present the design, fabrication, and characterisation of microwave kinetic inductance detectors (MKIDs) for this frequency range reaching the required sensitivity. The devices are based on thin-film NbTiN resonators which use lens-antenna coupling to a submicron-width aluminium transmission line at the shorted end of the resonator where the radiation is absorbed. We optimised the MKID geometry for a low NEP by using a small aluminium volume of $\approx$ 1$\mu m^3$ and fabricating the aluminium section on a very thin (100 nm) SiN membrane. Both methods of optimisation also reduce the effect of excess noise by increasing the responsivity of the device, which is further increased by reducing the parasitic geometrical inductance of the resonator. We measure the sensitivity of eight MKIDs with respect to the power absorbed in the detector using a thermal calibration source filtered in a narrow band around 1.55 THz. We obtain a NEP$_{exp}(P_{abs})\:=\:3.1\pm0.9\times10^{-20}\:W\surd{Hz}$ at a modulation frequency of 200 Hz averaged over all measured MKIDs. The NEP is limited by quasiparticle trapping. The measured sensitivity is sufficient for spectroscopic observations from future, actively cooled space-based observatories. Moreover, the presented device design and assembly can be adapted for frequencies up to $\approx$ 10 THz and can be readily implemented in kilopixel arrays., Comment: 12 pages, 7 figures (including appendices). This work is accepted for publication in Astronomy and Astrophysics and will be published there shortly

Typical materials for optical Kinetic Inductance Detetectors (KIDs) are metals with a natural absorption of 30-50% in the visible and near-infrared. To reach high absorption efficiencies (90-100%) the KID must be embedded in an optical stack. We show an optical stack design for a 60 nm TiN film. The optical stack is modeled as sections of transmission lines, where the parameters for each section are related to the optical properties of each layer. We derive the complex permittivity of the TiN film from a spectral ellipsometry measurement. The designed optical stack is optimised for broadband absorption and consists of, from top (illumination side) to bottom: 85 nm SiOx, 60 nm TiN, 23 nm of SiOx, and a 100 nm thick Al mirror. We show the modeled absorption and reflection of this stack, which has >80% absorption from 400 nm to 1550 nm and near-unity absorption for 500 nm to 800 nm. We measure transmission and reflection of this stack with a commercial spectrophotometer. The results are in good agreement with the model., Comment: 8 pages, 5 figures (color), Journal of Low Temperature Physics (2022)

Low-loss deposited dielectrics will benefit superconducting devices such as integrated superconducting spectrometers, superconducting qubits and kinetic inductance parametric amplifiers. Compared with planar structures, multi-layer structures such as microstrips are more compact and eliminate radiation loss at high frequencies. Multi-layer structures are most easily fabricated with deposited dielectrics, which typically exhibit higher dielectric loss than crystalline dielectrics. We measured the sub-kelvin and low-power microwave and mm-submm wave dielectric loss of hydrogenated amorphous silicon carbide (a-SiC:H), using a superconducting chip with NbTiN/a-SiC:H/NbTiN microstrip resonators. We deposited the a-SiC:H by plasma-enhanced chemical vapor deposition at a substrate temperature of 400{\deg}C. The a-SiC:H has a mm-submm loss tangent ranging from $0.80 \pm 0.01 \times 10^{-4}$ to $1.43 \pm 0.04 \times 10^{-4}$ in the range of 270 to 385 GHz. The microwave loss tangent is $3.2 \pm 0.2 \times 10^{-5}$. These are the lowest low-power sub-kelvin loss tangents that have been reported for microstrip resonators at mm-submm and microwave frequencies. We observe that the loss tangent increases with frequency. The a-SiC:H films are free of blisters and have low stress: $-$20 MPa compressive at 200 nm thickness to 60 MPa tensile at 1000 nm thickness.

We present a lab-on-chip experiment to accurately measure losses of superconducting microstrip lines at microwave and sub-mm wavelengths. The microstrips are fabricated from NbTiN, which is deposited using reactive magnetron sputtering, and amorphous silicon which is deposited using plasma-enhanced chemical vapor deposition (PECVD). Sub-mm wave losses are measured using on-chip Fabry-P{\'e}rot resonators (FPR) operating around $350\ $GHz. Microwave losses are measured using shunted half-wave resonators with an identical geometry and fabricated on the same chip. We measure a loss tangent of the amorphous silicon at single-photon energies of $\tan\delta =3.7\pm0.5\times10^{-5}$ at $6\ $GHz and $\tan\delta = 2.1\pm 0.1\times10^{-4}$ at $350\ $GHz. These results represent very low losses for deposited dielectrics, but the sub-mm wave losses are significantly higher than the microwave losses, which cannot be understood using the standard two-level system loss model., Comment: 8 pages, 3 figures

We present a novel lab-on-chip technique to measure the very low losses in superconducting transmission lines at (sub-) mm wavelengths. The chips consist of a 100 nm thick NbTiN Coplanar Waveguide (CPW) Fabry Perot (FP) resonator, coupled on one side to an antenna and on the other side to a Microwave Kinetic Inductance detector. Using a single frequency radiation source allows us to measure the frequency response of the FP around 350 GHz and deduce its losses. We show that the loss is dominated by radiation loss inside the CPW line that forms the FP and that it decreases with decreasing line width and increasing kinetic inductance as expected. The results can be quantitatively understood using SONNET simulations. The lowest loss is observed for a CPW with a total width of $6\ \mathrm{\mu m}$ and corresponds to a Q-factor of $\approx15,000$., Comment: 5 pages + appendix. Accepted for publication in APL. Author's accepted version

For space observatories, the glitches caused by high energy phonons created by the interaction of cosmic ray particles with the detector substrate lead to dead time during observation. Mitigating the impact of cosmic rays is therefore an important requirement for detectors to be used in future space missions. In order to investigate possible solutions, we carry out a systematic study by testing four large arrays of Microwave Kinetic Inductance Detectors (MKIDs), each consisting of $\sim$960 pixels and fabricated on monolithic 55 mm $\times$ 55 mm $\times$ 0.35 mm Si substrates. We compare the response to cosmic ray interactions in our laboratory for different detector arrays: A standard array with only the MKID array as reference; an array with a low $T_c$ superconducting film as phonon absorber on the opposite side of the substrate; and arrays with MKIDs on membranes. The idea is that the low $T_c$ layer down-converts the phonon energy to values below the pair breaking threshold of the MKIDs, and the membranes isolate the sensitive part of the MKIDs from phonons created in the substrate. We find that the dead time can be reduced up to a factor of 40 when compared to the reference array. Simulations show that the dead time can be reduced to below 1 % for the tested detector arrays when operated in a spacecraft in an L2 or a similar far-Earth orbit. The technique described here is also applicable and important for large superconducting qubit arrays for future quantum computers., Comment: 5 pages, 4 figures; accepted to APL

The quantum Rabi model describing the fundamental interaction between light and matter is a cornerstone of quantum physics. It predicts exotic phenomena like quantum phase transitions and ground-state entanglement in the ultrastrong-coupling (USC) regime, where coupling strengths are comparable to subsystem energies. Despite progress in many experimental platforms, the few experiments reaching USC have been limited to spectroscopy: demonstrating USC dynamics remains an outstanding challenge. Here, we employ a circuit QED chip with moderate coupling between a resonator and transmon qubit to realise accurate digital quantum simulation of USC dynamics. We advance the state of the art in solid-state digital quantum simulation by using up to 90 second-order Trotter steps and probing both subsystems in a combined Hilbert space dimension $\sim80$, demonstrating the Schr\"odinger-cat like entanglement and build-up of large photon numbers characteristic of deep USC. This work opens the door to exploring extreme USC regimes, quantum phase transitions and many-body effects in the Dicke model., Comment: 26 pages, 16 figures

Future astrophysics and cosmic microwave background space missions operating in the far-infrared to millimetre part of the spectrum will require very large arrays of ultra-sensitive detectors in combination with high multiplexing factors and efficient low-noise and low-power readout systems. We have developed a demonstrator system suitable for such applications. The system combines a 961 pixel imaging array based upon Microwave Kinetic Inductance Detectors (MKIDs) with a readout system capable of reading out all pixels simultaneously with only one readout cable pair and a single cryogenic amplifier. We evaluate, in a representative environment, the system performance in terms of sensitivity, dynamic range, optical efficiency, cosmic ray rejection, pixel-pixel crosstalk and overall yield at at an observation centre frequency of 850 GHz and 20% fractional bandwidth. The overall system has an excellent sensitivity, with an average detector sensitivity NEPdet=3x10^-19 W/rt(Hz) measured using a thermal calibration source. At a loading power per pixel of 50fW we demonstrate white, photon noise limited detector noise down to 300 mHz. The dynamic range would allow the detection of 1 Jy bright sources within the field of view without tuning the readout of the detectors. The expected dead time due to cosmic ray interactions, when operated in an L2 or a similar far-Earth orbit, is found to be <4%. Additionally, the achieved pixel yield is 83% and the crosstalk between the pixels is <-30dB. This demonstrates that MKID technology can provide multiplexing ratios on the order of a 1000 with state-of-the-art single pixel performance, and that the technology is now mature enough to be considered for future space based observatories and experiments., Comment: Resubmitted manuscript after review A&A (2016) 16 pages, 10 figures

Uniformity in thickness and electronic properties of superconducting niobium titanium nitride (NbTiN) thin films is a critical issue for upscaling superconducting electronics, such as microwave kinetic inductance detectors for submillimeter wave astronomy. In this article we make an experimental comparison between the uniformity of NbTiN thin films produced by two DC magnetron sputtering systems with vastly different target sizes: the Nordiko 2000 equipped with a circular 100mm diameter target, and the Evatec LLS801 with a rectangular target of 127 mm x 444.5 mm. In addition to the films deposited staticly in both systems, we have also deposited films in the LLS801 while shuttling the substrate in front of the target, with the aim of further enhancing the uniformity. Among these three setups, the LLS801 system with substrate shuttling has yielded the highest uniformity in film thickness (+/-2%), effective resistivity (decreasing by 5% from center to edge), and superconducting critical temperature (T_c = 15.0 K - 15.3 K) over a 100 mm diameter wafer. However, the shuttling appears to increase the resistivity by almost a factor of 2 compared to static deposition. Surface SEM inspections suggest that the shuttling could have induced a different mode of microstructural film growth., Comment: Accepted 2016 November 21 for publication in IEEE Transactions on Applied Superconductivity, Applied Superconductor Conference 2016, 5 pages, 3 figures

The superconducting critical temperature (Tc > 15K) of niobium titanium nitride (NbTiN) thin films allows for low-loss circuits up to 1.1 THz, enabling on-chip spectroscopy and multi-pixel imaging with advanced detectors. The drive for large scale detector microchips is demanding NbTiN films with uniform properties over an increasingly larger area. This article provides an experimental comparison between two reactive d.c. sputter systems with different target sizes: a small target (100mm diameter) and a large target (127 mm x 444.5 mm). This article focuses on maximizing the Tc of the films and the accompanying I-V characteristics of the sputter plasma, and we find that both systems are capable of depositing films with Tc > 15 K. The resulting film uniformity is presented in a second manuscript in this volume. We find that these films are deposited within the transition from metallic to compound sputtering, at the point where target nitridation most strongly depends on nitrogen flow. Key in the deposition optimization is to increase the system's pumping speed and gas flows to counteract the hysteretic effects induced by the target size. Using the I-V characteristics as a guide proves to be an effective way to optimize a reactive sputter system, for it can show whether the optimal deposition regime is hysteresis-free and accessible., Comment: Accepted 2016 November 12, for publication in IEEE Transactions on Applied Superconductivity, Applied Superconductor Conference 2016. 5 pages, 4 figures

Nuclear spin-lattice relaxation times are measured on copper using magnetic resonance force microscopy performed at temperatures down to 42 mK. The low temperature is verified by comparison with the Korringa relation. Measuring spin-lattice relaxation times locally at very low temperatures opens up the possibility to measure the magnetic properties of inhomogeneous electron systems realized in oxide interfaces, topological insulators and other strongly correlated electron systems such as high-Tc superconductors., Comment: We revised the manuscript by including the supplemental material. The manuscript is changed from a Letter to a Research Article after change of journal

We experimentally demonstrate the principle of an on-chip submillimeter wave filter bank spectrometer, using superconducting microresonators as narrow band-separation filters. The filters are made of NbTiN/SiNx/NbTiN microstrip line resonators, which have a resonance frequency in the range of 614-685 GHz---two orders of magnitude higher in frequency than what is currently studied for use in circuit quantum electrodynamics and photodetectors. The frequency resolution of the filters decreases from 350 to 140 with increasing frequency, most likely limited by dissipation of the resonators., Comment: 4 pages, 3 figures, submitted to Applied Physics Letters

We study spin relaxation and diffusion in an electron-spin ensemble of nitrogen impurities in diamond at low temperature (0.25-1.2 K) and polarizing magnetic field (80-300 mT). Measurements exploit mode- and temperature-dependent coupling of hyperfine-split sub-ensembles to the resonator. Temperature-independent spin linewidth and relaxation time suggest that spin diffusion limits spin relaxation. Depolarization of one sub-ensemble by resonant pumping of another indicates fast cross-relaxation compared to spin diffusion, with implications on use of sub-ensembles as independent quantum memories., Comment: 5 pages, 5 figures, and Supplementary Information (2 figures)