1. Property of Cu and PbSrZrTiO3 multilayer actuator fabricated by cofiring with wet reduction.
- Author
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Jeong, Soon-Jong, Koo, Bo-Kun, Lim, Dong-Hwan, Kim, Min-Soo, Kim, In-Sung, Han, Pil-Wan, and Cho, Young-Rae
- Subjects
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PRECIOUS metals , *COPPER , *PIEZOELECTRIC devices , *POLYVINYLIDENE fluoride , *ULTRASONIC equipment - Abstract
Traditional co-firing processes involving noble metals are costly, thereby prompting a shift to base metals, such as Cu, to reduce manufacturing expenses. This study explored the use of Cu as an internal electrode for fabricating piezoelectric multilayer devices using a Pb 0.98 Sr 0.02 (Zr 0.48 Ti 0.52)O 3 (PSZT) ceramic material. The compatibility of Cu with PSZT in ambient air and the subsequent wet-reduction was investigated. The addition of polyvinylidene fluoride (PVDF) to the Cu electrode expedited the reduction process; however, this prompted void formation. Thus, epoxy resin was injected to post-reduction to enhance its mechanical property and address this issue. The impact of the PVDF content on the reduction rates, microstructure, and electrical/mechanical properties was analyzed. The experimental results highlighted the successful fabrication of Cu/PSZT devices with performances comparable to those of traditional noble metal (AgPd) counterparts. The polarization and strain of the Cu/PSZT device with 10% PVDF were comparable to those of the AgPd/PSZT. Subsequently, the incorporation of epoxy resin and Cu electroplating greatly improved the mechanical strength of Cu/PSZT to values comparable to that of AgPd/PSZT, as confirmed by the successful fabrication of a piezoelectric ultrasonic device and vibration measurement at 60 kHz. Therefore, this proposed process is a viable alternative for fabricating low-cost and stable multilayer ceramic devices. [ABSTRACT FROM AUTHOR]
- Published
- 2024
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