1. MgO by Injection CVD
- Author
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V. Kubilius, Jean-Pierre Senateur, V. Galindo, François Weiss, A. Teiserskis, A. Jukna, V Bigelyt, R Butkut, Bonifacas Vengalis, and Adulfas Abrutis
- Subjects
Superconductivity ,Morphology (linguistics) ,Chemistry ,Metals and Alloys ,Analytical chemistry ,Mineralogy ,Surfaces and Interfaces ,Epitaxy ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,Electrical resistivity and conductivity ,Monolayer ,Materials Chemistry ,Metalorganic vapour phase epitaxy ,Texture (crystalline) ,Chemical composition - Abstract
Epitaxial YBa 2 Cu 3 O 7 layers with 45° in-plane orientation have been grown by Injection CVD on MgO substrates polished off-axis to within 1.4–1.9° of the [100] direction. This new single-source CVD process is based on computer-controlled injection of precise microdoses of a metal–organic precursor solution into a CVD reactor. A wide range of solution compositions was tested to investigate compositional effects on phase purity, surface morphology, texturing and superconducting properties of the prepared films. The highest quality films with pure 45° texture had a smooth surface, zero resistance T c ( R =0) of 88–89 K, and critical current density J c (77 K) above 10 6 A/cm 2 .
- Published
- 1997
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