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Compact photonic systems that offer high frequency stability and low noise are of increasing importance to applications in precision metrology, quantum computing, communication, and advanced sensing technologies. However, on-chip resonators comprised of dielectrics cannot match the frequency stability and noise characteristics of Fabry-Perot cavities, whose electromagnetic modes live almost entirely in vacuum. In this study, we present a novel strategy to interface micro-fabricated Fabry-Perot cavities with photonic integrated circuits to realize compact, high-performance integrated systems. Using this new integration approach, we demonstrate self-injection locking of an on-chip laser to a milimeter-scale vacuum-gap Fabry-Perot using a circuit interface that transforms the reflected cavity response to enable efficient feedback to the laser. This system achieves a phase noise of -97 dBc/Hz at 10 kHz offset frequency, a fractional frequency stability of 5*10-13 at 10 ms, a 150 Hz 1/pi integral linewidth, and a 35 mHz fundamental linewidth. We also present a complementary integration strategy that utilizes a vertical emission grating coupler and a back-reflection cancellation circuit to realize a fully co-integrated module that effectively redirects the reflected signals and isolates back-reflections with a 10 dB suppression ratio, readily adaptable for on-chip PDH locking. Together, these demonstrations significantly enhance the precision and functionality of RF photonic systems, paving the way for continued advancements in photonic applications.

By self-injection-locking a 1560 nm distributed feedback semiconductor laser to a high-$Q$ silicon nitride resonator, a high-coherence 780 nm second harmonic signal is generated via the photogalvanic-induced second-order nonlinearity. A record-low frequency noise floor of 4 Hz$^2$/Hz is achieved for the 780 nm emission. The approach can be generalized for signal generation over a wide range of visible and near-visible bands.

Thermal silica is a common dielectric used in all silicon-photonic circuits. And bound hydroxyl ions (Si-OH) can provide a significant component of optical loss in this material on account of the wet nature of the thermal oxidation process. A convenient way to quantify this loss relative to other mechanisms is through OH-absorption at 1380 nm. Here, using ultra-high-Q thermal-silica wedge microresonators, the OH absorption loss peak is measured and distinguished from the scattering loss base line over a wavelength range from 680 nm to 1550 nm. Record-high on-chip resonator Q factors are observed for near-visible and visible wavelengths, and the absorption limited Q factor is as high as 8 billion in the telecom band. OH ion content level around 2.4 ppm (weight) is inferred from both Q measurements and by Secondary Ion Mass Spectroscopy (SIMS) depth profiling., Comment: 4 pages, 3 figures

While photonic integrated circuits (PICs) are being widely used in applications such as telecommunications and datacenter interconnects, PICs capable of replacing bulk optics and fibers in high-precision, highly-coherent applications will require ultra-low-noise laser sources to be integrated with other photonic components in a compact and robustly aligned format -- that is, on a single chip. Such PICs could offer superior scalability for complex functionalities and volume production, as well as improved stability and reliability over time. However, there are two major issues preventing the realization of such envisioned PICs: the high phase noise of semiconductor lasers, and the difficulty of integrating optical isolators directly on chip. PICs are still considered as inferior solutions in optical systems such as microwave synthesizers, optical gyroscopes and atomic clocks, despite their advantages in size, weight, power consumption and cost (SWaPC). Here, we challenge this convention by introducing three-dimensional (3D) integration in silicon photonics that results in ultra-low-noise, isolator-free PICs. Through multiple monolithic and heterogeneous processing sequences, direct on-chip integration of III-V gain and ultra-low-loss (ULL) silicon nitride (SiN) waveguides with optical loss around 0.5 dB/m are demonstrated. Consequently, the demonstrated PIC enters a new regime, such that an integrated ultra-high-Q cavity reduces the laser noise close to that of fiber lasers. Moreover, the cavity acts as an effective block for any downstream on-chip or off-chip reflection-induced destabilization, thus eliminating the need for optical isolators. We further showcase isolator-free, widely-tunable, low-noise, heterodyne microwave generation using two ultra-low-noise lasers on the same silicon chip.

Chip-integrated optical frequency combs are attractive optical sources in comb applications requiring high-repetition-rate, low power consumption, or compact size. Spontaneous soliton formation via Kerr parametric oscillation is a promising generation principle in these frequency combs, and has been demonstrated in several material platforms over the past decade. Of these materials, AlGaAs has one of the largest Kerr nonlinearity coefficients allowing low pump threshold comb generation. However, bright soliton generation using this material has only been possible at cryogenic temperature because of the large thermo-optic effect at room temperature, which hinders stable access to the soliton regime. Here, we report self-stabilized single soliton generation in AlGaAs microresonators at room temperature by utilizing a rising soliton step in large free-spectral-range resonators. With sub-milliWatt optical pump power, 1 THz repetition-rate soliton generation is demonstrated. Perfect soliton crystal formation and soliton breather states are also observed. Besides the advantages of large optical nonlinearity, the devices are natural candidates for integration with III-V pump lasers., Comment: 7 pages, 3 figure

High coherence visible and near-visible laser sources are centrally important to the operation of advanced position/navigation/timing systems as well as classical/quantum sensing systems. However, the complexity and size of these bench-top lasers is an impediment to their transitioning beyond the laboratory. Here, a system-on-a-chip that emits high-coherence visible and near-visible lightwaves is demonstrated. The devices rely upon a new approach wherein wavelength conversion and coherence increase by self-injection-locking are combined within in a single nonlinear resonator. This simplified approach is demonstrated in a hybridly-integrated device and provides a short-term linewidth around 10-30 kHz. On-chip, converted optical power over 2 mW is also obtained. Moreover, measurements show that heterogeneous integration can result in conversion efficiency higher than 25% with output power over 11 mW. Because the approach uses mature III-V pump lasers in combination with thin-film lithium niobate, it can be scaled for low-cost manufacturing of high-coherence visible emitters. Also, the coherence generation process can be transferred to other frequency conversion processes including optical parametric oscillation, sum/difference frequency generation, and third-harmonic generation.

Stimulated Brillouin scattering provides optical gain for efficient and narrow-linewidth lasers in high-Q microresonator systems. However, the thermal dependence of the Brillouin process, as well as the microresonator, impose strict temperature control requirements for long-term frequency-stable operation. Here, we study Brillouin back action and use it to both measure and phase-sensitively lock modal temperature to a reference temperature defined by the Brillouin phase-matching condition. At a specific lasing wavelength, the reference temperature can be precisely set by adjusting resonator free spectral range. This backaction control method is demonstrated in a chip-based Brillouin laser, but can be applied in all Brillouin laser platforms. It offers a new approach for frequency-stable operation of Brillouin lasers in atomic clock, frequency metrology, and gyroscope applications.

The development of integrated semiconductor lasers has miniaturized traditional bulky laser systems, enabling a wide range of photonic applications. A progression from pure III-V based lasers to III-V/external cavity structures has harnessed low-loss waveguides in different material systems, leading to significant improvements in laser coherence and stability. Despite these successes, however, key functions remain absent. In this work, we address a critical missing function by integrating the Pockels effect into a semiconductor laser. Using a hybrid integrated III-V/Lithium Niobate structure, we demonstrate several essential capabilities that have not existed in previous integrated lasers. These include a record-high frequency modulation speed of 2 exahertz/s (2.0$\times$10$^{18}$ Hz/s) and fast switching at 50 MHz, both of which are made possible by integration of the electro-optic effect. Moreover, the device co-lases at infrared and visible frequencies via the second-harmonic frequency conversion process, the first such integrated multi-color laser. Combined with its narrow linewidth and wide tunability, this new type of integrated laser holds promise for many applications including LiDAR, microwave photonics, atomic physics, and AR/VR.

Lasers with hertz-level linewidths on timescales up to seconds are critical for precision metrology, timekeeping, and manipulation of quantum systems. Such frequency stability typically relies on bulk-optic lasers and reference cavities, where increased size is leveraged to improve noise performance, but with the trade-off of cost, hand assembly, and limited application environments. On the other hand, planar waveguide lasers and cavities exploit the benefits of CMOS scalability but are fundamentally limited from achieving hertz-level linewidths at longer times by stochastic noise and thermal sensitivity inherent to the waveguide medium. These physical limits have inhibited the development of compact laser systems with frequency noise required for portable optical clocks that have performance well beyond conventional microwave counterparts. In this work, we break this paradigm to demonstrate a compact, high-coherence laser system at 1548 nm with a 1 s integrated linewidth of 1.1 Hz and fractional frequency instability less than 10$^{-14}$ from 1 ms to 1 s. The frequency noise at 1 Hz offset is suppressed by 11 orders of magnitude from that of the free-running diode laser down to the cavity thermal noise limit near 1 Hz$^2$/Hz, decreasing to 10$^{-3}$ Hz$^2$/Hz at 4 kHz offset. This low noise performance leverages wafer-scale integrated lasers together with an 8 mL vacuum-gap cavity that employs micro-fabricated mirrors with sub-angstrom roughness to yield an optical $Q$ of 11.8 billion. Significantly, all the critical components are lithographically defined on planar substrates and hold the potential for parallel high-volume manufacturing. Consequently, this work provides an important advance towards compact lasers with hertz-level linewidths for applications such as portable optical clocks, low-noise RF photonic oscillators, and related communication and navigation systems.

Optical microresonators with high quality ($Q$) factors are essential to a wide range of integrated photonic devices. Steady efforts have been directed towards increasing microresonator $Q$ factors across a variety of platforms. With success in reducing microfabrication process-related optical loss as a limitation of $Q$, the ultimate attainable $Q$, as determined solely by the constituent microresonator material absorption, has come into focus. Here, we report measurements of the material-limited $Q$ factors in several photonic material platforms. High-$Q$ microresonators are fabricated from thin films of SiO$_2$, Si$_3$N$_4$, Al$_{0.2}$Ga$_{0.8}$As and Ta$_2$O$_5$. By using cavity-enhanced photothermal spectroscopy, the material-limited $Q$ is determined. The method simultaneously measures the Kerr nonlinearity in each material and reveals how material nonlinearity and ultimate $Q$ vary in a complementary fashion across photonic materials. Besides guiding microresonator design and material development in four material platforms, the results help establish performance limits in future photonic integrated systems., Comment: Maodong Gao, Qi-Fan Yang and Qing-Xin Ji contributed equally to this work. 9 pages, 4 figures, 1 table

Silicon nitride (SiN) waveguides with ultra-low optical loss enable integrated photonic applications including low noise, narrow linewidth lasers, chip-scale nonlinear photonics, and microwave photonics. Lasers are key components to SiN photonic integrated circuits (PICs), but are difficult to fully integrate with low-index SiN waveguides due to their large mismatch with the high-index III-V gain materials. The recent demonstration of multilayer heterogeneous integration provides a practical solution and enabled the first-generation of lasers fully integrated with SiN waveguides. However a laser with high device yield and high output power at telecommunication wavelengths, where photonics applications are clustered, is still missing, hindered by large mode transition loss, nonoptimized cavity design, and a complicated fabrication process. Here, we report high-performance lasers on SiN with tens of milliwatts output through the SiN waveguide and sub-kHz fundamental linewidth, addressing all of the aforementioned issues. We also show Hertz-level linewidth lasers are achievable with the developed integration techniques. These lasers, together with high-$Q$ SiN resonators, mark a milestone towards a fully-integrated low-noise silicon nitride photonics platform. This laser should find potential applications in LIDAR, microwave photonics and coherent optical communications., Comment: 8 pages, 3 figures

Driven by narrow-linewidth bench-top lasers, coherent optical systems spanning optical communications, metrology and sensing provide unrivalled performance. To transfer these capabilities from the laboratory to the real world, a key missing ingredient is a mass-produced integrated laser with superior coherence. Here, we bridge conventional semiconductor lasers and coherent optical systems using CMOS-foundry-fabricated microresonators with record high $Q$ factor over 260 million and finesse over 42,000. Five orders-of-magnitude noise reduction in the pump laser is demonstrated, and for the first time, fundamental noise below 1 Hz$^2$ Hz$^{-1}$ is achieved in an electrically-pumped integrated laser. Moreover, the same configuration is shown to relieve dispersion requirements for microcomb generation that have handicapped certain nonlinear platforms. The simultaneous realization of record-high $Q$ factor, highly coherent lasers and frequency combs using foundry-based technologies paves the way for volume manufacturing of a wide range of coherent optical systems., Comment: 19 pages, 11 figures

Coherently-pumped (Kerr) solitons in an ideal optical microcavity are expected to undergo random quantum motion that determines fundamental performance limits in applications of soliton microcombs. Here, this diffusive motion and its impact on Kerr soliton timing jitter is studied experimentally. Typically hidden below technical noise contributions, the quantum limit is discerned by measuring counter-propagating solitons. Their relative motion features only weak interactions and also presents excellent common mode suppression of technical noise. This is in strong contrast to co-propagating solitons which are found to have relative timing jitter well below the quantum limit of a single soliton on account of strong mutual motion correlation. Good agreement is found between theory and experiment. The results establish the fundamental limits to timing jitter in soliton microcombs and provide new insights on multi-soliton physics

Both the group velocity and phase velocity of two solitons can be synchronized by a Kerr-effect mediated interaction, causing what is known as soliton trapping. Trapping can occur when solitons travel through single-pass optical fibers or when circulating in optical resonators. Here, we demonstrate and theoretically explain a new manifestation of soliton trapping that occurs between counter-propagating solitons in microresonators. When counter-pumping a microresonator using slightly detuned pump frequencies and in the presence of backscattering, the group velocities of clockwise and counter-clockwise solitons undergo periodic modulation instead of being locked to a constant velocity. Upon emission from the microcavity, the solitons feature a relative oscillatory motion having an amplitude that can be larger than the soliton pulse width. This relative motion introduces a sideband fine structure into the optical spectrum of the counter-propagating solitons. Our results highlight the significance of coherent pumping in determining soliton dynamics within microresonators and add a new dimension to the physics of soliton trapping.

Optical communication systems have come through five orders of magnitude improvement in data rate over the last three decades. The increased demand in data traffic and the limited optoelectronic component bandwidths have led to state-of-the-art systems employing hundreds of separate lasers in each transmitter. Given the limited optical amplifier bandwidths, focus is now shifting to maximize the spectral efficiency, SE. However, the frequency jitter from neighbouring lasers results in uncertainties of the exact channel wavelength, requiring large guardbands to avoid catastrophic channel overlap. Optical frequency combs with optimal line spacings (typically around 10-50 GHz) can overcome these limitations and maximize the SE. Recent developments in microresonator-based soliton frequency combs (hereafter microcombs) promise a compact, power efficient multi-wavelength and phase-locked light source for optical communications. Here we demonstrate a microcomb-based communication link achieving state-of-the-art spectral efficiency that has previously only been possible with bulk-optics systems. Compared to previous microcomb works in optical communications, our microcomb features a narrow line spacing of 22.1 GHz. In addition, it provides a four order-of-magnitude more stable line spacing compared to free-running lasers. The optical signal-to-noise ratio (OSNR) is sufficient for information encoding using state-of-the-art high-order modulation formats. This enables us to demonstrate transmission of a 12 Tb/s superchannel over distances ranging from a single 82 km span with an SE exceeding 10 bits/s/Hz, to 2000 km with an SE higher than 6 bits/s/Hz. These results demonstrate that microcombs can attain the SE that will spearhead future optical networks.

We demonstrate protected single-soliton formation and operation in a Kerr microresonator using a phase-modulated pump laser. Phase modulation gives rise to spatially varying effective loss and detuning parameters, which in turn lead to an operation regime in which multi-soliton degeneracy is lifted and a single soliton is the only observable behavior. Direct excitation of single solitons is indicated by observed reversal of the characteristic 'soliton step.' Phase modulation also enables precise control of the soliton pulse train's properties, and measured dynamics agree closely with simulations. We show that the technique can be extended to high repetition-frequency Kerr solitons through subharmonic phase modulation. These results facilitate straightforward generation and control of Kerr-soliton microcombs for integrated photonics systems.

An external-cavity diode laser is reported with ultralow noise, high power coupled to a fiber, and fast tunability. These characteristics enable the generation of an optical frequency comb in a silica micro-resonator with a single-soliton state. Neither an optical modulator nor an amplifier was used in the experiment. This demonstration greatly simplifies the soliton generation setup and represents a significant step forward to a fully integrated soliton comb system., Comment: 7 pages, 5 figures

The counting and control of optical cycles of light has become common with modelocked laser frequency combs. But even with advances in laser technology, modelocked laser combs remain bulk-component devices that are hand-assembled. In contrast, a frequency comb based on the Kerr-nonlinearity in a dielectric microresonator will enable frequency comb functionality in a micro-fabricated and chip-integrated package suitable for use in a wide-range of environments. Such an advance will significantly impact fields ranging from spectroscopy and trace gas sensing, to astronomy, communications, atomic time keeping and photonic data processing. Yet in spite of the remarkable progress shown over the past years, microresonator frequency combs ("microcombs") have still been without the key function of direct f-2f self-referencing and phase-coherent frequency control that will be critical for enabling their full potential. Here we realize these missing elements using a low-noise 16.4 GHz silicon chip microcomb that is coherently broadened from its initial 1550 nm wavelength and subsequently f-2f self-referenced and phase-stabilized to an atomic clock. With this advance, we not only realize the highest repetition rate octave-span frequency comb ever achieved, but we highlight the low-noise microcomb properties that support highest atomic clock limited frequency stability.

Control of dispersion in fibre optical waveguides is of critical importance to optical fibre communications systems and more recently for continuum generation from the ultraviolet to the mid-infrared. The wavelength at which the group velocity dispersion crosses zero can be set by varying fibre core diameter or index step. Moreover, sophisticated methods to manipulate higher-order dispersion so as shape and even flatten dispersion over wide bandwidths are possible using multi-cladding fibre. Here we introduce design and fabrication techniques that allow analogous dispersion control in chip-integrated optical microresonators, and thereby demonstrate higher-order, wide-bandwidth dispersion control over an octave of spectrum. Importantly, the fabrication method we employ for dispersion control simultaneously permits optical Q factors above 100 million, which is critical for efficient operation of nonlinear optical oscillators. Dispersion control in high Q systems has taken on greater importance in recent years with increased interest in chip-integrable optical frequency combs.

Optical-frequency combs enable measurement precision at the 20th digit, and accuracy entirely commensurate with their reference oscillator. A new direction in experiments is the creation of ultracompact frequency combs by way of nonlinear parametric optics in microresonators. We refer to these as microcombs, and here we report a silicon-chip-based microcomb optical clock that phase-coherently converts an optical-frequency reference to a microwave signal. A low-noise comb spectrum with 25 THz span is generated with a 2 mm diameter silica disk and broadening in nonlinear fiber. This spectrum is stabilized to rubidium frequency references separated by 3.5 THz by controlling two teeth 108 modes apart. The optical clocks output is the electronically countable 33 GHz microcomb line spacing, which features an absolute stability better than the rubidium transitions by the expected factor of 108. Our work demonstrates the comprehensive set of tools needed for interfacing microcombs to state-of-the-art optical clocks., Comment: 10 pages, 4 figures

Microresonator-based frequency combs (microcombs or Kerr-combs) can potentially miniaturize the numerous applications of conventional frequency combs. A priority is the realization of broad-band (ideally octave spanning) spectra at detectable repetition rates for comb self referencing. However, access to these rates involves pumping larger mode volumes and hence higher threshold powers. Moreover, threshold power sets both the scale for power per comb tooth and also the optical pump. Along these lines, it is shown that a class of resonators having surface-loss-limited Q factors can operate over a wide range of repetition rates with minimal variation in threshold power. A new, surface-loss-limited resonator illustrates the idea. Comb generation on mode spacings ranging from 2.6 GHz to 220 GHz with overall low threshold power (as low as 1 mW) is demonstrated. A record number of comb lines for a microcomb (around 1900) is also observed with pump power of 200 mW. The ability to engineer a wide range of repetition rates with these devices is also used to investigate a recently observed mechanism in microcombs associated with dispersion of subcomb offset frequencies. We observe high-coherence, phase-locking in cases where these offset frequencies are small enough so as to be tuned into coincidence. In these cases, a record-low microcomb phase noise is reported at a level comparable to an open-loop, high-performance microwave oscillator., Comment: 5 pages, 5 figures

Ultra-high-Q optical resonators are being studied across a wide range of research subjects including quantum information, nonlinear optics, cavity optomechanics, and telecommunications. Here, we demonstrate a new, resonator on-a-chip with a record Q factor of 875 million, surpassing even microtoroids. Significantly, these devices avoid a highly specialized processing step that has made it difficult to integrate microtoroids with other photonic devices and to also precisely control their size. Thus, these devices not only set a new benchmark for Q factor on a chip, but also provide, for the first time, full compatibility of this important device class with conventional semiconductor processing. This feature will greatly expand the possible kinds of system on a chip functions enabled by ultra-high-Q devices., Comment: 5 pages, 4 figures

The combination of large per-photon optical force and small motional mass attainable in nanocavity optomechanical systems results in strong dynamical back-action between mechanical motion and the cavity light field. In this work we study the optical control of mechanical motion within two different nanocavity structures, a zipper nanobeam photonic crystal cavity and a double-microdisk whispering-gallery resonator. The strong optical gradient force within these cavities is shown to introduce signifcant optical rigidity into the structure, with the dressed mechanical states renormalized into optically-bright and optically-dark modes of motion. With the addition of internal mechanical coupling between mechanical modes, a form of optically-controlled mechanical transparency is demonstrated in analogy to electromagnetically induced transparency of three-level atomic media. Based upon these measurements, a proposal for coherently transferring RF/microwave signals between the optical field and a long-lived dark mechanical state is described., Comment: 27 pages, 5 figures

Periodically structured materials can sustain both optical and mechanical excitations which are tailored by the geometry. Here we analyze the properties of dispersively coupled planar photonic and phononic crystals: optomechanical crystals. In particular, the properties of co-resonant optical and mechanical cavities in quasi-1D (patterned nanobeam) and quasi-2D (patterned membrane) geometries are studied. It is shown that the mechanical Q and optomechanical coupling in these structures can vary by many orders of magnitude with modest changes in geometry. An intuitive picture is developed based upon a perturbation theory for shifting material boundaries that allows the optomechanical properties to be designed and optimized. Several designs are presented with mechanical frequency ~ 1-10 GHz, optical Q-factor Qo > 10^7, motional masses meff 100 femtograms, optomechanical coupling length LOM < 5 microns, and a radiation-limited mechanical Q-factor Qm > 10^7., Comment: 25 pages, 9 figures

The phonon analog of an optical laser has long been a subject of interest. We demonstrate a compound microcavity system, coupled to a radio-frequency mechanical mode, that operates in close analogy to a two-level laser system. An inversion produces gain, causing phonon laser action above a pump power threshold of around 50 $\mu$W. The device features a continuously tunable, gain spectrum to selectively amplify mechanical modes from radio frequency to microwave rates. Viewed as a Brillouin process, the system accesses a regime in which the phonon plays what has traditionally been the role of the Stokes wave. For this reason, it should also be possible to controllably switch between phonon and photon laser regimes. Cooling of the mechanical mode is also possible., Comment: 4 pages, 4 figures

Structured, periodic optical materials can be used to form photonic crystals capable of dispersing, routing, and trapping light. A similar phenomena in periodic elastic structures can be used to manipulate mechanical vibrations. Here we present the design and experimental realization of strongly coupled optical and mechanical modes in a planar, periodic nanostructure on a silicon chip. 200-Terahertz photons are co-localized with mechanical modes of Gigahertz frequency and 100-femtogram mass. The effective coupling length, which describes the strength of the photon-phonon interaction, is as small as 2.9 microns, which, together with minute oscillator mass, allows all-optical actuation and transduction of nanomechanical motion with near quantum-limited sensitivity. Optomechanical crystals have many potential applications, from RF-over-optical communication to the study of quantum effects in mesoscopic mechanical systems., Comment: 16 pages, 7 figures

Here we propose and demonstrate an all-optical wavelength-routing approach which uses a tuning mechanism based upon the optical gradient force in a specially-designed nano-optomechanical system. The resulting mechanically-compliant "spiderweb" resonantor realizes seamless wavelength routing over a range of 3000 times the intrinsic channel width, with a tuning efficiency of 309-GHz/mW, a switching time of less than 200-ns, and 100% channel-quality preservation over the entire tuning range. These results indicate the potential for radiation pressure actuated devices to be used in a variety of photonics applications, such as channel routing/switching, buffering, dispersion compensation, pulse trapping/release, and widely tunable lasers., Comment: 24 pages, 5 figures, 5 appendices

In this work we combine the large per-photon optical gradient force with the sensitive feedback of a high quality factor whispering-gallery microcavity. The cavity geometry, consisting of a pair of silica disks separated by a nanoscale gap, shows extremely strong dynamical backaction, powerful enough to excite giant coherent oscillations even under heavily damped conditions (mechanical Q=4). In vacuum, the threshold for regenerative mechanical oscillation is lowered to an optical input power of only 270-nanoWatts, or roughly 1000 stored cavity photons, and efficient cooling of the mechanical motion is obtained with a temperature compression factor of 13-dB for 4-microWatts of dropped optical input power., Comment: 29 pages, 8 figures

Stimulated Raman scattering (SRS) in ultra-high-Q surface-tension-induced spherical and chip-based toroid microcavities is considered both theoretically and experimentally. These microcavities are fabricated from silica, exhibit small mode volume (typically 1000 $\mu m^{3}$) and possess whispering-gallery type modes with long photon storage times (in the range of 100 ns), significantly reducing the threshold for stimulated nonlinear optical phenomena. Oscillation threshold levels of less than 100 $\mu $% -Watts of launched fiber pump power, in microcavities with quality factors of 100 million are observed. Using a steady state analysis of the coupled-mode equations for the pump and Raman whispering-gallery modes, the threshold, efficiencies and cascading properties of SRS in UHQ devices are derived. The results are experimentally confirmed in the telecommunication band (1550nm) using tapered optical fibers as highly efficient waveguide coupling elements for both pumping and signal extraction. The device performance dependence on coupling, quality factor and modal volume are measured and found to be in good agreement with theory. This includes analysis of the threshold and efficiency for cascaded Raman scattering. The side-by-side study of nonlinear oscillation in both spherical microcavities and toroid microcavities on-a-chip also allows for comparison of their properties. In addition to the benefits of a wafer-scale geometry, including integration with optical, electrical or mechanical functionality, microtoroids on-a-chip exhibit single mode Raman oscillation over a wide range of pump powers., Comment: 12 pages, 15 figures