1. Sputtered boron indium oxide thin-film transistors
- Author
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Vasily Gouliouk, Douglas A. Keszler, Kevin A. Stewart, and John F. Wager
- Subjects
010302 applied physics ,Materials science ,Band gap ,Analytical chemistry ,Oxide ,chemistry.chemical_element ,02 engineering and technology ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Oxide thin-film transistor ,01 natural sciences ,Electronic, Optical and Magnetic Materials ,Amorphous solid ,chemistry.chemical_compound ,chemistry ,Thin-film transistor ,0103 physical sciences ,Materials Chemistry ,Electronic engineering ,Electrical and Electronic Engineering ,Thin film ,0210 nano-technology ,Boron ,Indium - Abstract
Boron indium oxide (BIO) is studied for thin-film transistor (TFT) channel layer applications. Sputtered BIO thin films exhibit an amorphous phase over a wide range of B 2 O 3 /In 2 O 3 ratios and remain amorphous up to 500 °C. The band gap decreases linearly with decreasing boron content, whereas device performance generally improves with decreasing boron content. The best amorphous BIO TFT exhibits a field-effect mobility of 10 cm 2 V −1 s −1 , turn-on voltage of 2.5 V, and sub-threshold swing of 0.72 V/dec. Decreasing the boron content to 12.5% leads to a polycrystalline phase, but further increases the mobility up to 20–40 cm 2 V −1 s −1 . TCAD simulation results suggest that the reason for higher performance after increasing the anneal temperature from 200 to 400 °C is due to a lower defect density in the sub-bandgap region of the BIO channel layer.
- Published
- 2017
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