1. Thin-film design of amorphous hafnium oxide nanocomposites enabling strong interfacial resistive switching uniformity
- Author
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Hellenbrand, Markus, Bakhit, Babak, Hongyi, Dou, Xiao, Ming, Hill, Megan, Sun, Zhuotong, Mehonic, Adnan, Chen, Aiping, Jia, Quanxi, Wang, Haiyan, Driscoll, Judith, Hellenbrand, Markus [0000-0002-5811-5228], Bakhit, Babak [0000-0002-3083-7536], Dou, Hongyi [0000-0003-3496-7933], Xiao, Ming [0000-0003-2018-4807], Sun, Zhuotong [0000-0002-6951-7265], Mehonic, Adnan [0000-0002-2476-5038], Chen, Aiping [0000-0003-2639-2797], Jia, Quanxi [0000-0002-7683-5202], Wang, Haiyan [0000-0002-7397-1209], MacManus-Driscoll, Judith L [0000-0003-4987-6620], and Apollo - University of Cambridge Repository
- Subjects
51 Physical Sciences ,4016 Materials Engineering ,40 Engineering - Abstract
A design concept of phase-separated amorphous nanocomposite thin films is presented which realizes interfacial resistive switching (RS) in hafnium-oxide-based devices. The films are formed by incorporating an average of 7% Ba into hafnium oxide during pulsed laser deposition at temperatures ≤400 °C. The added Ba prevents the films from crystallizing and leads to ∼20-nm-thin films consisting of an amorphous HfOx host matrix interspersed with ∼2-nmwide, ∼5-to-10-nm-pitch Ba-rich amorphous nanocolumns penetrating ∼2/3 through the films. This restricts the RS to an interfacial Schottky-like energy barrier whose magnitude is tuned by ionic migration under an applied electric field. Resulting devices achieve stable cycle-to-cycle, device-to-device, and sample-to-sample reproducibility with a measured switching endurance of ≥10⁴ cycles for a memory window ≥10 at switching voltages of ±2 V. Each device can be set to multiple intermediate resistance states, which enables synaptic spike-timing-dependent plasticity. The presented concept unlocks additional design variables for RS devices.
- Published
- 2023