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In this paper, models are built to imply smart growth theories into the measurement of smart cities. Firstly, three E's of sustainability are decomposed into eight quantitative indicators and their weights of importance are determined through AHP for the construction of the overall metric. Secondly, this paper uses fuzzy comprehensive evaluation to grade specific data into three levels and eventually obtain a specific score of the overall metric. By establishing AHP-fuzzy comprehensive evaluation model which combines Analytic Hierarchy Process and Fuzzy Evaluation Method, we can easily measure the success of smart growth of a city.

Polycrystalline Si (poly-Si) films are in situ grown on Al-coated glass substrates by inductively coupled plasma chemical vapour deposition at a temperature as low as 350°C. Compared to the traditional annealing crystallization of amorphous Si/Al-layer structures, no layer exchange is observed and the resultant poly-Si film is much thicker than Al layer. By analysing the depth profiles of the elemental composition, no remains of Al atoms are detected in Si layer within the limit (

Silicon thin films are deposited by inductively coupled plasma chemical vapour deposition (ICP-CVD) at a low temperature of 350°C using a mixture of SiH4 and H2. The structures of the films are characterized by x-ray diffraction and Raman spectra. Under the optimum experimental conditions, we observe that the crystallinity of Si films becomes more excellent and the preferred orientation changes from (111) to (220) with the decreasing dilution of SiH4 in H2. Such an abnormal crystallization is tentatively interpreted in term of the high density, low electron temperature and spatial confinement of the plasma in the process of ICP-CVD.