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15. Editors and contributors

Author

Zhao, Yuliang, primary, Wei, Zhixiang, additional, Dai, Qing, additional, Dong, Hongwei, additional, Xiao, Hongjun, additional, Wu, Shuxian, additional, He, Xingxing, additional, Mitchell, Beverley, additional, Collins, Thomas A., additional, Sarah, Huggett, additional, John, Van Orden, additional, Barranguet, Christiane, additional, and Candemir, Basak, additional

Published
2021
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26. Tilted IDT Designs for Spurious Modes Suppression in LiNbO3/SiO2/Si SAW Resonators

Author

Wu, Shuxian, Wu, Zonglin, Qian, Hangyu, Li, Ming, Bao, Feihong, Tang, Gongbin, Xu, Feng, and Zou, Jie

Abstract

High-performance wideband acoustic filters are urgently needed for communication systems with large volumes of data. Recently, multilayered surface acoustic wave (SAW) resonators have attracted wide attention as key components of acoustic filters. In our previous work, we proposed a shear-horizontal SAW (SH-SAW) resonator based on a 30° YX -LiNbO3/SiO2/Si substrate. This resonator achieved an effective electromechanical coupling coefficient ( ${k}^{{2}}_{\text {eff}}$ ) of 24.4% and a Bode- ${Q}_{\text {max}}$ of 1092. However, the admittance/conductance showed obvious transverse and longitudinal modes spurious that degraded the resonator’s performance. To address this issue, we adopted a tilted interdigital-transducer (IDT) design in this article, which combined dispersion/slowness characteristic analysis and tilted angle optimization using the finite-element method (FEM). The simulations and experimental results have verified the successful suppression of both transverse and longitudinal modes when the tilted angle of the IDT reaches 16°. Moreover, the adoption of the tilted IDT designs for spurious modes suppression does not result in the evident sacrifice of the ${k}^{{2}}_{\text {eff}}$ . The proposed resonator has the potential to be used in the development of acoustic filters with large bandwidth, low loss, and no ripples.

Published
2023
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30. Large Coupling and Spurious-Free SH0 Plate Acoustic Wave Resonators Using LiNbO3 Thin Film

Author

Wu, Shuxian, Wu, Zonglin, Qian, Hangyu, Bao, Feihong, Tang, Gongbin, Xu, Feng, and Zou, Jie

Abstract

With the rapid development of 5G communication technology, high-performance acoustic filters are urgently required to cope with the increasing number of frequency bands. Recently, an extensive attention has been paid to the advancement of lithium niobate (LiNbO3)-based thin-film acoustic resonators due to their large electromechanical coupling factor. In this article, a fundamental (0th) shear-horizontal plate acoustic wave (SH0-PAW) resonator based on a 30 $^{\circ } {Y}$ -cut LiNbO3/SiO2 thin film is proposed. Using the finite element method (FEM), the effective electromechanical coupling coefficient ( ${k}^{{2}}_{\text {eff}}$ ) and phase velocity as the function of the rotation angle $^{^{^{}}}$ of the LiNbO3 film and the layer thicknesses are extracted. Meanwhile, the dispersion characteristic of the SH0 mode is analyzed. The fabricated resonators yield a ${k}^{{2}}_{\text {eff}}$ of 24.8%, a Bode- ${Q}_{\text {max}}$ of 688, and a figure of merit (FoM = ${k}^{{2}}_{\text {eff}} \cdot \text {Bode-}{Q}_{\text {max}}$ ) of 170. Furthermore, a tilted interdigital-transducer (IDT) method is adopted to suppress the spurious modes of the proposed resonators. It has been experimentally verified that most of the transverse modes are suppressed, and the longitudinal modes are suppressed effectively. The proposed resonator provides an effective solution to design a wideband, low loss, and unrippled acoustic filter for communication systems.

Published
2023
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