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To realize high performance and suppress the backward motion of the inertia piezoelectric actuator, a novel inertial piezoelectric actuator with double-stator cooperative motion is proposed, designed, fabricated, and tested. The structure and the operation principle of the proposed actuator are first explained in detail. Then the flexible structure is analyzed through the finite element simulation. In addition, the dynamic model of the actuator with double-stator working mode is established and simulated in MATLAB/Simulink, and the step characteristic is investigated, which provided a guidance for the design and optimization of inertial piezoelectric actuators with double-stator. Finally, an experimental investigation of the proposed actuator prototype was carried out and the results showed a significant improvement in the performance of the proposed actuator compared to the previous double-stator inertial piezoelectric actuators. The actuator exhibits a maximum speed of 32.84 mm/s, a maximum lateral load of 20 N, a maximum vertical load of 200 N, a minimum backward rate of 0.91%, and a minimum resolution of 127.5 nm. The actuator with double-stator can improve the maximum output performance to a certain extent, and suppress the backward rate, presenting a specific reference value for the design of future high-performance piezoelectric actuators. [ABSTRACT FROM AUTHOR]

To study the fabrication processes of micro-texture for the elliptical vibration assisted turning technique and the characteristics of machined micro-surfaces, the change rules of surface microtexture was analyzed with vibration principle of ellipse and the micro-texture formation under different speeds and feed rates. The vibration track, surface topography, single micro-texture geometry size and surface roughness were analyzed under the elliptic vibration track measurement tests and eliptic vibration turning tests. The analyses results show that in the turning test processes, compared to the common turning, due to the space elliptic movement of the tool, the surface of ultrasonic elliptical vibration turning presents micro-texture grooves similar to ellipse. With the changes of rotation speed and feed rate, it indicates that the geometric size, profile height and surface roughness of micro-texture grooves will change regularly based on the theoretical analyses and experimental results. [ABSTRACT FROM AUTHOR]