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96 results on '"Ying, Liliang"'

1. Quasiparticle Dynamics in Superconducting Quantum-Classical Hybrid Circuits

Author

Liu, Kuang, He, Xiaoliang, Niu, Zhengqi, Xue, Hang, Jiang, Wenbing, Ying, Liliang, Peng, Wei, Maezawa, Masaaki, Lin, Zhirong, Xie, Xiaoming, and Wang, Zhen

Subjects
Quantum Physics
Abstract

Single flux quantum (SFQ) circuitry is a promising candidate for a scalable and integratable cryogenic quantum control system. However, the operation of SFQ circuits introduces non-equilibrium quasiparticles (QPs), which are a significant source of qubit decoherence. In this study, we investigate QP behavior in a superconducting quantum-classical hybrid chip that comprises an SFQ circuit and a qubit circuit. By monitoring qubit relaxation time, we explore the dynamics of SFQ-circuit-induced QPs. Our findings reveal that the QP density near the qubit reaches its peak after several microseconds of SFQ circuit operation, which corresponds to the phonon-mediated propagation time of QPs in the hybrid circuits. This suggests that phonon-mediated propagation dominates the spreading of QPs in the hybrid circuits. Our results lay the foundation to suppress QP poisoning in quantum-classical hybrid systems., Comment: 11 pages,13 figures

Published
2023
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2. Development of 15kA/cm$^2$ Fabrication Process for Superconducting Integrated Digital Circuits

Author

Ying, Liliang, Zhang, Xue, He, Guixiang, Shi, Weifeng, Xie, Hui, Ma, Linxian, Zhang, Hui, Ren, Jie, Peng, Wei, and Wang, Zhen

Subjects
Physics - Applied Physics, Condensed Matter - Superconductivity
Abstract

A new fabrication process for superconducting integrated digital circuits is reported. We have developed the "SIMIT Nb04" fabrication technique for superconducting integrated circuits with Nb-based Josephson junctions based on the validated "SIMIT Nb03" process and Chemical Mechanical Planarization (CMP) technology. Seven Nb superconducting layers and one Mo resistor layer are included in the "SIMIT Nb04" process with 19 mask levels. The device structure is composed of active layers including junctions at the bottom, two passive transmission line (PTL) layers in the middle and a DC power layer at the top. The circuit fabrication started with the fabrication of Mo resistors with a target sheet resistance Rsh of 3 $\Omega$, followed by the deposition of Nb/Al-AlO$_x$/Nb trilayer Josephson-junction with a target critical current density Jc at 15 kA/cm$^2$. To increase the Al-AlO$_x$ barrier layer etching's repeatability, an additional barrier protection layer was applied. To accomplish high-quality planarization, we created a planarization procedure coupled with dummy filling. To assess the process dependability and controllability, a set of process control monitors (PCMs) for monitoring fabrication and design parameters was designed and monitored. The successful manufacturing and testing of a few small-scale circuits, like our standard library cells, further attests to the viability of our fabrication process for superconducting integrated circuits.

Published
2023

8. Development of Multi-Layer Fabrication Process for SFQ Large Scale Integrated Digital Circuits

Author

Ying, Liliang, Zhang, Xue, Niu, Minghui, Ren, Jie, Peng, Wei, Meazawa, Masaaki, and Wang, Zhen

Subjects
Condensed Matter - Superconductivity, Physics - Applied Physics
Abstract

We have developed a fabrication technology for the development of large-scale superconducting integrated circuits with Nb-based Josephson junctions. The standard fabrication process with 10 mask levels uses four metal layers including 3 Nb superconducting layers and a Mo resistor layer. The influence of deposition parameters on film stress, electrical properties, and surface roughness were studied systematically. High quality Nb, Al, Mo, and SiO2 films were successfully deposited for the subsequent fabrication of circuits. The circuit fabrication started with the fabrication of Mo resistors with a target sheet resistance Rsh of 2 Ome, followed by the deposition of Josephson-junction. The target critical current density Jc was set at 6 kA per cm2. The thicknesses and etch depths of the films were monitored during fabrication with on-wafer process-control-monitor (PCM) patterns for all the wafers.

Published
2020
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20. Timing Regulation Scheme for RSFQ Circuit

Author

Li, Jia, primary, Ren, Jie, additional, Jin, Jie, additional, Yang, Shucheng, additional, Niu, Minghui, additional, Ying, Liliang, additional, Gao, Xiaoping, additional, Li, Siqi, additional, and Yan, Wei, additional

Published
2023
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28. Development of Series SQUID Array with On-Chip Filter for TES Detector

Author

Wu, Wentao, primary, Lin, Zhirong, additional, Ni, Zhi, additional, Li, Peizhan, additional, Liang, Tiantian, additional, Zhang, Guofeng, additional, Wang, Yongliang, additional, Ying, Liliang, additional, Peng, Wei, additional, Zhang, Wen, additional, Shi, Shengcai, additional, You, Lixing, additional, and Wang, Zhen, additional

Published
2021
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31. Process Control Monitoring for Fabrication Technology of Superconducting Integrated Circuits

Author

Zhang, Xue, primary, Ying, Liliang, additional, Niu, Minghui, additional, Zhang, Hui, additional, Liu, Huanli, additional, Wu, Yu, additional, Xu, Wanning, additional, Chen, Liyun, additional, Shao, Yingyi, additional, Liang, Tiantian, additional, Ma, Linxian, additional, Jin, Hua, additional, Xie, Hui, additional, Gao, Yang, additional, Sun, Hao, additional, Ren, Jie, additional, Peng, Wei, additional, Maezawa, Masaaki, additional, and Wang, Zhen, additional

Published
2021
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44. Heteroperovskite phase formation and magnetotransport properties of YBa2Cu3O7-x/SrRuO3 quasimultilayers.

Author

Cai, Chuanbing, Liu, Jinlei, Liu, Zhiyong, Ying, Liliang, Gao, Bo, Peng, Lin, and Chen, Changzhao

Subjects
YTTRIUM, BARIUM compounds, COPPER compounds, OXIDES, STRONTIUM compounds, RUTHENIUM compounds, PULSED laser deposition, SUPERCONDUCTORS
Abstract

A series of quasimultilayers consisting of YBa2Cu3O7-δ (YBCO) and SrRuO3 (SRO), namely, p×(YBCO(m)/SRO(n)) (p: repetition periods; m: YBCO pulse number; n: SRO pulse number), is prepared on single crystal SrTiO3 by pulsed laser deposition. X-ray diffraction measurements reveal that a heterogeneous phase of Ba2YRuO6 is formed due to the chemical reaction, while both the in-plane and out-of-plane textures of the present quasimultilayers are as good as in the pure YBCO films. The content of Ba2YRuO6 increases as the pulse number of SRO increases, leading to the decrease in superconducting transition temperature (Tc). There is no obvious difference in Tc between the samples with the different deposition sequence orders of YBCO and SRO. The magnetic field dependence of critical current density (Jc) shows an enhanced flux pinning at relatively high fields for all the present quasimultilayers, which occurs at different ranges of fields depending on the applied temperatures. The Jc of the quasimultilayers can reach two times higher than that of pure YBCO films in a wide range of magnetic fields, which shows the promising application for coated conductors. [ABSTRACT FROM AUTHOR]

Published
2008
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46. Development of Nb/Al?AlOx/Nb Tunnel Junction for Large-Scale Integrated Digital Circuits.

Author

Xiong, Wei, Ying, Liliang, Wu, Yu, Ren, Jie, Peng, Wei, and Wang, Zhen

Subjects
*TUNNEL junction device design & construction, *JOSEPHSON junctions, *DIGITAL electronics equipment, *NIOBIUM compounds, *SUPERCONDUCTING films
Abstract

We present the latest development of an Nb/Al–AlOx/Nb Josephson junction fabrication process for superconducting integrated circuits at SIMIT. Our fabrication process has four niobium superconducting layers and one Ti/Pd resistor layer with 1.0 Ω/square sheet resistor for junction shunting and circuit biasing. Critical current density Jc of the junctions is controlled from 30 A/cm2 to 10 kA/cm2 by exposing aluminum layer to pure or mixed O2 atmosphere. Correlation between measured Jc and exposure conditions has been established. Average quality factor (Rsg/Rn) of the junctions in our process is larger than 20 with subgap leakage factor (Vm) beyond 30 mV. Critical current uniformity is obtained according to the switching current (Is) distribution of a 1000-JJ array. Measured standard deviation sigma of Is is less than 4% over the 100-mm wafer. Plasma resonance in a large Josephson junction is used to measure specific capacitance (Cs ) of the junction. Sheet inductances of superconducting niobium strip-lines are extracted by a SQUID diagnose circuit and the measured results show good agreement with our design values. [ABSTRACT FROM PUBLISHER]

Published
2017
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