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Zeolite A whose surface was evenly covered with tiny scaly calcium deficient hydroxyapatite (Ca-def HA) nanocrystals was prepared through the ion exchange reaction of ammonium and calcium ions as a novel encapsulation material for the long-term immobilization of radioactive Sr-90. The maximum capacity for Sr ion uptake in the zeolite A/Ca-def HA nanocomposite was determined to be 0.40 mmol g−1, which was comparable to the value for zeolite A alone; this was because of the loose arrangement of Ca-def HA nanocrystals on the surfaces. The nanocomposite obtained was heated at 800 to 1200°C to improve the solution stability of adsorbed Sr ions. The low crystalline Ca-def HA became tricalcium phosphate (TCP) after heating at over 850°C. A phase change from zeolite A to an amorphous phase was observed at 850°C and to feldspar at 1000°C. The elution of Sr ions from the nanocomposites heated was compared to those from the heated zeolite A, under alkaline conditions (pH 10.2) similar to those found in geological layers deeper than 300 m. The elution amounts of Sr ions from the nanocomposites decreased with heating temperatures over 950°C compared with those of zeolite A, due to the complete coverage of TCP crystals. These results indicate that calcium phosphate nano-layers on the zeolite A surfaces play an important role for the long-term encapsulation of Sr ions in the nanocomposites.

Hyper Suprime-Cam (HSC) is an 870 Mega pixel prime focus camera for the 8.2 m Subaru telescope. The wide field corrector delivers sharp image of 0.25 arc-sec FWHM in r-band over the entire 1.5 degree (in diameter) field of view. The collimation of the camera with respect to the optical axis of the primary mirror is realized by hexapod actuators whose mechanical accuracy is few microns. As a result, we expect to have seeing limited image most of the time. Expected median seeing is 0.67 arc-sec FWHM in i-band. The sensor is a p-ch fully depleted CCD of 200 micron thickness (2048 x 4096 15 μm square pixel) and we employ 116 of them to pave the 50 cm focal plane. Minimum interval between exposures is roughly 30 seconds including reading out arrays, transferring data to the control computer and saving them to the hard drive. HSC uniquely features the combination of large primary mirror, wide field of view, sharp image and high sensitivity especially in red. This enables accurate shape measurement of faint galaxies which is critical for planned weak lensing survey to probe the nature of dark energy. The system is being assembled now and will see the first light in August 2012.

Hyper Suprime-Cam (HSC) is the next generation wide-field imager for the prime focus of Subaru Telescope, which is scheduled to receive its first light in 2011. Combined with a newly built wide-field corrector, HSC covers 1.5 degree diameter field of view with 116 fully-depleted CCDs. In this presentation, we summarize the details of the camera design: the wide-field corrector, the prime focus unit, the CCD dewar and the peripheral devices. The wide-field corrector consists of 5 lenses with lateral shift type doublet ADC element. The novel design guarantees the excellent image quality (D80

We developed a small field exposure tool (SFET) in collaboration with EUVA (Extreme Ultraviolet Lithography System Development Association). SFET was installed at SELETE (Semiconductor Leading Edge Technologies; Japanese Consortium) in 2006. SFET is positioned as a cornerstone of the manufacturing technologies for EUVL Full- Field tools as well as tool for resist and mask development. We started the system design of the Full-Field tool and fabrication of the six-mirror projection optics based on the experience of the SFET. In this paper, we introduce the outline of Canon's activities for the full-field tool. EUVL is requested to resolve the sub 30 nm features. The studies of the resolution for higher NA EUV projection optics is also presented.

We have constructed a small field exposure tool (SFET) in collaboration with EUVA, and shipped out to the Selete (Semiconductor Leading Edge Technologies; Japanese Consortium). The SFET has a field size of 0.6*0.2mm2 and two-mirror type projection optics. This machine is developed not only to assist the resist and mask development, but also to demonstrate manufacturing technologies for the full field tool. In this paper we discuss the SFET performances with aberration and flare of the projection optics and exposure results based on the simulation and exposure results. To fabricate the SFET projection optics, we improved our key manufacturing tools such as the wavefront measurement tool and the ion beam etching equipment (IBF). These machines are proved to be effective on production of the SFET, and will be applicable for the full field machines. We introduce the outline of Canon's activities for full field tool development and the other key technology such as mask handling, contamination protection and it's removal technology studies.