1. A heat-resistance and high-sensitivity acoustic pressure sensor based on aluminum-polyimide diaphragm.
- Author
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Li, Xinxin, Zhen, Shenglai, Qian, Kai, Liang, Xiudong, Wang, Xiaoguang, Shi, Jinhui, Wu, Xuqiang, and Yu, Benli
- Subjects
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FIBER optical sensors , *SOUND pressure , *PRESSURE sensors , *THERMAL resistance , *ALUMINUM , *POLYIMIDES - Abstract
A fiber-optic acoustic pressure sensor based on aluminum-polyimide diaphragm is proposed in this paper. The sensing diaphragm exhibits excellent properties including heat resistance and long-term stability (4 months). Together with hybrid configuration of Mach-Zehnder and Sagnac interferometer with triple detection passive demodulation algorithm, the sensor can measure the absolute amplitude of acoustic pressure. The sensor has a high sensitivity of 110 nm/Pa with the acoustic pressure amplitude of 2.05 mPa–7.15 Pa and gives a minimum detectable pressure of 37.7 μPa/Hz 1/2 at 4 kHz. The sensor also demonstrates a flat frequency response in the range of 600 Hz–6 kHz and is expected to be used for weak acoustic pressure sensing and photo-acoustic spectroscopy. [ABSTRACT FROM AUTHOR]
- Published
- 2018
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