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A novel 2PRS-2PSS (P represents the prismatic pair, R represents the revolute hinge, S represents the spherical hinge) compliant parallel micromanipulator with two translational DOFs and two rotational DOFs is presented, and its compliance model and kinetostatic model are sequentially developed and analyzed. Initially, an analytical model used to describe the compliance of this micromanipulator was developed using the compliance matrix method (CMM). Through a comparison with finite element analysis, the accuracy of this analytical model is confirmed, and the influence of various dimensional and structural parameters on the compliance behavior is investigated. Subsequently, the micromanipulator is treated as an equivalent spring system, allowing for the derivation of its governing equation based on the established compliance model. From this equation, a kinetostatic model relating input forces to output displacements is derived. Validation of this model is performed by comparing analytical results with finite element simulations under specific motion trajectories, revealing a maximum relative error of 6.18%. This close agreement verifies the accuracy of the kinetostatic model. Finally, the impact of the parameters of the flexure hinge on the mapping matrix is examined to offer insights into minimizing undesired displacements, providing valuable guidance for optimizing the micromanipulator's performance. [ABSTRACT FROM AUTHOR]

A novel 2PRS-2PSS (P represents the prismatic pair, R represents the revolute hinge, S represents the spherical hinge) compliant parallel micromanipulator with two translational DOFs and two rotational DOFs is presented, and its compliance model and kinetostatic model are sequentially developed and analyzed. Initially, an analytical model used to describe the compliance of this micromanipulator was developed using the compliance matrix method (CMM). Through a comparison with finite element analysis, the accuracy of this analytical model is confirmed, and the influence of various dimensional and structural parameters on the compliance behavior is investigated. Subsequently, the micromanipulator is treated as an equivalent spring system, allowing for the derivation of its governing equation based on the established compliance model. From this equation, a kinetostatic model relating input forces to output displacements is derived. Validation of this model is performed by comparing analytical results with finite element simulations under specific motion trajectories, revealing a maximum relative error of 6.18%. This close agreement verifies the accuracy of the kinetostatic model. Finally, the impact of the parameters of the flexure hinge on the mapping matrix is examined to offer insights into minimizing undesired displacements, providing valuable guidance for optimizing the micromanipulator’s performance.

With many micromanipulator designs emerging in micro and nanosystem applications, the element of compliance in the mechanisms is gaining attention. Several designs consider motions limited in a plane for high accuracy and repeatability as needed in micro/nano manipulation applications. Extending this to a full spatial configuration with coupled motions of series and parallel linkages with flexure joints of 1-degree-of-freedom (DOF) and 3-DOF needs a systematic analytical approach. One such approach for compliance analysis is presented in this article for a mechanism designed at Indian Institute of Technology Kharagpur. To validate the analytical models, finite element analysis simulations are performed with the help of the Abaqus-6.14 software package. Following the successful validation, the effect of structural parameters on the performance is presented with the help of the analytical expressions. We explore the performance of the mechanism with different dimensions of flexures of a particular type. Results indicate that the design with dissimilar dimensional parameters can give superior performance. [ABSTRACT FROM AUTHOR]

In micro/nano manipulation mechanisms, the compliant z/tip/tilt stages have proved to have enormous advantages for out-of-plane positioning. Small workspace is a challenge in designing these out-of-plane positioning systems. This deficiency can be overcome significantly by a new insight into the optimization approach of a compliant mechanism that can be implemented easily on the entire structure of any spatial mechanism and/or any spatial mechanism with n-symmetrical spatial kinematic chains. Finite Element Method (FEM) adopted by the engineering software, ANSYS, is utilized to perform the structural optimization of an entire three-way symmetric spatial compliant mechanism to achieve the best performances and overcoming deficiencies. Therefore, this paper introduces a compliant monolithic three degrees of freedom (DOFs) z/tip/tilt piezo-driven micromanipulator with a comparable large workspace. Furthermore, as compact as 201 mm × 180 mm × 75 mm and made of Acrylonitrile Butadiene Styrene (ABS) with the first natural frequency of 115.42 Hz make this design superior in comparison to its peers. Regarding the structural aspects, three Scott-Russell and six leaf parallelogram mechanisms are employed to transform horizontal piezoelectric actuators' inputs (PEAs) to vertical inputs and transfer them to the stage. The best performances of the proposed structure are achieved by optimizing the mechanism using FEM. Due to the optimization, a large amplification ratio of 5.3 is achieved. Moreover, finite element analyses and analytical modeling are performed to verify the performance of the proposed mechanism. Finally, in a comparative study, the captured workspace and resonant frequency of the proposed micromanipulator are compared against those available in theliterature and provide an insight into the performances of the proposed monolithic mechanism. [ABSTRACT FROM AUTHOR]

A three-degrees-of-freedom (3-DOF) monolithic compliant parallel micromanipulator with bridge-type displacement amplifier is presented in this paper. The research aims are to design a monolithic mechanism with capability of working in three translational axes and having a high resonant frequency. As a result of being precise in rotation, circular flexure hinges are adopted in the structure of the proposed mechanism and its corresponding mathematical modeling is investigated. A finite element analysis (FEA) model is developed to perform analysis and predict the behaviour of the proposed mechanism and the utilized amplifier, and thus establish the computational Jacobian, workspace and amplification ratio. The stress-strain relationship of the proposed mechanism is investigated by applying safety factor and the results are presented. Finally, an experimental study is conducted to evaluate the dynamic and tracking performances of the proposed flexure-based spatial mechanism. A feedback Proportional-Integral (PI) control methodology is implemented to enhance the mechanism positioning performance and eliminate hysteresis effect inherent in piezoelectric actuators. Based on the designed parameters, the proposed manipulator can have a large workspace, high band-width frequency, and fine tracking resolution along each working axes. [ABSTRACT FROM AUTHOR]