1. Tunable Electromechanical Coupling Coefficient of a Laterally Excited Bulk Wave Resonator with Composite Piezoelectric Film.
- Author
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Xie, Ying, Liu, Yan, Liu, Jieyu, Wang, Lei, Liu, Wenjuan, Soon, Bo Woon, Cai, Yao, and Sun, Chengliang
- Subjects
CRYSTAL resonators ,PIEZOELECTRIC composites ,PIEZOELECTRIC materials ,PIEZOELECTRIC thin films ,COMPOSITE materials ,LITHIUM niobate ,RADIO (Medium) - Abstract
A resonator with an appropriate electromechanical coupling coefficient ( K t 2 ) is crucial for filter applications in radio communication. In this paper, we present an effective method to tune the K t 2 of resonators by introducing different materials into a lithium niobate (LiNbO
3 ) piezoelectric matrix. The effective piezoelectric coefficients e 33 e f f and e 15 e f f of composite materials with four different introduced materials were calculated. The results show that the e 15 e f f of SiO2 /LiNbO3 composite piezoelectric material was mostly sensitive to an increase in the width of introduced SiO2 material. Simultaneously, the simulation of a laterally excited bulk wave resonator (XBAR) with SiO2 /LiNbO3 composite material was also carried out to verify the change in the K t 2 originating from the variation in e 15 e f f . The achievable n79 filter using the SiO2 /LiNbO3 composite material demonstrates the promising prospects of tuning K t 2 by introducing different materials into a LiNbO3 piezoelectric matrix. [ABSTRACT FROM AUTHOR]- Published
- 2022
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