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Highlights • A measurement method without relying on the sensor scale is proposed for the LSRM. • The proposed method uses the combination of the sensor output and a lookup table. • The proposed method is robust to amplitude variation of the sensor output. • The maximum position error of the prototype measurement system was 25 μm. Abstract This paper describes the position measurement and control of a thin and compact linear switched reluctance motor (LSRM) with a disposable-film mover. The paper proposes a position measurement method using the combination of the eddy current sensor output and a lookup table based on a previously measured information. The position measurement system based on the method is integrated into the developed LSRM to increase the disposability of the mover. The proposed method is robust to reproducible amplitude variation of the sensor output owing to the deformation of the mover. Experimental results showed that the measurement system can produce reliable position information, with a measurement error of up to 25 μm and a resolution that is better than 10 μm. Finally, the tracking performance of the control system using the measurement system as a feedback sensor is examined experimentally. [ABSTRACT FROM AUTHOR]

This paper describes a suitable motion system design that utilizes a thin and compact linear switched reluctance motor (LSRM) with a disposable-film mover. The motor features a simple structure that is easy to fabricate and install into existing and newly designed instruments. Made using readily available materials, the mover is considered disposable. To meet the objectives of a motion system, i.e., simplicity in terms of use and mover exchangeability, the motion performance should remain the same even when the mover is exchanged. To meet these objectives, it is desirable to provide controllers that are robust to changes to the movers, and it is important to clarify the limitations of the motion performance resulting from the different motor characteristics. Thus, using a controller designed for precise tracking, experiments were carried out to verify the robustness of the motion system against the influences of changes in the length and mass of the movers. The limitations of the motion performance were then formulated for systems with a small effective thrust force such as those used in the developed LSRM, and validated. Based on the results achieved, the range of additional mass specifically applied to maintain the same motion performance is clarified in the present paper.