1. Dual-Frequency Microwave Plasma Source Based on Microwave Coaxial Transmission Line.
- Author
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Chen, Chi, Fu, Wenjie, Zhang, Chaoyang, Lu, Dun, Han, Meng, and Yan, Yang
- Subjects
MICROWAVE transmission lines ,MICROWAVE plasmas ,PLASMA sources ,PLASMA density ,PLASMA confinement ,ELECTRON plasma - Abstract
Featured Application: In various microwave plasma fields, such as Microwave Plasma Chemical Vapor Deposition (MPCVD), the dual-frequency plasma source could be used to control plasma characteristics flexibly. A dual-frequency plasma source has many advantages in applications. In this paper, a dual-frequency microwave plasma source is presented. This microwave plasma source is based on a coaxial transmission line without the resonator, and it can be operated in a wide band frequency region. Two microwaves are inputted from two ports into the plasma reactor: one is used firstly to excite the plasma and the other one is used to adjust plasma characteristics. Based on the COMSOL Multiphysics simulation, the experiment is carried out. In the experimental investigation, the plasma electron density and electron temperature can be controlled, respectively, by feeding in different frequencies from the second port, causing the particles at different energy levels to present different frequencies. This exploratory research improves the operation frequency of dual-frequency microwave plasma sources from RF to microwave. [ABSTRACT FROM AUTHOR]
- Published
- 2021
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