Search

Micro milling is a common process for micro structuring component surfaces, e.g. for manufacturing material measures that are applied for the calibration of areal surface topography measuring instruments. In this study, the surface topography of material measures is investigated using various evaluation approaches (integral approach, correlation analysis, Fourier analysis). In doing so, confocal microscope and atomic force microscope measurements are used to compare cutting parameters for the appropriate micro milling process. For two milling tools it is shown that the surface topography depends primarily on the spindle speed and much less on the feed per tooth whereas differences between the milling tools are observed in the tendency to form substructures.

The trend towards hybrid materials consisting of metals and polymers is strongly driven by requirements such as weight reduction and improved functionality. A crucial step towards new hybrid materials is the advancement of joining technology. While metals and polymers are currently often joined using adhesives, this technology has major drawbacks such as long process cycle time, low robustness with regard to changes of the material composition, and are almost impossible to recycle, a point which is becoming increasingly important. A promising joining method is thermal direct joining of metals and thermoplastic polymers due to its fast cycle time, its robustness of the process and the absence of duroplastic adhesives. Direct joining requires surface treatment of the metallic joining partner prior to the thermal joining process to achieve a sufficiently high contact strength. It is known that laser-induced topologies on the metal surface are beneficial with regard to contact strength of the joints. Designing a joint based on laser structured metals requires a fundamental understanding of the interface interactions. The present paper focuses on the influence of surface enlargement on the joint strength. Laser pretreatment was utilized to generate surface structures with specific surface enlargement on the metallic joining partner. The pretreated metallic parts were subsequently joined with a thermoplastic polymer by injection molding. The joint strength was investigated in single lap shear tests. The key finding is that the contact strength increases almost linearly with the surface area within the tested parameter range, while the structure geometry parameters have only a minor influence. This may help as a design guideline for future adhesive-free hybrid material joining technologies.

An increase of the service life of tribological systems subjected to dynamic-mechanical loads is important for numerous mechanical applications. The present study deals with the impact of several micro-structured surface topographies of graded Cr/CrNx/(Cr,W)Cy/a-C:H:W/a-C:H PVD hard coatings on their friction and wear behavior. The coatings were applied by reactive magnetron sputtering on a hardened 1.2379 steel substrates and subsequently micro-structured by laser ablation using a picosecond laser. Pin-on-disc tests were carried out against aluminum under both oil lubrication and dry conditions. The diameters of the micro-dimples were varied between 50 μm, 100 μm and 150 μm at a constant degree of coating coverage of about 60 %. The coefficients of friction and wear were determined after 20,000 cycles by confocal laser-scanning microscope (CLSM), scanning electron microscopy (SEM) and by energy-dispersive X-ray spectroscopy (EDX) to analyze possible transfer layer formations.

To address the significant subsurface damage of a workpiece after grinding by a coarse-grained wheel, the research on nanosecond ultraviolet laser micro-structuring of a coarse-grained diamond-grinding wheel was carried out, and the influence of process parameters on the depth and width of the groove, the micro-structuring efficiency, and the qualification rate of micro-structured grains were explored. The results show that the single-pass laser circular cutting method cannot achieve the desired groove size even with an arbitrarily large number of scanning cycles. The multi-pass laser circular cutting method can effectively improve the micro-structuring efficiency, and the width and depth of the groove increased and decreased respectively with the increase of the pass spacing. The qualification rate of micro-structured grains was related to the groove spacing, the distribution of the grains on the surface of the grinding wheel, the grain diameter, and the groove width. Under the assumption that the grains were evenly distributed on the surface of the grinding wheel, the qualification rate first increased and then decreased with the increase of the groove spacing.

Multibeam processing with ultra-short pulsed lasers attracts increasing attention as upscaling technology for laser material processing. While static multibeam approaches for periodic patterns are already entering industry applications, multibeam solutions for the processing of arbitrary geometries are still missing. The demand for high speed, high volume structuring of large surfaces exists, e.g. for molding applications, electronics and photovoltaic, and pushes the development of high-power ultra-short pulsed lasers and the corresponding beam handling systems. To gain the flexibility to process arbitrary structures with a multibeam setup, a flexible, individual control of each beam in the multi-beam bundle needs to be realized. This requires significant control of the different modulators typically combined with a galvanometer-scanner based processing setup. A concept for such an adapted processing system is discussed, incorporating acusto-optic modulators for flexible beam switching and a Field Programmable Gate Array for real-time control. A concept to compensate optical aberrations is introduced, and the required algorithms to generate the control commands for the galvanometer scanner and acusto-optic modulators from the provided structure is demonstrated. Finally, the implementation of the real-time scanner-position based switching of the acusto-optic modulators is presented.

Electronic skin (e-skin), which is an electronic surrogate of human skin, aims to recreate the multifunctionality of skin by using sensing units to detect multiple stimuli, while keeping key features of skin such as low thickness, stretchability, flexibility, and conformability. One of the most important stimuli to be detected is pressure due to its relevance in a plethora of applications, from health monitoring to functional prosthesis, robotics, and human-machine-interfaces (HMI). The performance of these e-skin pressure sensors is tailored, typically through micro-structuring techniques (such as photolithography, unconventional molds, incorporation of naturally micro-structured materials, laser engraving, amongst others) to achieve high sensitivities (commonly above 1 kPa−1), which is mostly relevant for health monitoring applications, or to extend the linearity of the behavior over a larger pressure range (from few Pa to 100 kPa), an important feature for functional prosthesis. Hence, this review intends to give a generalized view over the most relevant highlights in the development and micro-structuring of e-skin pressure sensors, while contributing to update the field with the most recent research. A special emphasis is devoted to the most employed pressure transduction mechanisms, namely capacitance, piezoelectricity, piezoresistivity, and triboelectricity, as well as to materials and novel techniques more recently explored to innovate the field and bring it a step closer to general adoption by society.

Metallic samples with unique micro- and nano-scale surface structures can easily be fabricated with Direct Laser Interference Patterning. Like in all laser processes, the material interacts with the laser radiation and as a result, thermal effects occur. These effects have a significant influence on the resulting quality of the surface patterns. In this study, the thermal effects occurring during Direct Laser Interference Patterning of stainless steel and aluminum sheets are investigated. The used experimental setup consisted of a picosecond pulsed laser source operating at 532 nm wavelength, combined with a two-beam interference optical head. An infrared camera in an off-axis position is used to detect the resulting thermal radiation of the laser process varying different process parameters such as laser power and repetition rate. The obtained results reveal a correlation between the recorded signal by the infrared camera and the reached surface quality. They show an impact of the thermal effects on the quality of the surfaces and the amount of solidified material on the resulting line-like pattern. Threshold values of the detected infrared signal detected are determined to classify the obtained surface conditions.

Fusions reactors have to handle numerous specifications before being able to show viable commercial operation, one of which is to find a proper Plasma Facing Material (PFM) which can withstand the high heat loads of several tens of megawatts per square meters combined with the pulse operation of a tokamak and many other problematics (Brezinsek et al 2017 Nucl. Fusion 57 116041). Nowadays, only tungsten is considered as a PFM for high heat flux areas of a tokamak divertor. Tungsten has been selected due to its favorable physical properties, but tungsten has a major drawback: it is brittle under temperatures typically used for water-cooled plasma-facing components (PFC). Under these temperatures the damage threshold due to thermal fatigue induced by ELM is very low, which will dramatically reduce the life-time of the tungsten PFC. The ANSYS simulations and experiments with a millisecond pulsed laser demonstrate a strongly improved ability to withstand thermal fatigue by micro-structuring of the tungsten surface with the help of 150–240 μm diameter tungsten fibres

In this study, we report on the optimization of the direct laser interference patterning process by applying the design of experiments approach. The periodic line-like microstructures of a 8.50 &micro, m spatial period were fabricated by a two-beam interference setup with nanosecond laser pulses, varying laser fluence, pulse overlap, and hatch distance. Central composite design with three factors and five levels was implemented to optimize the required number of experiments. The experimental and numerical results show the impact of various structuring process parameters on surface uniformity. The responses measured are the structure height, height error, and waviness of the pattern. An analysis of the microstructures on the patterned surface was conducted by confocal microscopy and scanning electron microscopy. A 3D-characterization method based on morphological filtering, which allows a holistic view of the surface properties, was applied, and a new qualification scheme for surface microstructures was introduced. Empirical models were also developed and validated for establishing relationships between process parameters and performance criteria. Multi-objective optimization was performed to achieve a minimal value of structure height errors and waviness.

Roll-to-Roll microreplication combines the precision of hot embossing with continuous cost efficient replication on polymer films on large scale. For a viable realisation of this process, the main challenge for Roll-to-Roll hot embossing is the transfer from conventional flat silicon based micro structuring technology, to curved, large scale surfaces on continuously working rolls. This article presents lithography and electroplating based fabrication method of seamless microstructured sleeves and the Roll-to-Roll microreplication in a selection of high performance polymers like PEEK, LCP, PTFE, FEP, PSU and metal films such as aluminum and copper.

In both, laboratory and industry, tremendous attention is paid to discover an effective technique to produce uniform, controllable and (super) hydrophilic surfaces over large areas that are useful in a wide range of applications. In this investigation, by combing porous anodic alumina ( PAA ) film with nano-structures and microarray of aluminum, the hydrophilicity of hybrid nano-micro structure has been significantly improved. It is found some factors can affect the hydrophilicity of film, such as the size and aspect ratio of microarray, the thickness of nano- PAA film etc. Comparing with pure nano- PAA films and microarray, the hybrid nano-micro structure can provide uniform surface with significantly better hydrophilicity. The improvement can be up to 84%. Also, this technique exhibits good stability and repeatability for industrial production. By optimizing the thickness of nano- PAA film and aspect ratio of micro-structures, super-hydrophilicity can be reached. This study has obvious prospect in the fields of chemical industry, biomedical engineering and lab-on-a-chip applications.

Über die gezielte Einstellung der Oberflächenfeingestalt von Umformwerkzeugen lassen sich Prozesse wie das Mikrotiefziehen von höchstfesten Blechen präziser steuern. Als vielversprechender Werkzeugwerkstoff bietet sich monokristalliner Diamant aufgrund der hohen Härte und wegen seinem geringen chemischen Verschleiß gegenüber ausgesuchten Metallen an. Das ultraschallunterstützte Reibungspolieren wurde für die Übertragung kleinster Strukturen in mono- und polykristalline Diamanten entwickelt und wird in diesem Fachbeitrag vorgestellt. A selective surface structure adjustment of forming dies allows to control and improve forming processes like micro deep drawing of high strength sheet metals. Single crystal diamond appears as a promising mold material due to its high hardness and chemical inertness against selected metals. An ultrasonic assisted friction polishing process was developed to transfer micro structures into the surface of mono- and polycrystalline diamonds which is presented in this article.

Polymer optics have gained increasing importance in recent years. With advancing requirements for the optical components, the fabrication process remains a challenge. In particular, the fabrication of the mold inserts for the replication process is crucial for obtaining high-quality optical components. This review focuses on fabrication technologies for optical mold inserts. Thereby, two main types of technologies can be distinguished: fabrication methods to create mold inserts with optical surface quality and methods to create optical microstructures. Since optical mold inserts usually require outstanding form accuracies and surface qualities, a focus is placed on these factors. This review aims to give an overview of available methods as well as support the selection process when a fabrication technology is needed for a defined application. Furthermore, references are given to detailed descriptions of each technology if a deeper understanding of the processes is required.

High precision multibeam processing is a useful approach to increase the productivity of high precision laser material processing by means of ultrashort pulsed (USP) laser radiation. In the field of micro- and nanostructuring multibeam ultrashort pulsed laser processing attracts increasing attention due to its ability to generate periodic pattern like filters within an economically reasonable time of up to 12.000 holes/sec. Thus, this technology has become relevant for applications in the filtration industry and biotech industry. The developed multibeamscanner (MBS) is capable of drilling holes with extremely small outlet diameters (< 1μm) into various materials with a customized arrangement and a density of more than 10.000 holes per mm². The aim is to investigate how the exit diameter of single-digit sized holes can be further reduced using the multibeamscanner and whether an increase in productivity is possible.

Ziel dieser Arbeit ist es, Erkenntnisse ��ber die Auswirkungen der System- und der Stellgr����en auf die Prozess- und die resultierenden Wirkgr����en eines mechanischen Oberfl��chenbearbeitungsprozesses, dem sogenannten maschinellen Oberfl��chen-h��mmern (engl. Machine Hammer Peening - MHP), zu gewinnen. Das Verfahren basiert auf einem oszillierenden Hammerkopf, der wiederholt auf eine Werkst��ckoberfl��che trifft. Eine Aktorik, welche die Hammerkopfbewegung ausf��hrt, wird an einer Werkzeugmaschine oder einem Roboter befestigt und entlang einer vorgegebenen Bahn gef��hrt. Gem���� der VDI 3416 verwendet die Technologie ein Aktorsystem, um die Oberfl��chenrauheit zu reduzieren, die Oberfl��chenh��rte zu steigern und oberfl��chennahe Druckeigenspannungen zu erzeugen. Dar��ber hinaus wird in dieser Arbeit ein umfassendes Verst��ndnis des gesamten Bearbeitungsprozesses, basierend auf Maschinenuntersuchungen sowie dem Vergleich verschiedener MHP-Aktorsysteme, geschaffen. Um jedoch gezielte Oberfl��chenstrukturen zu erreichen, ist die Kopplung zwischen der Dynamik der Werkzeugmaschine oder dem Robotersystem und der Hammerkopfbewegung erforderlich, welche in dieser Arbeit genauer betrachtet wird. Aufgrund der NC-gesteuerten Positionierung und der pr��zisen Werkzeugf��hrung zeigt der MHP-Prozess auch die F��higkeit unter der Anwendung funktional gestalteter Werkzeuge definierte Mikrostrukturen auf einer Werkst��ckoberfl��che herzustellen. Im Gegensatz zu Beschichtungstechniken zur Funktionalisierung von Oberfl��chen erfolgt die Herstellung durch einen Mikroumformprozess. Diese Tatsache, in Kombination mit der M��glichkeit der Phasenumwandlung des Kristallgitters einer metastabilen austenitischen CrNi Legierung hin zu einer martensitischen Struktur durch den Einsatz des genannten Verfahrens, birgt gro��es Potenzial dieser Technologie. Um die Eignung eines piezoelektrischen Aktors zur Herstellung von Mikrostrukturen zu ��berpr��fen, werden Experimente am Warmarbeitsstahl X38CrMoV5-1 (1.2343) durchgef��hrt. Neben der Strukturierung der Oberfl��che wird die durch plastische Verformung induzierte Phasenumwandlungen an einem metastabilen austenitischen CrNi Werkstoff X5CrNi18 10 (1.4301) untersucht. Experimentelle Untersuchungen werden an einem Roboter sowie an Fr��sbearbeitungszentren durchgef��hrt. Als Aktoriken sind ein elektromagnetisches, ein pneumatisches, sowie ein piezoelektrisches Aktorsystem Bestandteil der Untersuchungen. Letzteres dient zur Herstellung mikrostrukturierter Oberfl��chen. In einem nachgelagerten Spritzgussprozess wird gezeigt, dass die Oberfl��chen am Kunststoff-Formteil wasserabweisende Eigenschaften aufweisen. Im Bereich der induzierten Phasenumwandlungen eines CrNi Werkstoffes kann in den oberen Schichten des Werkst��cks eine Phasenumwandlung von einer metastabilen austenitischen in eine martensitische Phase erreicht werden. Die in diesem Projekt erzielten Ergebnisse zeigen das Potenzial f��r eine erweiterte Anwendung von mechanischen Oberfl��chenbehandlungen, wie z.B. dem maschinellen Oberfl��chenh��mmern., The objective of this research is to gain knowledge about the effects of the system- and the independent variables on the dependent variables and the resulting material properties of a mechanical surface treatment process, called machine hammer peening (MHP). MHP is based on an oscillating hammer head which strikes repeatedly on a workpiece surface. The actuator, which provides the tool movement, is attached to a machine tool or a robot in order to treat the surface with well-directed impacts. According to VDI 3416, the technology uses an actuator system to reduce surface roughness, increase surface hardness, and induce near surface compressive residual stresses. Moreover, a comprehensive understanding of the entire machining process, based on machine investigations as well as the comparison of different MHP actuators, is created in this work. However, to achieve distinctively oriented surface structures and patterns the coupling between the tool path motion and the actuator motion dynamics is required. When producing defined surface structures to influence the surface integrity by the use of MHP, the acceleration of the machining system has to be considered. Apart from the named surface properties, structured tools can also be applied for surface treatment processes to create defined surface textures. In the past, these surface properties were achieved by advanced coatings or additional finishing technologies. While both work, they have their limitations. Coatings wear off over time. This fact, in combination with the possibility of phase transformation of the crystal lattice of a processed metastable austenitic to martensitic structure by the application of machine hammer peening, contains great potential. For this purpose, a coupling between the impact frequency of the MHP-system and the speed distribution on the tool path must be realized. Along with adapted NC-controlled motion of the machining system, a predictable sequence of contacts between the tool and the workpiece can be achieved. Further, to verify the suitability of an investigated piezoelectric actuator to create microstructures, experiments are carried out on the hot work tool steel X38CrMoV5-1 (1.2343). In addition to surface texturing, the deformation induced phase transformations on a metastable austenitic CrNi material X5CrNi 18-10 (1.4301) is investigated. As a result, it is possible to create deterministic patterns on the surfaces of workpieces and influence the surface characteristics. Experimental investigations have been performed using a KUKA robot KR30-3 equipped with an electromagnetic actuator system. Another application for a vibration-based process was shown by creating micro-structured surfaces with a piezoelectric actuator for a subsequent mold injection process which show hydrophobic surface conditions on the plastic molded part. Finally, due to plastic deformation of the crystalline steel material, as caused by machine hammer peening treatment in the upper layers of the workpiece, phase transformations may be achieved, from a metastable austenitic phase to a martensitic phase. The results obtained in this project show the potential for expanded application of mechanical surface treatments, like machine hammer peening.

Textured metallic parts with multiple-scaled micro-structures have significant advantages for anti-counterfeit applications. For this purpose, the development of an automatized micromachining laser-platform is introduced, which is capable of handling different laser based fabrication methods including direct laser writing (DLW) and direct laser interference patterning (DLIP), using only one laser source (Nd:YAG laser, 1064 nm wavelength, 500 ps pulse duration). Using DLW, line, cross-like and rectangular structures with length scales from 50 to 150 µm were produced, while DLIP was used to produce line-like patterns structures, with 3.7 and 25 µm spatial periods. In addition, laser induced periodic surface structures (LIPSS) were also combined and thus obtaining hierarchical patterns with three different length scales in one process. Finally, additional samples were automatically structured to produce examples of definable security features at the touch of a button. The surface topography of the treated samples is analyzed using scanning electron microscopy, optical microscopy and white light interferometry methods.

This work deals with the process behavior of laser-induced thermochemical material removal of self-passivation metallic materials in order to enable a stable and process reliable micro structuring. The main focus hereby is on the identification of the causes and their influencing factors for the origin of discontinuities in process quality. The results show that laser-induced gas bubble formation, both by boiling of the electrolyte and by reaction-induced release of hydrogen, is a major contributor of the disruption of material removal. With the achieved knowledge and the model-based description of the removal process, suitable machining parameters for a high-quality and disturbance-free processing can be identified.

Die Technologie des elektrochemischen Abtragens unter Verwendung ultrakurzer Spannungspulse (��PECM) bietet gro��es Potential f��r die Bearbeitung modernster Werkstoffe und die Fertigung kleinster Geometrien. Auf dem Prinzip der Elektrolyse basierend, kommt es w��hrend der Bearbeitung zu keinem physischen Kontakt zwischen Werkzeug und Werkst��ck sondern zum L��sen von Atomen oder Molek��len in einem elektrisch leitenden Medium - dem Elektrolyten. Dadurch k��nnen hartspr��de Metalle aber auch metallische Schichtverbunde wie sie in der Luft- und Raumfahrt eingesetzt werden thermisch und mechanisch neutral bearbeitet werden. Der Einsatz von ultrakurzen Spannungspulsen erm��glicht die Fertigung von feinsten Strukturen im Mikrometerbereich, welche mit herk��mmlichen fertigungstechnischen Verfahren kaum noch zu realisieren sind. Durch Mikrostrukturierung von Bauteiloberfl��chen k��nnen deren physikalische Eigenschaften ver��ndert und dem Anwendungsfall entsprechend optimiert werden - man spricht von funktionalisierten Oberfl��chen. Im Zuge der Einbindung dieses Fertigungsverfahrens in den laufenden Forschungsbetrieb am Institut f��r Fertigungstechnik und Hochleistungslasertechnik der Technischen Universit��t Wien gilt es, den Genauigkeitsbereich der Bearbeitungsmaschine der Firma ECMTEC mit Hilfe hochgenauer Messmittel und Messmethoden zu evaluieren. Im Zuge von experimentellen Untersuchungen zum elektrochemischen Abtragen werden mit Hilfe der ECM-Bearbeitungsmaschine durch Umpolung des Elektrolyseprozesses Werkzeuge f��r die Mikrostrukturierung von Oberfl��chen gefertigt. Deren geometrische Formen sind so gew��hlt, dass damit unter anderem Werkst��ckoberfl��chen mit wasserabweisender bzw. hydrophober Funktion erzeugt werden k��nnen. Neben der Untersuchung der optimalen Prozessparameter f��r die Werkzeugfertigung, bei der sowohl die positive als auch die negative Elektrode aus Wolfram bestehen, werden auch Experimente an dem Warmarbeitsstahl X37CrMoV5-1 (1.2343) durchgef��hrt. Die Oberfl��che dieses Materials soll nach mikrostruktureller, elektrochemischer Bearbeitung besonderen physikalischen Anforderungen gen��gen - in diesem Fall einen hohen Grad an Hydrophobie erreichen. Neben der geometrischen Form muss der elektrochemische Prozess je nach Materialpaarung (Werkzeug und Werkst��ck) ��ber die Prozessparameter und den Elektrolyten optimiert werden., The technology of electrochemical dissolution via use of ultra short voltage pulses (��PECM) offers great potential for machining of high-tech materials and manufacturing of smallest structures. Based on the principle of electrolysis, there is no physical contact between the tool and the workpiece electrodes, but instead dissolution of atoms and molecules takes place in an electro conductive medium named electrolyte. By this means it is possible to machine brittle materials as well as metallic composite materials which are commonly used in aerospace applications in a thermally and mechanically neutral fashion. The use of ultra short voltage pulses enables the machining of finest structures in the micro-meter-scale, which cannot easily be manufactured with other technologies. Micro-structuring of component surfaces can improve their physical and mechanical properties which then can be optimized according to their application ��� one speaks of functionalized surfaces. In the course of integrating this manufacturing technology into the ongoing research operation at the Institute for Production Engineering and Laser Technology at the Vienna University of Technology, it is necessary to evaluate the precision range of the ECMTEC machine tool via use of highly accurate measuring equipment and methods. In the course of experimental investigations, tool electrodes for the micro-structuring of surfaces are produced by reversing the electrolysis process using the same machine tool. Their geometric shapes are selected in such a way that workpiece surfaces with water-repellent properties can subsequently be produced. In addition to the investigation of the optimal process parameters for the production of tool electrodes, in which both the positive and the negative electrode are made of pure tungsten, experiments are also carried out on the hot working steel 1.2343 (X37CrMoV5-1). Due to the microstructural electochemical processing the materials��� surface shall meet a special physical requirement, which is a high degree of hydrophobicity. In order to achieve the therefore required micro structures, the electrochemical process has to be optimized by appropriate selection of process parameters and the electrolyte depending on the material pairing (tool and workpiece).

A technology for the direct integration of lead-zirconate-titanate (PZT) fiber arrays into micro structured aluminum sheets is presented. The permanent clamping between the micro structured carrier material and the piezoceramic is achieved using a joining by forming process. Potential applications for produced piezo-metal composites are structural health monitoring, active noise reduction, or smart structures. The manufacturing steps of the piezometal-module are explained in detail. In order to reduce the necessary forming force for the micro structuring of the aluminum sheets, a warm micro forming process is investigated and the influences upon the achieved geometric precision and the necessary forming force are discussed. During the joining process, impedance spectroscopy is utilized as in situ method for process control and failure mode detection. For the joining process, the tool is equipped with miniaturized test probes to temporarily contact the piezo transducer. As a result, the joining process can be monitored and controlled based on the inherent sensor function of the piezoceramics. Moreover, the final capsuling of the active elements with thin aluminum foils through ultrasonic welding is described to protect the piezoceramics against mechanical loads and contact.

The piezoelectric ceramic PZT, lead zirconate titanate, is the most spread material to generate ultrasound in medical and technical applications. Thereby frequencies between 30 MHz and 100 MHz require ceramic thicknesses between 50 μm and 20 μm. The presented gas flow sputtering process permits to deposit PZT of this thickness with a sputtering rate of 100 nm/min at temperatures between 520 °C and 550 °C. The PZT shows a typical columnar structure with a piezoelectric coefficient d33f of about 500 pm/V. An example for the fabrication ultrasound arrays with this sputtering process and lithographic structuring is given.

Laser radiation is used, among others, for surface treatment of various materials. At the Institute of Optoelectronics, under the direction of the late Professor Jan Marczak, a number of works in the field of laser materials processing were performed. Among them special recognition deserves flagship work of Professor Jan Marczak: implementation in Poland laser cleaning method of artworks. Another big project involved the direct method of laser interference lithography. These two projects have already been widely discussed in many national and international scientific conferences. They will also be discussed at SLT2016. In addition to these two projects in the Laboratory of Lasers Applications many other works have been carried out, some of which will be separately presented at the SLT2016 Conference. These included laser decorating of ceramics and glass (three projects completed in cooperation with the Institute of Ceramics and Building Materials), interference structuring medical implants (together with the Warsaw University of Technology), testing the adhesion of thin layers (project implemented together with IFTR PAS), structuring layers of DLC for growing endothelial cells (together with IMMS PAS), engraving glass for microfluidic applications, metal marking, sapphire cutting and finally the production of microsieves for separating of blood cells.