1. Nano-machining for advanced X-ray crystal optics
- Author
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Matej Jergel, Patrik Vagovic, Yuriy Halahovets, Peter Siffalovic, Jozef Keckes, Zdenko Zápražný, Marek Mikloška, Igor Maťko, Claudio Ferrari, and Dušan Korytár
- Subjects
Surface (mathematics) ,nanomachining x-ray crystal optic ,Optics ,Materials science ,Machining ,Positioning system ,business.industry ,Surface roughness ,Development (differential geometry) ,Crystal optics ,Crystal structure ,business ,Diamond tool - Abstract
We present our recent technological achievements in development of the nano-machining of active X-ray crystal optics surfaces. This technique uses a single crystal diamond tool with extremely precise and temperature stabilized positioning system. We can prepare various simple (flat, spherical, cylindrical) as well as more complex free-form surfaces (including aspherical ones). The objective is to prepare high-quality surfaces of the desired shape with sub-nanometer surface roughness and low sub-surface damage of the crystal lattice. The final surface roughness of a flat Ge surface below 0.4 nm (RMS) was achieved for a very slow regime of the processing using feed rates
- Published
- 2016
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