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The purpose of the work is to research the planar source of 14C with large size by the absorbability of the anodizing membrane. The adsorption of 14C on the anodizing membrane with thickness of 4 to 12 μm were investigated. The adsorption of 14C and the uniformity of the planar source were investigated on the volume of 14C solution. The specific activity of 14C was investigated on adsorption of 14C. The fastness, the uniformity and the surface emission rate of the planar source of 14C were measured. The result shows that the uniformity of the planar source (100 mm×150 mm) of14C is precede 10%. The plateau length is 400 V, the slope of the plateau is 0.3% per 100 V. The threshold correction is 0.2%. The uncertainty of 14C source measurement is 2% (k=2). The technical parameters of the developed plane source 14C can meet the requirements of relevant standards.