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This paper reports on the integration of MOCVD SBT based stacked ferroelectric capacitors in a 0.35 μm CMOS technology for embedded FeRAM, using a ferroelectric capacitor (FeCap) that is scalable to a 3D configuration. The electrical parameters of the CMOS devices with and without FeCap integration are presented. No significant shifts of the CMOS characteristics are noticed after FeCap integration. Also the effects of the CMOS processing on the FeCaps are discussed. There is no degradation of the hysteresis loops of the FeCaps throughout the CMOS back-end-of-line processing, which proves that the integrated encapsulation layer effectively prevents any hydrogen induced damage. Another key element in the successful integration of stacked ferroelectric devices is the conductive oxygen barrier, which protects the plugs from oxidation. A low contact resistance and a high yield are obtained on plug contacts covered by the oxygen barrier. Also damage free etching is a critical issue in FeRAM integration. Excellent results are presented for the etch process to form the contacts to the electrodes. [ABSTRACT FROM AUTHOR]

The impact of material/process interactions on low temperature CVD-O3 low-k dielectric film properties are presented. The film under investigation is deposited following a three-step process consisting of a low temperature chemical vapor deposition (CVD), an ex situ high temperature cure in a controlled ambient and a plasma treatment to seal the porous surface of the dielectric. In this paper, the extent to which the air break exposure, the cure, the nature of the plasma and the substrate can affect the material properties is investigated. The influence of the resist stripping plasmas on the material sealing and the mechanical properties during integration is also discussed. Finally, the dielectric k-value as extracted from damascene structures using Raphael™ simulations is presented and discussed. [Copyright &y& Elsevier]

Proliferation of lymphocytes from donors belonging to 4 age groups (2, 25, 45 and 80 years) and exposed, in vitro, to 0 or 2 Gy of X-rays was studied in cultures stimulated by 3 different mitogens. Our results show that these 3 factors (age, irradiation and mitogen) play a role in the frequencies of cells observed in first, second, third or subsequent cell division in 48 or 72 h cultures.