Author: "van Bilsen, Frank" - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"van Bilsen, Frank"' showing total 7 results

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7 results on '"van Bilsen, Frank"'

1. Lithography and yield sensitivity analysis of SRAM scaling for the 32nm node

Author: Nackaerts, Axel, primary, Verhaegen, Staf, additional, Dusa, Mircea, additional, Kattouw, Hans, additional, van Bilsen, Frank, additional, Biesemans, Serge, additional, and Vandenberghe, Geert, additional
Published: 2007
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2. Advances in process overlay: alignment solutions for future technology nodes

Author: Megens, Henry, primary, van Haren, Richard, additional, Musa, Sami, additional, Doytcheva, Maya, additional, Lalbahadoersing, Sanjay, additional, van Kemenade, Marc, additional, Lee, Hyun-Woo, additional, Hinnen, Paul, additional, and van Bilsen, Frank, additional
Published: 2007
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3. Overlay performance with advanced ATHENA alignment strategies

Author: Huijbregste, Jeroen, primary, van Haren, Richard J. F., additional, Jeunink, Andre, additional, Hinnen, Paul C., additional, Swinnen, Bart, additional, Navarro, Ramon, additional, Simons, Geert, additional, van Bilsen, Frank, additional, Tolsma, Hoite, additional, and Megens, Henry J. L., additional
Published: 2003
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4. Lithography and yield sensitivity analysis of SRAM scaling for the 32nm node.

Author: Nackaerts, Axel, Verhaegen, Staf, Dusa, Mircea, Kattouw, Hans, van Bilsen, Frank, Biesemans, Serge, and Vandenberghe, Geert
Published: 2007
Full Text: View/download PDF

5. Overlay performance with advanced ATHENA alignment strategies.

Author: Huijbregste, Jeroen, van Haren, Richard J. F., Jeunink, Andre, Hinnen, Paul C., Swinnen, Bart, Navarro, Ramon, Simons, Geert, van Bilsen, Frank, Tolsma, Hoite, and Megens, Henry J. L.
Published: 2003
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6. Extended ATHENA alignment performance and application for the 100-nm technology node

Author: Navarro, Ramon, primary, Keij, Stefan, additional, den Boef, Arie J., additional, Schets, Sicco, additional, van Bilsen, Frank, additional, Simons, Geert, additional, Schuurhuis, Ron, additional, and Burghoorn, Jaap, additional
Published: 2001
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7. Extended ATHENA alignment performance and application for the 100-nm technology node.

Author: Navarro, Ramon, Keij, Stefan, den Boef, Arie J., Schets, Sicco, van Bilsen, Frank, Simons, Geert, Schuurhuis, Ron, and Burghoorn, Jaap
Published: 2001
Full Text: View/download PDF

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