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Design and fabrication of a novel tri-axis gyroscope with sensing diagonal-pendulums.
- Source :
-
Microsystem Technologies . Jan2015, Vol. 21 Issue 1, p163-168. 6p. - Publication Year :
- 2015
-
Abstract
- In this paper, we present a novel design of tri-axis gyroscope which consists of two diagonal-pendulum masses for lateral sensing, coupled with and enclosed in a traditional tuning fork driving frame. The diagonal-pendulums are driven to swing via tilted transforming beams as the driving frame oscillated in plane, and rotate around their torsional beam out-of-plane as orthogonal lateral angular rate applied. The symmetric arrangement of whole structure lowers mechanical complexity and the sensing way of 'one diagonal-pendulum for one lateral axis' eliminates sensing proof mass sharing which can effectively suppress the cross-talk effect. The prototype device has been successfully fabricated by using SOI-based bulk micromachining processes and vacuum packaged by Al-Ge eutectic bonding. The sensitivities for three axes are 4.83, 1.47 and 1.38 mV/(°/s), respectively, with nonlinearity of less 1 % and bandwidth of above 600 Hz. [ABSTRACT FROM AUTHOR]
- Subjects :
- *GYROSCOPES
*GYROSCOPIC instruments
*PENDULUMS
*BANDWIDTHS
*ALUMINUM alloys
Subjects
Details
- Language :
- English
- ISSN :
- 09467076
- Volume :
- 21
- Issue :
- 1
- Database :
- Academic Search Index
- Journal :
- Microsystem Technologies
- Publication Type :
- Academic Journal
- Accession number :
- 100274979
- Full Text :
- https://doi.org/10.1007/s00542-014-2382-6