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Measurement of six-degree-of-freedom planar motions by using a multiprobe surface encoder.
- Source :
-
Optical Engineering . Dec2014, Vol. 53 Issue 12, p1-7. 7p. - Publication Year :
- 2014
-
Abstract
- Amultiprobe surface encoder for opticalmetrology of six-degree-of-freedom(six-DOF) planar motions is presented. The surface encoder is composed of an planar scale grating with identical microstructures in - and -axes and an optical sensor head. In the optical sensor head, three paralleled laser beams were used as laser probes. After being divided by a beam splitter, the three laser probes were projected onto the scale grating and a reference grating with identical microstructures, respectively. For each probe, the first-order positive and negative diffraction beams along the - and -directions from the scale grating and from the reference grating superimposed with each other and four pieces of interference signals were generated. Three-DOF translational motions of the scale grating Δx, Δy, and Δz can be obtained simultaneously from the interference signals of each probe. Three-DOF angular error motions θx, θy, and θz can also be calculated simultaneously from differences of displacement output variations and the geometric relationship among the three probes. A prototype optical sensor head was designed, constructed, and evaluated. Experimental results verified that this surface encoder could provide measurement resolutions of subnanometer and better than 0.1 arc sec for three-DOF translational motions and three-DOF angular error motions, respectively. [ABSTRACT FROM AUTHOR]
- Subjects :
- *DEGREES of freedom
*OPTICAL sensors
*DETECTORS
*LASER beams
Subjects
Details
- Language :
- English
- ISSN :
- 00913286
- Volume :
- 53
- Issue :
- 12
- Database :
- Academic Search Index
- Journal :
- Optical Engineering
- Publication Type :
- Academic Journal
- Accession number :
- 100326970
- Full Text :
- https://doi.org/10.1117/1.OE.53.12.122405