Cite
Scheduling of Single-Arm Multi-cluster Tools With Wafer Residency Time Constraints in Semiconductor Manufacturing.
MLA
Zhu, QingHua, et al. “Scheduling of Single-Arm Multi-Cluster Tools With Wafer Residency Time Constraints in Semiconductor Manufacturing.” IEEE Transactions on Semiconductor Manufacturing, vol. 28, no. 1, Feb. 2015, pp. 117–25. EBSCOhost, https://doi.org/10.1109/TSM.2014.2375880.
APA
Zhu, Q., Wu, N., Qiao, Y., & Zhou, M. (2015). Scheduling of Single-Arm Multi-cluster Tools With Wafer Residency Time Constraints in Semiconductor Manufacturing. IEEE Transactions on Semiconductor Manufacturing, 28(1), 117–125. https://doi.org/10.1109/TSM.2014.2375880
Chicago
Zhu, QingHua, NaiQi Wu, Yan Qiao, and MengChu Zhou. 2015. “Scheduling of Single-Arm Multi-Cluster Tools With Wafer Residency Time Constraints in Semiconductor Manufacturing.” IEEE Transactions on Semiconductor Manufacturing 28 (1): 117–25. doi:10.1109/TSM.2014.2375880.