Transfer of self-aligned spacer patterns for single-digit nanofabrication.

MLA

Gregory S Doerk, et al. “Transfer of Self-Aligned Spacer Patterns for Single-Digit Nanofabrication.” Nanotechnology, vol. 26, no. 8, Feb. 2015, p. 1. EBSCOhost, https://doi.org/10.1088/0957-4484/26/8/085304.

APA

Gregory S Doerk, He Gao, Lei Wan, Jeff Lille, K C Patel, Yves-Andre Chapuis, Ricardo Ruiz, & Thomas R Albrecht. (2015). Transfer of self-aligned spacer patterns for single-digit nanofabrication. Nanotechnology, 26(8), 1. https://doi.org/10.1088/0957-4484/26/8/085304

Chicago

Gregory S Doerk, He Gao, Lei Wan, Jeff Lille, K C Patel, Yves-Andre Chapuis, Ricardo Ruiz, and Thomas R Albrecht. 2015. “Transfer of Self-Aligned Spacer Patterns for Single-Digit Nanofabrication.” Nanotechnology 26 (8): 1. doi:10.1088/0957-4484/26/8/085304.