Cite
A Feedback Controlled MEMS Nanopositioner for On-Chip High-Speed AFM.
MLA
Mohammadi, Ali, et al. “A Feedback Controlled MEMS Nanopositioner for On-Chip High-Speed AFM.” Journal of Microelectromechanical Systems, vol. 23, no. 3, June 2014, pp. 610–19. EBSCOhost, https://doi.org/10.1109/JMEMS.2013.2287506.
APA
Mohammadi, A., Fowler, A. G., Yong, Y. K., & Moheimani, S. O. R. (2014). A Feedback Controlled MEMS Nanopositioner for On-Chip High-Speed AFM. Journal of Microelectromechanical Systems, 23(3), 610–619. https://doi.org/10.1109/JMEMS.2013.2287506
Chicago
Mohammadi, Ali, Anthony G. Fowler, Yuen K. Yong, and S. O. Reza Moheimani. 2014. “A Feedback Controlled MEMS Nanopositioner for On-Chip High-Speed AFM.” Journal of Microelectromechanical Systems 23 (3): 610–19. doi:10.1109/JMEMS.2013.2287506.