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Evaluation of the electrical contact area in contact-mode scanning probe microscopy.

Authors :
Celano, Umberto
Hantschel, Thomas
Giammaria, Guido
Chandra Chintala, Ravi
Conard, Thierry
Bender, Hugo
Vandervorst, Wilfried
Source :
Journal of Applied Physics. 6/7/2015, Vol. 117 Issue 21, p214305-1-214305-5. 5p. 1 Diagram, 3 Graphs.
Publication Year :
2015

Abstract

The tunneling current through an atomic force microscopy (AFM) tip is used to evaluate the effective electrical contact area, which exists between tip and sample in contact-AFM electrical measurements. A simple procedure for the evaluation of the effective electrical contact area is described using conductive atomic force microscopy (C-AFM) in combination with a thin dielectric. We characterize the electrical contact area for coated metal and doped-diamond tips operated at low force (<200 nN) in contact mode. In both cases, we observe that only a small fraction (<10 nm2) of the physical contact (~100 nm2) is effectively contributing to the transport phenomena. Assuming this reduced area is confined to the central area of the physical contact, these results explain the sub-10 nm electrical resolution observed in C-AFM measurements. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
00218979
Volume :
117
Issue :
21
Database :
Academic Search Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
103090914
Full Text :
https://doi.org/10.1063/1.4921878