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Characterization of random rough surfaces by in-plane light scattering.
- Source :
-
Journal of Applied Physics . 9/1/1998, Vol. 84 Issue 5, p2571. 12p. 10 Diagrams, 2 Charts, 37 Graphs. - Publication Year :
- 1998
-
Abstract
- Presents information on a study conducted which examined the characteristics of silicon (Si) random rough surfaces, with focus on physics. Methodology used in the study; Details on the reciprocal space structure of the self-affine rough surface; Information on surface roughness parameters; Limitations in the determination of the roughness of parameters; Results of the study.
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 84
- Issue :
- 5
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 1050035
- Full Text :
- https://doi.org/10.1063/1.368419